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Norbert Herfurth
Norbert Herfurth
IHP - Leibniz-Institut für innovative Mikroelektronik
Bestätigte E-Mail-Adresse bei ihp-microelectronics.com
Titel
Zitiert von
Zitiert von
Jahr
Assessment of a chip backside protection
E Amini, A Beyreuther, N Herfurth, A Steigert, B Szyszka, C Boit
Journal of Hardware and Systems Security 2 (4), 345-352, 2018
232018
IC security and quality improvement by protection of chip backside against hardware attacks
E Amini, A Beyreuther, N Herfurth, A Steigert, R Muydinov, B Szyszka, ...
Microelectronics Reliability 88, 22-25, 2018
82018
Photon Emission in Silicon Based Integrated Circuits
C Boit, A Beyreuther, N Herfurth
Microelectronics Failure Analysis Desk Reference, 180, 2019
52019
EOFM for contactless parameter extraction of low k dielectric MIS structures
N Herfurth, E Amini, A Beyreuther, T Nakamura, S Keil, C Boit
2019 IEEE 26th International Symposium on Physical and Failure Analysis of …, 2019
42019
Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation
N Herfurth, C Wu, A Beyreuther, T Nakamura, I De Wolf, M Simon-Najasek, ...
Microelectronics Reliability 92, 73-78, 2019
42019
Photon emission as a characterization tool for bipolar parasitics in FinFET technology
A Beyreuther, N Herfurth, E Amini, T Nakamura, I De Wolf, C Boit
Microelectronics Reliability 88, 273-276, 2018
42018
Contactless device characterization of transistor structures in silicon using electro optical frequency mapping (EOFM)
A Beyreuther, N Herfurth, T Nakamura, GG Fischer, S Keil, C Boit
Microelectronics Reliability 106, 113583, 2020
32020
Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials–An adaptive calibration algorithm
P Scholz, N Herfurth, M Sadowski, T Lundquist, U Kerst, C Boit
Microelectronics Reliability 54 (9-10), 1794-1797, 2014
32014
Second generation of optical IC-backside protection structure
E Amini, T Kiyan, N Herfurth, A Beyreuther, C Boit, JP Seifert
2020 IEEE International Symposium on the Physical and Failure Analysis of …, 2020
22020
Generation and Tracking of Optical Signals inside the IC to Improve Device Security and Failure Analysis
E Amini, N Herfurth, A Beyreuther, JP Seifert, C Boit
2019 IEEE 26th International Symposium on Physical and Failure Analysis of …, 2019
22019
Contactless parametric characterization of bandgap engineering in p-type FinFETs using spectral photon emission
A Beyreuther, I Vogt, N Herfurth, T Nakamura, GG Fischer, B Motamedi, ...
Microelectronics Reliability 92, 143-148, 2019
22019
Contactless Fault Isolation of Ultra Low k Dielectrics in Soft Breakdown Condition
N Herfurth, C Wu, T Nakamura, I De Wolf, K Croes, C Boit
2018 IEEE International Symposium on the Physical and Failure Analysis of …, 2018
22018
Comprehensive parametric investigations of EOFM measurements on single FinFET transistors
A Beyreuther, N Herfurth, E Amini, T Nakamura, B Motamedi, C Boit
2020 IEEE International Symposium on the Physical and Failure Analysis of …, 2020
12020
EOFM measurements of lateral and vertical Bipolar Transistors in Silicon and SiGe: C Technologies
A Beyreuther, N Herfurth, E Amini, T Nakamura, GG Fischer, S Keil, C Boit
2019 IEEE 26th International Symposium on Physical and Failure Analysis of …, 2019
12019
New Access to Soft Breakdown Parameters of Low-k Dielectrics Through Localisation-Based Analysis
N Herfurth, A Beyreuther, E Amini, C Boit, M Simon-Najasek, S Hübner, ...
2019 IEEE International Reliability Physics Symposium (IRPS), 1-9, 2019
12019
Special Session: Physical Attacks through the Chip Backside: Threats, Challenges, and Opportunities
E Amini, K Bartels, C Boit, M Eggert, N Herfurth, T Kiyan, T Krachenfels, ...
2021 IEEE 39th VLSI Test Symposium (VTS), 1-12, 2021
2021
Development of ultra sensitive localisation techniques for failure analysis of soft breakdown events in low K dielectrics
N Herfurth
2020
Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques
F Friedrich, N Herfurth, AM Teodoreanu, T Sontheimer, V Preidel, B Rech, ...
Applied Physics Letters 104 (24), 242104, 2014
2014
Meticulous system calibration as a key for extracting correct photon emission spectra
N Herfurth, C Boit
2021 IEEE International Symposium on the Physical and Failure Analysis of …, 0
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