Matthew Last
Matthew Last
Waymo
Verified email at waymo.com
Title
Cited by
Cited by
Year
Smart dust: Communicating with a cubic-millimeter computer
B Warneke, M Last, B Liebowitz, KSJ Pister
Computer 34 (1), 44-51, 2001
15822001
Laterally actuated torsional micromirrors for large static deflection
V Milanovic, M Last, KSJ Pister
IEEE Photonics Technology Letters 15 (2), 245-247, 2003
722003
Torsional micromirrors with lateral actuators
V Milanović, M Last, KSJ Pister
Transducers’ 01 Eurosensors XV, 1270-1273, 2001
642001
Out of plane motion of assembled microstructures using a single-mask SOI process
M Last, V Subramaniam, KSJ Pister
The 13th International Conference on Solid-State Sensors, Actuators and …, 2005
412005
Capacitive sense feedback control for MEMS beam steering mirrors
B Cagdaser, A Jog, M Last, BS Leibowitz, L Zhou, E Shelton, KSJ Pister, ...
Proc. of Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head …, 2004
352004
Two-axis scanning mirror for free-space optical communication between UAVs
L Zhou, M Last, V Milanovic, JM Kahn, KSJ Pister
2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No. 03EX682 …, 2003
322003
Practical techniques for measuring MEMS properties
JV Clark, D Garmire, M Last, J Demmel, S Govindjee
Proceedings of the NSTI Nanotechnology Conference and Trade Show, Boston, MA …, 2004
292004
Toward a wireless optical communication link between two small unmanned aerial vehicles
M Last, BS Leibowitz, B Cagdaser, A Jog, L Zhou, B Boser, KSJ Pister
Proceedings of the 2003 International Symposium on Circuits and Systems …, 2003
292003
2-DOF actuated micromirror designed for large DC deflection
M Last, KSJ Pister
MOEMS ‘99, Mainz, Germany, 1999
291999
Monolithic silicon micromirrors with large scanning angle
V Milanovic, M Last, KSJ Pister
Optical MEMS 1, 2001
252001
Deep reactive ion etching for lateral field emission devices
V Milanovic, L Doherty, DA Teasdale, C Zhang, S Parsa, V Nguyen, ...
IEEE electron device letters 21 (6), 271-273, 2000
182000
Sensor array package
SX ARNOLD, TL Gilton
US Patent 8,736,080, 2014
162014
Silicon-on-Insulator Microassembly
ME Last
dissertation talk Dec. 2005 (40 pages), 0
14
Optical switch module
E Korevaar, Y Taketomi, T Barrott, H Tigli, M Last, L Dirvscio, E Davis
US Patent 7,734,127, 2010
122010
Video semaphore decoding for free-space optical communication
M Last, B Fisher, C Ezekwe, SM Hubert, S Patel, S Hollar, BS Leibowitz, ...
Real-time imaging V 4303, 148-158, 2001
102001
Mems mirror array and controls
L DiRuscio, E Davis, M Last
US Patent 7,386,201, 2008
92008
Optical fiber array alignment unit
M Last, Y Taketomi
US Patent 7,548,682, 2009
82009
Process for fabricating MEMS devices
J Gritters, EJJ Kruglick, M Last
US Patent 8,691,099, 2014
72014
An 8 mm/sup 3/digitally steered laser beam transmitter
M Last
2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No. 00EX399 …, 2000
62000
A microassembled large-deflection tip/tilt micromirror from a single-mask DRIE process
ME Last, V Subramaniam, KSJ Pister
Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island …, 2006
52006
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