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Matti Putkonen
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Process for producing zirconium oxide thin films
M Putkonen
US Patent 7,754,621, 2010
4832010
Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high‐k dielectrics and other …
L Niinistö, M Nieminen, J Päiväsaari, J Niinistö, M Putkonen, M Nieminen
physica status solidi (a) 201 (7), 1443-1452, 2004
4672004
Method of depositing rare earth oxide thin films
J Niinistō, M Putkonen, M Ritala, P Räisänen, A Niskanen, M Leskelä
US Patent 6,858,546, 2005
4292005
Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor
M Nieminen, M Putkonen, L Niinistö
Applied surface science 174 (2), 155-166, 2001
3402001
A comparative study on lanthanide oxide thin films grown by atomic layer deposition
J Päiväsaari, M Putkonen, L Niinistö
Thin Solid Films 472 (1-2), 275-281, 2005
2422005
Process for producing oxide thin films
M Putkonen
US Patent 6,548,424, 2003
2172003
Effect of annealing in processing of strontium titanate thin films by ALD
A Kosola, M Putkonen, LS Johansson, L Niinistö
Applied Surface Science 211 (1-4), 102-112, 2003
1882003
Low‐Temperature ALE Deposition of Y2O3 Thin Films from β‐Diketonate Precursors
M Putkonen, T Sajavaara, LS Johansson, L Niinistö
Chemical Vapor Deposition 7 (1), 44-50, 2001
1722001
Atomic layer deposition of polyimide thin films
M Putkonen, J Harjuoja, T Sajavaara, L Niinistö
Journal of Materials Chemistry 17 (7), 664-669, 2007
1682007
Properties of AlN grown by plasma enhanced atomic layer deposition
M Bosund, T Sajavaara, M Laitinen, T Huhtio, M Putkonen, VM Airaksinen, ...
Applied Surface Science 257 (17), 7827-7830, 2011
1522011
Atomic layer deposition of rare earth oxides: erbium oxide thin films from β-diketonate and ozone precursors
J Päiväsaari, M Putkonen, T Sajavaara, L Niinistö
Journal of Alloys and Compounds 374 (1-2), 124-128, 2004
144*2004
Processing of Y2O3 thin films by atomic layer deposition from cyclopentadienyl-type compounds and water as precursors
J Niinistö, M Putkonen, L Niinistö
Chemistry of materials 16 (15), 2953-2958, 2004
1432004
Organometallic precursors for atomic layer deposition
M Putkonen, L Niinistö
Precursor Chemistry of Advanced Materials, 125-145, 2005
1372005
Surface-controlled growth of LaAlO3 thin films by atomic layer epitaxy
M Nieminen, T Sajavaara, E Rauhala, M Putkonen, L Niinistö
Journal of Materials Chemistry 11 (9), 2340-2345, 2001
1352001
Zirconia thin films by atomic layer epitaxy. A comparative study on the use of novel precursors with ozone
M Putkonen, L Niinistö
Journal of Materials Chemistry 11 (12), 3141-3147, 2001
1322001
Process for producing oxide thin films
M Putkonen
US Patent 6,777,353, 2004
1262004
Atomic layer deposition of lithium containing thin films
M Putkonen, T Aaltonen, M Alnes, T Sajavaara, O Nilsen, H Fjellvåg
Journal of Materials Chemistry 19 (46), 8767-8771, 2009
1122009
Enhanced growth rate in atomic layer epitaxy deposition of magnesium oxide thin films
M Putkonen, T Sajavaara, L Niinistö
Journal of Materials Chemistry 10 (8), 1857-1861, 2000
1032000
Cerium dioxide buffer layers at low temperature by atomic layer deposition
J Päiväsaari, M Putkonen, L Niinistö
Journal of Materials Chemistry 12 (6), 1828-1832, 2002
1022002
Gadolinium oxide thin films by atomic layer deposition
J Niinistö, N Petrova, M Putkonen, L Niinistö, K Arstila, T Sajavaara
Journal of crystal growth 285 (1-2), 191-200, 2005
1012005
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