| Flexible nanowiring of metal on nonplanar substrates by femtosecond‐laser‐induced electroless plating BB Xu, H Xia, LG Niu, YL Zhang, K Sun, QD Chen, Y Xu, ZQ Lv, ZH Li, ... Small 6 (16), 1762-1766, 2010 | 154 | 2010 |
| 3D micro-machined inductive contactless suspension: Testing and modeling VB Zhiqiu Lu, Kirill Poletkin, Bartjan den Hartogh, Ulrike Wallrabe Sensors and Actuators A: Physical 220, 134–143, 2014 | 44 | 2014 |
| A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics K Poletkin, Z Lu, W Ulrike, V Badiilta Journal of Microelectromechanical Systems, 2015 | 35 | 2015 |
| High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications XJ He, ZQ Lv, B Liu, ZH Li Sensors and Actuators A: Physical 188, 342-348, 2012 | 33 | 2012 |
| Stable dynamics of micro-machined inductive contactless suspensions K Poletkin, Z Lu, U Wallrabe, J Korvink, V Badilita International Journal of Mechanical Sciences 131, 753-766, 2017 | 31 | 2017 |
| PECVD SiO2/Si3N4 double layers electrets on glass substrate Z Chen, Z Lv, J Zhang IEEE Transactions on Dielectrics and Electrical Insulation 15 (4), 915-919, 2008 | 31 | 2008 |
| Performance characterization of micromachined inductive suspensions based on 3D wire-bonded microcoils Z Lu, K Poletkin, U Wallrabe, V Badilita Micromachines 5 (4), 1469-1484, 2014 | 27 | 2014 |
| Improving performance of the metal-to-metal contact RF MEMS switch with a Pt–Au microspring contact design B Liu, Z Lv, X He, M Liu, Y Hao, Z Li Journal of Micromechanics and Microengineering 21 (6), 065038, 2011 | 24 | 2011 |
| Polymer magnetic composite core boosts performance of three-dimensional micromachined inductive contactless suspension KV Poletkin, Z Lu, A Moazenzadeh, SG Mariappan, JG Korvink, ... IEEE Magnetics Letters 7, 1-3, 2016 | 21 | 2016 |
| Tunable magnetic metamaterial based multi-split-ring resonator (MSRR) using MEMS switch components X He, Z Lv, B Liu, Z Li Microsystem technologies 17, 1263-1269, 2011 | 17 | 2011 |
| Design optimization of an electromagnetic microlevitation system based on copper wirebonded coils Z Lu, F Jia, J Korvink, U Wallrabe, V Badilita Proceedings of the 2012 Power MEMS, Atlanta, GA, USA, 2-5, 2012 | 16 | 2012 |
| A qualitative technique to study stability and dynamics of micro-machined inductive contactless suspensions KV Poletkin, Z Lu, U Wallrabe, JG Korvink, V Badilita 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 13 | 2017 |
| A lateral RF MEMS capacitive switch utilizing parylene as dielectric X He, B Liu, Z Lv, Z Li Microsystem technologies 18, 77-85, 2012 | 12 | 2012 |
| A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch B Liu, Z Lv, Z Li, X He, Y Hao 2010 IEEE 5th International Conference on Nano/Micro Engineered and …, 2010 | 11 | 2010 |
| Hybrid electromagnetic and electrostatic micromachined suspension with adjustable dynamics K Poletkin, Z Lu, U Wallrabe, V Badilita Journal of Physics: Conference Series 660 (1), 012005, 2015 | 9 | 2015 |
| Electrothermally actuated RF MEMS capacitive switch with atomic layer deposited (ALD) dielectrics XJ He, ZQ Lv, B Liu, ZH Li 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 9 | 2011 |
| 3D micro-machined inductive suspensions with the lowest energy consumption K Poletkin, Z Lu, A Moazenzadeh, JG Korvink, U Wallrabe, V Badilita MikroSystemTechnik 2017; Congress, 1-3, 2017 | 5 | 2017 |
| Energy-aware 3D micro-machined inductive suspensions with polymer magnetic composite core KV Poletkin, Z Lu, A Moazenzadeh, SG Mariappan, JG Korvink, ... Journal of Physics: Conference Series 1052 (1), 012048, 2018 | 3 | 2018 |
| Novel multicontact radio frequency microelectromechanical system switch in high-power–handling applications 3 Xunjun, 4 Yilong Journal of Micro/Nanolithography, MEMS and MOEMS 10 (1), 011505-011505-9, 2011 | 3 | 2011 |
| A laterally driven capacitive RF MEMS switch using parylene as dielectric layer X He, Z Lv, B Liu, Z Li SENSORS, 2010 IEEE, 257-260, 2010 | 3 | 2010 |
