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Valery Ray, FIB/SEM Technologist
Valery Ray, FIB/SEM Technologist
PBS&T / MEO Engineering Co.
Bestätigte E-Mail-Adresse bei partbeamsystech.com - Startseite
Titel
Zitiert von
Zitiert von
Jahr
Repairing defects on photomasks using a charged particle beam and topographical data from a scanning probe microscope
D Ferranti, V Ray, G Smith, C Musil
US Patent App. 10/636,309, 2004
442004
FREUD Applications of FIB: Invasive Attacks and Countermeasures in Hardware Security Devices
V Ray
http://www.fibsem.net/web_documents/2009Presentations/FIB_FREUD_DC_Ray.pdf, 2009
152009
Development of void-free focused ion beam-assisted metal deposition process for subhalf-micrometer high aspect ratio vias
V Ray, N Antoniou, N Bassom, A Krechmer, A Saxonis
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
112003
Determining end points during charged particle beam processing
V Ray, L Scipioni, N Bassom
US Patent App. 10/777,672, 2005
102005
Gas delivery and virtual process chamber concept for gas-assisted material processing in a focused ion beam system
V Ray
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004
82004
Advanced sub 0.13um Cu Devices - Failure Analysis and Circuit Edit with Improved FIB Chemical Processes and Beam Characteristics
D Casey, MM Clive Chandler, T Gannon, A Krechmer, D Monforte, ...
Proceedings of International Conference for Testing and Failure Analysis 28 …, 2002
82002
Reconstructing focused ion beam current density profile by iterative simulation methodology
E Chang, K Toula, V Ray
Journal of Vacuum Science and Technology B 34 (6), 06KO01-1, 2016
62016
Fluorocarbon precursor for high aspect ratio via milling in focused ion beam modification of integrated circuits
V Ray
ISTFA 2004, 534-537, 2004
52004
Small via high aspect ratio circuit edit: challenges, techniques and developments
V Ray, N Antoniou, R Balasubramanian, N Bassom, M Clabby, T Gannon, ...
ISTFA 2003, 355-361, 2003
52003
Further inquiry into Xe primary ion species for circuit edit application
V Ray, A Hadjikhani, J Favata, S Ahmadi, S Shahbazmohamadi
ISTFA 2017: Conference Proceedings from the 43rd International Symposium for …, 2017
32017
Teaching an Old Material New Tricks: Easy and Inexpensive Focused Ion Beam (FIB) Sample Protection Using Conductive Polymers
J Taillon, V Ray, L Salamanca-Riba
Microscopy and Microanalysis 1 (6), https://doi.org/10.1017/S143192761700054, 2017
32017
Optimizing Gas Assisted Processes for Ga+ and Xe+ FIB Circuit Edit Application
V Ray, JV Oboña, S Sharma, L Rotkina, E Chang, K Toula
International Symposium for Testing and Failure Analysis, 2016
32016
Methodology for Studying Nanoscale Details of Focused Ion Beam Gas-Assisted Etching and Deposition by TEM and Numerical Modeling
V Ray, E Chang, K Toula, SC Liou, WA Chiou
Microscopy and Microanalysis 21 (S3), 1843-1844, 2015
32015
Improvements of Secondary Electron Imaging and Endpoint Detection in Focused Ion Beam Circuit Modification
V Ray, N Antoniou, A Krechmer, A Saxonis
INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS, 338-342, 2003
32003
FIB at Glancing Angle of Incidence
V Ray
FIB User Group ISTFA, 2013
22013
Stage Current Monitoring and Endpointing in FIB
V Ray, N Antoniou, N Bassom, A Soskov
Presentation on 7th European FIB User Group Meeting, 2003
22003
Real-time direct measurement of mechanical properties in-situ of scanning beam microscope
J Favata, S Shahbazmohamadi, V Ray, A Hadjikhani
US Patent 11,557,456, 2023
12023
Anomalous enhancement of focused ion beam etching by single raster propagating toward ion beam at glancing incidence
J Favata, V Ray, S Shahbazmohamadi
Journal of Vacuum Science & Technology B 38 (6), 2020
12020
Correlative 3D X-Ray, Laser Ablation, and SEM/EDS Mapping Establishing Access Point for FIB Tomography of Defects in Multi-Layer Ceramic Capacitors
J Favata, V Ray, S Shahbazmohamadi
Microscopy and Microanalysis 25 (S2), 344-345, 2019
12019
Eliminating ESD Damage During FIB Operation
V Ray
https://www.researchgate.net/publication …, 2014
12014
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