Patrick Chu
Patrick Chu
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Cited by
Cited by
MEMS: The path to large optical crossconnects
PB Chu, SS Lee, S Park
IEEE Communications magazine 40 (3), 80-87, 2002
Analysis of closed-loop control of parallel-plate electrostatic microgrippers
PB Chu, SJ Pister
Proceedings of the 1994 IEEE International Conference on Robotics and …, 1994
Controlled pulse-etching with xenon difluoride
PB Chu, JT Chen, R Yeh, G Lin, JCP Huang, BA Warneke, SJ Pister
Proceedings of international solid state sensors and actuators conference …, 1997
Gas-phase silicon micromachining with xenon difluoride
FI Chang, R Yeh, G Lin, PB Chu, EG Hoffman, EJ Kruglick, KSJ Pister, ...
Microelectronic structures and microelectromechanical devices for optical …, 1995
Optical communication using micro corner cube reflectors
PB Chu, NR Lo, EC Berg, KSJ Pister
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997
Dynamics of polysilicon parallel-plate electrostatic actuators
PB Chu, PR Nelson, ML Tachiki, KSJ Pister
Sensors and Actuators A: Physical 52 (1-3), 216-220, 1996
Alignment features for heat assisted magnetic recording transducers
T Rausch, WA Challener, EC Gage, CD Mihalcea, C Peng, PB Chu, ...
US Patent 8,339,905, 2012
Nanoprecision MEMS capacitive sensor for linear and rotational positioning
JI Lee, X Huang, PB Chu
Journal of Microelectromechanical Systems 18 (3), 660-670, 2009
Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch
PB Chu, I Brener, C Pu, SS Lee, JI Dadap, S Park, K Bergman, ...
Journal of Microelectromechanical Systems 14 (2), 261-273, 2005
Light delivery technique for heat assisted magnetic recording head
KA Gomez, WA Challener, RA Shivarama, PB Chu
US Patent 7,345,840, 2008
Sidewall electrodes for electrostatic actuation and capacitive sensing
DR Peale, PB Chu, S Park, NH Bonadeo, S Lee, M Tsai
US Patent 6,480,645, 2002
Modular MEMS-based optical cross-connect with large port-count
JI Dadap, PB Chu, I Brener, C Pu, CD Lee, K Bergman, N Bonadeo, ...
IEEE Photonics Technology Letters 15 (12), 1773-1775, 2003
Microfluidic electrodischarge devices with integrated dispersion optics for spectral analysis of water impurities
L Que, CG Wilson, YB Gianchandani
Journal of microelectromechanical systems 14 (2), 185-191, 2005
Head with optical bench for use in data storage devices
EC Gage, PB Chu
US Patent 7,688,689, 2010
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
C Pu, S Park, PB Chu, SS Lee, M Tsai, D Peale, NH Bonadeo, I Brener
IEEE Journal of Selected Topics in Quantum Electronics 10 (3), 472-477, 2004
Heat assisted magnetic recording light delivery with fixed laser and rotating mirror
MD Bedillion, PB Chu, KA Gomez, T Rausch, EC Gage
US Patent 7,626,894, 2009
Optical coupling to data recording transducer
T Rausch, PB Chu
US Patent 7,483,229, 2009
Adapting multichip module foundries for MEMS packaging
JT Butler, VM Bright, PB Chu, RJ Saia
Proceedings. 1998 International Conference on Multichip Modules and High …, 1998
Optical methods for characterization of MEMS device motion
PR Nelson, PB Chu, KSJ Pister
Microlithography and Metrology in Micromachining 2640, 53-57, 1995
Elevated electrodes for probe position sensing
PB Chu, MD Bedillion, EC Johns, MI Lutwyche
US Patent 7,903,532, 2011
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