Dr. Robert Kirchner
Dr. Robert Kirchner
TU Dresden (Germany)
Verified email at - Homepage
Cited by
Cited by
Novel 3D micro-and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers
A Schleunitz, VA Guzenko, M Messerschmidt, H Atasoy, R Kirchner, ...
Nano Convergence 1 (1), 7, 2014
Thermal reflow of polymers for innovative and smart 3D structures: A review
R Kirchner, H Schift
Materials Science in Semiconductor Processing 92, 58-72, 2019
High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps
N Chidambaram, R Kirchner, M Altana, H Schift
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2016
UV-NIL fabricated bio-inspired inlays for injection molding to influence the friction behavior of ceramic surfaces
M Mühlberger, M Rohn, J Danzberger, E Sonntag, A Rank, L Schumm, ...
Microelectronic Engineering 141, 140-144, 2015
Selective surface smoothening of polymer microlenses by depth confined softening
N Chidambaram, R Kirchner, R Fallica, L Yu, M Altana, H Schift
Advanced Materials Technologies 2 (5), 1700018, 2017
ZEP520A—A resist for electron-beam grayscale lithography and thermal reflow
R Kirchner, VA Guzenko, I Vartiainen, N Chidambaram, H Schift
Microelectronic Engineering 153, 71-76, 2016
Energy-based thermal reflow simulation for 3D polymer shape prediction using Surface Evolver
R Kirchner, A Schleunitz, H Schift
Journal of Micromechanics and Microengineering 24 (5), 055010, 2014
Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration
R Kirchner, VA Guzenko, M Rohn, E Sonntag, M Mühlberger, I Bergmair, ...
Microelectronic Engineering 141, 107-111, 2015
High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning
A Finn, B Lu, R Kirchner, X Thrun, K Richter, WJ Fischer
Microelectronic Engineering 110, 112-118, 2013
High-resolution grayscale patterning using extreme ultraviolet interference lithography
R Fallica, R Kirchner, H Schift, Y Ekinci
Microelectronic Engineering 177, 1-5, 2017
Mobility based 3D simulation of selective, viscoelastic polymer reflow using surface evolver
R Kirchner, H Schift
Journal of Vacuum Science & Technology B 32 (6), 06F701, 2014
Nanoimprint assisted inkjet printing to fabricate sub-micron channel organic field effect transistors
L Teng, M Plötner, A Türke, B Adolphi, A Finn, R Kirchner, WJ Fischer
Microelectronic Engineering 110, 292-297, 2013
Geometrical properties of multilayer nano-imprint-lithography molds for optical applications
A Finn, R Hensel, F Hagemann, R Kirchner, A Jahn, WJ Fischer
Microelectronic Engineering 98, 284-287, 2012
Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography
R Fallica, D Kazazis, R Kirchner, A Voigt, I Mochi, H Schift, Y Ekinci
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2017
Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL
M Pianigiani, R Kirchner, E Sovernigo, A Pozzato, M Tormen, H Schift
Microelectronic Engineering 155, 85-91, 2016
Direct UV-Imprinting of Hybrid-Polymer Photonic Microring Resonators and Their Characterization
R Kirchner, A Finn, R Landgraf, L Nueske, L Teng, M Vogler, WJ Fischer
Journal of Lightwave Technology 32 (9), 1674-1681, 2014
Stamp-and-repeat UV-imprinting of spin-coated films: Pre-exposure and imprint defects
R Kirchner, L Nüske, A Finn, B Lu, WJ Fischer
Microelectronic Engineering 97, 117-121, 2012
Chemical functional polymers for direct UV assisted nanoimprinting of polymeric photonic microring resonators
R Kirchner, MK Kaiser, B Adolphi, R Landgraf, WJ Fischer
physica status solidi (a) 208 (6), 1308-1314, 2011
How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses
R Kirchner, N Chidambaram, M Altana, H Schift
Proc. of SPIE Vol 10095, 1009507-1, 2017
Comparative study of resists and lithographic tools using the Lumped Parameter Model
R Fallica, R Kirchner, Y Ekinci, D Mailly
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2016
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