Michael Fahrbach
Michael Fahrbach
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In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection
A Setiono, M Bertke, WO Nyang’au, J Xu, M Fahrbach, I Kirsch, E Uhde, ...
Sensors 20 (3), 618, 2020
Real-time frequency tracking of an electro-thermal piezoresistive cantilever resonator with ZnO nanorods for chemical sensing
A Setiono, J Xu, M Fahrbach, M Bertke, WO Nyang’au, HS Wasisto, ...
Chemosensors 7 (1), 2, 2019
Contact resonance spectroscopy for on-the-machine manufactory monitoring
M Bertke, M Fahrbach, G Hamdana, J Xu, HS Wasisto, E Peiner
Sensors and Actuators A: Physical 279, 501-508, 2018
Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection
M Bertke, J Xu, M Fahrbach, A Setiono, HS Wasisto, E Peiner
Sensors 19 (4), 901, 2019
In-line measurement of the surface texture of rolls using long slender piezoresistive microprobes
L Teir, T Lindstedt, T Widmaier, B Hemming, U Brand, M Fahrbach, ...
Sensors 21 (17), 5955, 2021
Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement
A Setiono, WO Nyang’au, M Fahrbach, J Xu, M Bertke, HS Wasisto, ...
Journal of Micromechanics and Microengineering 29 (12), 124006, 2019
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
A Setiono, M Fahrbach, J Xu, M Bertke, WO Nyang'au, G Hamdana, ...
Journal of Sensors and Sensor Systems 8 (1), 37-48, 2019
Performance of an electrothermal mems cantilever resonator with fano-resonance annoyance under cigarette smoke exposure
A Setiono, M Fahrbach, A Deutschinger, EJ Fantner, CH Schwalb, ...
Sensors 21 (12), 4088, 2021
Customized piezoresistive microprobes for combined imaging of topography and mechanical properties
M Fahrbach, S Friedrich, H Behle, M Xu, B Cappella, U Brand, E Peiner
Measurement: Sensors 15, 100042, 2021
Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing
J Xu, M Bertke, X Li, A Setiono, M Fahrbach, A Schmidt, E Peiner
Proceedings 2 (13), 838, 2018
Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements
M Xu, Z Li, M Fahrbach, E Peiner, U Brand
Sensors 21 (5), 1557, 2021
Phase characteristic optimization of resonant MEMS environmental sensors
A Setiono, M Fahrbach, M Bertke, J Xu, G Hamdana, HS Wasisto, ...
Sensors and Measuring Systems; 19th ITG/GMA-Symposium, 1-4, 2018
Damped silicon microprobes for high-speed roughness measurements
M Fahrbach, WO Nyang'au, O Domanov, CH Schwalb, M Xu, Z Li, ...
MikroSystemTechnik Congress 2021; Congress, 1-4, 2021
Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry
M Fahrbach, L Krieg, T Voss, M Bertke, J Xu, E Peiner
Proceedings 2 (13), 889, 2018
Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries
M Bertke, UW Reinheimer, M Fahrbach, G Hamdana, HS Wasisto, ...
Proceedings 1 (4), 371, 2017
Real-Time Operation of Microcantilever-Based in-Plane Resonators Partially Immersed in a Microfluidic Sampler
J Xu, E Cao, M Fahrbach, V Agluschewitsch, A Waag, E Peiner
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023
Contact Resonance Imaging with Vertical Nanowire Arrays
M Fahrbach, J Xu, P Klapetek, J Martinek, E Peinera
Sensors and Measuring Systems; 21th ITG/GMA-Symposium, 1-6, 2022
Calibrating a high-speed contact-resonance profilometer
M Fahrbach, S Friedrich, B Cappella, E Peiner
Journal of Sensors and Sensor Systems 9 (2), 179-187, 2020
Adsorption and detection of microparticles using silicon microcantilevers
WO Nyang’au, G Hamdana, A Setiono, M Bertke, J Xu, M Fahrbach, ...
Journal of Physics: Conference Series 1319 (1), 012010, 2019
Large area contact resonance spectroscopy mapping system for on-the-machine measurements
M Bertke, M Fahrbach, G Hamdana, HS Wasisto, E Peiner
2018 IEEE Micro Electro Mechanical Systems (MEMS), 897-900, 2018
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