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Maik Bertke
Maik Bertke
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Year
Piezoresistive microcantilevers for humidity sensing
J Xu, M Bertke, HS Wasisto, E Peiner
Journal of Micromechanics and Microengineering 29 (5), 053003, 2019
712019
Fabrication of ZnO nanorods and Chitosan@ ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing
J Xu, M Bertke, X Li, H Mu, H Zhou, F Yu, G Hamdana, A Schmidt, ...
Sensors and Actuators B: Chemical 273, 276-287, 2018
672018
Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection
M Bertke, G Hamdana, W Wu, HS Wasisto, E Uhde, E Peiner
Journal of Micromechanics and Microengineering 27 (6), 064001, 2017
392017
Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography
G Hamdana, T SŘdkamp, M Descoins, D Mangelinck, L Caccamo, ...
Microelectronic Engineering 179, 74-82, 2017
332017
Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching
G Hamdana, P Puranto, J Langfahl-Klabes, Z Li, F Pohlenz, M Xu, ...
Sensors and Actuators A: Physical 283, 65-78, 2018
292018
Piezoelectric MEMS resonators for cigarette particle detection
J Toledo, V Ruiz-DÝez, M Bertke, H Suryo Wasisto, E Peiner, ...
Micromachines 10 (2), 145, 2019
282019
In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection
A Setiono, M Bertke, WO Nyang’au, J Xu, M Fahrbach, I Kirsch, E Uhde, ...
Sensors 20 (3), 618, 2020
232020
Real-time frequency tracking of an electro-thermal piezoresistive cantilever resonator with ZnO nanorods for chemical sensing
A Setiono, J Xu, M Fahrbach, M Bertke, WO Nyang’au, HS Wasisto, ...
Chemosensors 7 (1), 2, 2019
232019
Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system
G Hamdana, M Bertke, L Doering, T Frank, U Brand, HS Wasisto, E Peiner
Journal of Sensors and Sensor Systems 6 (1), 121-133, 2017
172017
Piezoresistive silicon cantilever covered by ZnO nanorods for humidity sensing
J Yang, J Xu, W Wu, M Bertke, HS Wasisto, E Peiner
Procedia Engineering 168, 1114-1117, 2016
162016
Fabrication of ZnO nanorods on MEMS piezoresistive silicon microcantilevers for environmental monitoring
J Xu, M Bertke, A Gad, F Yu, G Hamdana, A Bakin, E Peiner
Proceedings 1 (4), 290, 2017
152017
Area-selective growth of aligned ZnO nanorod arrays for MEMS device applications
J Xu, K Strempel, H Zhou, A Waag, M Bertke, A Schmidt, E Peiner
Proceedings 2 (13), 887, 2018
132018
Contact resonance spectroscopy for on-the-machine manufactory monitoring
M Bertke, M Fahrbach, G Hamdana, J Xu, HS Wasisto, E Peiner
Sensors and Actuators A: Physical 279, 501-508, 2018
132018
Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring
M Bertke, W Wu, HS Wasisto, E Uhde, E Peiner
2017 19th International Conference on Solid-State Sensors, Actuators andá…, 2017
132017
Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection
M Bertke, J Xu, A Setiono, I Kirsch, E Uhde, E Peiner
Journal of Micromechanics and Microengineering 30 (1), 014001, 2019
122019
Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection
M Bertke, J Xu, M Fahrbach, A Setiono, HS Wasisto, E Peiner
Sensors 19 (4), 901, 2019
122019
Self-actuating and self-sensing ZNO nanorods/chitosan coated piezoresistive silicon microcantilever for humidit Y sensing
J Xu, M Bertke, X Li, H Mu, F Yu, A Schmidt, A Bakin, E Peiner
2018 IEEE Micro Electro Mechanical Systems (MEMS), 206-209, 2018
122018
Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement
A Setiono, WO Nyang’au, M Fahrbach, J Xu, M Bertke, HS Wasisto, ...
Journal of Micromechanics and Microengineering 29 (12), 124006, 2019
102019
Cantilever-droplet-based sensing of magnetic particle concentrations in liquids
WO Nyang’au, A Setiono, M Bertke, H Bosse, E Peiner
Sensors 19 (21), 4758, 2019
102019
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
A Setiono, M Fahrbach, J Xu, M Bertke, WO Nyang'au, G Hamdana, ...
Journal of Sensors and Sensor Systems 8 (1), 37-48, 2019
102019
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