Norbert Herfurth
Norbert Herfurth
Researcher at Technical University Berlin
Bestätigte E-Mail-Adresse bei ihp-microelectronics.com
Titel
Zitiert von
Zitiert von
Jahr
Assessment of a chip backside protection
E Amini, A Beyreuther, N Herfurth, A Steigert, B Szyszka, C Boit
Journal of Hardware and Systems Security 2 (4), 345-352, 2018
102018
IC security and quality improvement by protection of chip backside against hardware attacks
E Amini, A Beyreuther, N Herfurth, A Steigert, R Muydinov, B Szyszka, ...
Microelectronics Reliability 88, 22-25, 2018
42018
Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation
N Herfurth, C Wu, A Beyreuther, T Nakamura, I De Wolf, M Simon-Najasek, ...
Microelectronics Reliability 92, 73-78, 2019
32019
Photon emission as a characterization tool for bipolar parasitics in FinFET technology
A Beyreuther, N Herfurth, E Amini, T Nakamura, I De Wolf, C Boit
Microelectronics Reliability 88, 273-276, 2018
32018
Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials–An adaptive calibration algorithm
P Scholz, N Herfurth, M Sadowski, T Lundquist, U Kerst, C Boit
Microelectronics Reliability 54 (9-10), 1794-1797, 2014
32014
EOFM for contactless parameter extraction of low k dielectric MIS structures
N Herfurth, E Amini, A Beyreuther, T Nakamura, S Keil, C Boit
2019 IEEE 26th International Symposium on Physical and Failure Analysis of …, 2019
22019
Contactless Fault Isolation of Ultra Low k Dielectrics in Soft Breakdown Condition
N Herfurth, C Wu, T Nakamura, I De Wolf, K Croes, C Boit
2018 IEEE International Symposium on the Physical and Failure Analysis of …, 2018
12018
Second generation of optical IC-backside protection structure
E Amini, T Kiyan, N Herfurth, A Beyreuther, C Boit, JP Seifert
2020 IEEE International Symposium on the Physical and Failure Analysis of …, 2020
2020
Comprehensive parametric investigations of EOFM measurements on single FinFET transistors
A Beyreuther, N Herfurth, E Amini, T Nakamura, B Motamedi, C Boit
2020 IEEE International Symposium on the Physical and Failure Analysis of …, 2020
2020
Contactless device characterization of transistor structures in silicon using electro optical frequency mapping (EOFM)
A Beyreuther, N Herfurth, T Nakamura, GG Fischer, S Keil, C Boit
Microelectronics Reliability 106, 113583, 2020
2020
Development of ultra sensitive localisation techniques for failure analysis of soft breakdown events in low K dielectrics
N Herfurth
2020
Photon Emission in Silicon Based Integrated Circuits
C Boit, A Beyreuther, N Herfurth
Microelectronics Failure Analysis Desk Reference, 180, 2019
2019
Generation and Tracking of Optical Signals inside the IC to Improve Device Security and Failure Analysis
E Amini, N Herfurth, A Beyreuther, JP Seifert, C Boit
2019 IEEE 26th International Symposium on Physical and Failure Analysis of …, 2019
2019
EOFM measurements of lateral and vertical Bipolar Transistors in Silicon and SiGe: C Technologies
A Beyreuther, N Herfurth, E Amini, T Nakamura, GG Fischer, S Keil, C Boit
2019 IEEE 26th International Symposium on Physical and Failure Analysis of …, 2019
2019
New Access to Soft Breakdown Parameters of Low-k Dielectrics Through Localisation-Based Analysis
N Herfurth, A Beyreuther, E Amini, C Boit, M Simon-Najasek, S Hübner, ...
2019 IEEE International Reliability Physics Symposium (IRPS), 1-9, 2019
2019
Contactless parametric characterization of bandgap engineering in p-type FinFETs using spectral photon emission
A Beyreuther, I Vogt, N Herfurth, T Nakamura, GG Fischer, B Motamedi, ...
Microelectronics Reliability 92, 143-148, 2019
2019
Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques
F Friedrich, N Herfurth, AM Teodoreanu, T Sontheimer, V Preidel, B Rech, ...
Applied Physics Letters 104 (24), 242104, 2014
2014
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