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Marc Fouchier
Marc Fouchier
CNRS/LTM
Verified email at cea.fr
Title
Cited by
Cited by
Year
Scanning probe microscopy: electrical and electromechanical phenomena at the nanoscale
SV Kalinin, A Gruverman
Springer Science & Business Media, 2007
5012007
Assessing the performance of two-dimensional dopant profiling techniques
N Duhayon, P Eyben, M Fouchier, T Clarysse, W Vandervorst, D Álvarez, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004
772004
Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips
D Alvarez, J Hartwich, M Fouchier, P Eyben, W Vandervorst
Applied physics letters 82 (11), 1724-1726, 2003
742003
An atomic force microscopy-based method for line edge roughness measurement
M Fouchier, E Pargon, B Bardet
Journal of applied physics 113 (10), 2013
562013
Unbiased line width roughness measurements with critical dimension scanning electron microscopy and critical dimension atomic force microscopy
L Azarnouche, E Pargon, K Menguelti, M Fouchier, D Fuard, P Gouraud, ...
Journal of Applied Physics 111 (8), 2012
542012
HBr plasma treatment versus VUV light treatment to improve 193 nm photoresist pattern linewidth roughness
E Pargon, L Azarnouche, M Fouchier, K Menguelti, R Tiron, C Sourd, ...
Plasma Processes and Polymers 8 (12), 1184-1195, 2011
452011
Benefits of plasma treatments on critical dimension control and line width roughness transfer during gate patterning
L Azarnouche, E Pargon, K Menguelti, M Fouchier, O Joubert, P Gouraud, ...
Journal of Vacuum Science & Technology B 31 (1), 2013
402013
Probing semiconductor technology and devices with scanning spreading resistance microscopy
P Eyben, W Vandervorst, D Alvarez, M Xu, M Fouchier
Scanning Probe Microscopy: Electrical and Electromechanical Phenomena at the …, 2007
392007
Scanning Probe Microscopy
P Eyben, W Vandervorst, D Alvarez, M Xu, M Fouchier, S Kalinin, ...
Scanning Probe Microscopy, Springer, New York, 2007
302007
S. Kalinin and A. Gruverman
SP Microscopy, P Eyben, W Vandervorst, D Alvarez, M Xu, M Fouchier
Springer, New York, 2007
272007
Atomic-scale silicon etching control using pulsed Cl2 plasma
C Petit-Etienne, M Darnon, P Bodart, M Fouchier, G Cunge, E Pargon, ...
Journal of Vacuum Science & Technology B 31 (1), 2013
252013
Vacuum UV broad-band absorption spectroscopy: a powerful diagnostic tool for reactive plasma monitoring
G Cunge, M Fouchier, M Brihoum, P Bodart, M Touzeau, N Sadeghi
Journal of Physics D: Applied Physics 44 (12), 122001, 2011
222011
Etching mechanisms of thin SiO2 exposed to Cl2 plasma
C Petit-Etienne, M Darnon, L Vallier, E Pargon, G Cunge, M Fouchier, ...
Journal of Vacuum Science & Technology B 29 (5), 2011
202011
Dual tip atomic force microscopy probe and method for producing such a probe
M Fouchier
US Patent 7,500,387, 2009
182009
Vacuum ultra violet absorption spectroscopy of 193 nm photoresists
M Fouchier, E Pargon, L Azarnouche, K Menguelti, O Joubert, ...
Applied Physics A 105, 399-405, 2011
162011
Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
M Fouchier, P Eyben, D Alvarez, N Duhayon, M Xu, S Brongersma, ...
Smart Sensors, Actuators, and MEMS 5116, 607-616, 2003
142003
Fabrication and characterization of full diamond tips for scanning spreading-resistance microscopy
D Alvarez, M Fouchier, J Kretz, J Hartwich, S Schoemann, W Vandervorst
Microelectronic engineering 73, 910-915, 2004
132004
Energy of Si (111) dimer-stacking-fault structures
M Fouchier, JJ Boland
Physical Review B 57 (15), 8997, 1998
131998
Polarized cathodoluminescence for strain measurement
M Fouchier, N Rochat, E Pargon, JP Landesman
Review of Scientific Instruments 90 (4), 2019
122019
Plasma treatments to improve line-width roughness during gate patterning
L Azarnouche, E Pargon, K Menguelti, M Fouchier, M Brihoum, R Ramos, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 12 (4), 041304-041304, 2013
122013
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