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Tae-Sun Yu
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Scheduling single-armed cluster tools with chamber cleaning operations
TS Yu, HJ Kim, TE Lee
IEEE Transactions on Automation Science and Engineering 15 (2), 705-716, 2017
432017
Scheduling dual-armed cluster tools with chamber cleaning operations
TS Yu, TE Lee
IEEE transactions on automation science and engineering 16 (1), 218-228, 2017
302017
Semiconductor manufacturing automation
TE Lee, HJ Kim, TS Yu
Springer Handbook of Automation, 841-863, 2023
212023
Minimization of waiting time variation in a generalized two-machine flowshop with waiting time constraints and skipping jobs
TS Yu, HJ Kim, TE Lee
IEEE Transactions on Semiconductor Manufacturing 30 (2), 155-165, 2017
212017
Scheduling proportionate flow shops with preventive machine maintenance
TS Yu, JH Han
International Journal of Production Economics 231, 107874, 2021
182021
Scheduling dual-armed cluster tools for concurrent processing of multiple wafer types with identical job flows
SG Ko, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 16 (3), 1058-1070, 2018
182018
Flow shops with reentry: Reversibility properties and makespan optimal schedules
TS Yu, M Pinedo
European Journal of Operational Research 282 (2), 478-490, 2020
172020
Wafer delay analysis and workload balancing of parallel chambers for dual-armed cluster tools with multiple wafer types
SG Ko, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 18 (3), 1516-1526, 2021
152021
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations
TS Yu, TE Lee
International Journal of Production Research 58 (2), 434-447, 2020
142020
A new class of sequences without interferences for cluster tools with tight wafer delay constraints
Y Lim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 16 (1), 392-405, 2018
132018
Adaptive scheduling of cluster tools with wafer delay constraints and process time variation
Y Lim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 17 (1), 375-388, 2019
122019
Two-stage lot scheduling with waiting time constraints and due dates
TS Yu, HJ Kim, C Jung, TE Lee
2013 Winter Simulations Conference (WSC), 3630-3641, 2013
92013
Reachability tree-based optimization algorithm for cyclic scheduling of timed Petri nets
C Kim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 18 (3), 1441-1452, 2020
62020
Integrated scheduling of a dual-armed cluster tool for maximizing steady schedule patterns
W Kim, TS Yu, TE Lee
IEEE Transactions on Systems, Man, and Cybernetics: Systems 51 (12), 7282-7294, 2020
62020
Cleaning plan optimization for dual-armed cluster tools with general chamber cleaning periods
TG Lee, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering, 2022
32022
Feedback control of cluster tools: Stability against random time disruptions
C Kim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 19 (3), 2008-2015, 2021
32021
Optimization for robot operations in cluster tools for concurrent manufacturing of multiple wafer types
TS Yu, JH Lee, SG Ko
Journal of Industrial Technology 43 (1), 49-55, 2023
2023
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