Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon D Gilles, ER Weber, SK Hahn Physical review letters 64 (2), 196, 1990 | 281 | 1990 |
Impact of the electronic structure on the solubility and diffusion of 3d transition elements in silicon D Gilles, W Schröter, W Bergholz Physical Review B 41 (9), 5770, 1990 | 171 | 1990 |
Diffusion of manganese in silicon studied by deep‐level transient spectroscopy and tracer measurements D Gilles, W Bergholz, W Schröter Journal of applied physics 59 (10), 3590-3593, 1986 | 63 | 1986 |
Defect Control in Semiconductors ed. K. Sumino S Dannefaer North-Holland, Amsterdam, 1990 | 49 | 1990 |
Impact of research on defects in silicon on the microelectronic industry W Bergholz, D Gilles physica status solidi (b) 222 (1), 5-23, 2000 | 36 | 2000 |
Electronic structure and properties of semiconductors RW Cahn, P Haasen, EJ Kramer, W Schröter (No Title), 2004 | 31* | 2004 |
High‐Temperature Properties of Transition Elements in Silicon W Schröter, M Seibt, D Gilles Handbook of Semiconductor Technology: Electronic Structure and Properties of …, 2000 | 31 | 2000 |
Semiconductors J Utzig, D Gilles Mater. Sci. Forum 38, 729, 1989 | 22 | 1989 |
Defect Control in Semiconductors ed. K. Sumino D Gilles, ER Weber, S Hahn, K Cho North-Holland, Amsterdam 1, 323, 1990 | 16 | 1990 |
Materials Science and Technology Eds W Schröter, M Seibt, D Gilles RW Cahn, P. Haasen and EJ Kramer, VHC Weinheim 4, 539-587, 1991 | 13 | 1991 |
Gettering phenomena in silicon D Gilles, H Ewe Semiconductor Silicon 1994, 772, 1994 | 11 | 1994 |
Mechanisms of transition-element-gettering in silicon D Gilles MRS Online Proceedings Library 262 (1), 917-928, 1992 | 11 | 1992 |
Handbook of Semiconductor Technology W Schröter, M Seibt, D Gilles, KA Jackson WILEY-VCH Weinheim, 2000 | 9 | 2000 |
Semiconductor Silicon D Gilles, ER Weber, S Hahn, OR Monteiro, K Cho, HR Huff, T Abe, ... Elect. Chem. Soc.), Ed. HR Huff, KG Barraclough and JI Chikawa, 1990 | 8 | 1990 |
Distribution of Cobalt in Silicon after Phosphorous Diffusion Gettering R Kühnapfel, W Schröter, D Gilles Materials Science Forum 10, 151-156, 1986 | 7 | 1986 |
Semiconductor Silicon 1998 D Gilles, A Ohsawa The Electrochemical Society, Pennington, New Jersey, USA), PV, 1998 | 5 | 1998 |
Mechanisms of Transition Metal Gettering in Silicon D Gilles Solid State Phenomena 32, 57-70, 1993 | 4 | 1993 |
Materials Science and Technology, Eds. RW Cahn, P. Haasen, and EJ Kramer, Vol. 4 W Schröter, M Seibt, D Gilles VCH, Weinheim, 1991 | 4 | 1991 |
Transition metals in silicon: fundamentals and gettering mechanisms ER Weber, D Gilles Semiconductor Silicon 1990, 585-600, 1990 | 4 | 1990 |
Diffusion of cobalt in silicon J Utzig, D Gilles Materials Science Forum 38, 729-734, 1989 | 4 | 1989 |