| In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection A Setiono, M Bertke, WO Nyang’au, J Xu, M Fahrbach, I Kirsch, E Uhde, ... Sensors 20 (3), 618, 2020 | 26 | 2020 |
| Real-time frequency tracking of an electro-thermal piezoresistive cantilever resonator with ZnO nanorods for chemical sensing A Setiono, J Xu, M Fahrbach, M Bertke, WO Nyang’au, HS Wasisto, ... Chemosensors 7 (1), 2, 2019 | 24 | 2019 |
| In-line measurement of the surface texture of rolls using long slender piezoresistive microprobes L Teir, T Lindstedt, T Widmaier, B Hemming, U Brand, M Fahrbach, ... Sensors 21 (17), 5955, 2021 | 16 | 2021 |
| Contact resonance spectroscopy for on-the-machine manufactory monitoring M Bertke, M Fahrbach, G Hamdana, J Xu, HS Wasisto, E Peiner Sensors and Actuators A: Physical 279, 501-508, 2018 | 16 | 2018 |
| Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection M Bertke, J Xu, M Fahrbach, A Setiono, HS Wasisto, E Peiner Sensors 19 (4), 901, 2019 | 12 | 2019 |
| Performance of an electrothermal mems cantilever resonator with fano-resonance annoyance under cigarette smoke exposure A Setiono, M Fahrbach, A Deutschinger, EJ Fantner, CH Schwalb, ... Sensors 21 (12), 4088, 2021 | 11 | 2021 |
| Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement A Setiono, WO Nyang’au, M Fahrbach, J Xu, M Bertke, HS Wasisto, ... Journal of Micromechanics and Microengineering 29 (12), 124006, 2019 | 11 | 2019 |
| Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors A Setiono, M Fahrbach, J Xu, M Bertke, WO Nyang'au, G Hamdana, ... Journal of Sensors and Sensor Systems 8 (1), 37-48, 2019 | 11 | 2019 |
| Customized piezoresistive microprobes for combined imaging of topography and mechanical properties M Fahrbach, S Friedrich, H Behle, M Xu, B Cappella, U Brand, E Peiner Measurement: Sensors 15, 100042, 2021 | 9 | 2021 |
| Investigating the trackability of silicon microprobes in high-speed surface measurements M Xu, Z Li, M Fahrbach, E Peiner, U Brand Sensors 21 (5), 1557, 2021 | 7 | 2021 |
| Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing † J Xu, M Bertke, X Li, A Setiono, M Fahrbach, A Schmidt, E Peiner Proceedings 2 (13), 838, 2018 | 7 | 2018 |
| Phase characteristic optimization of resonant MEMS environmental sensors A Setiono, M Fahrbach, M Bertke, J Xu, G Hamdana, HS Wasisto, ... Sensors and Measuring Systems; 19th ITG/GMA-Symposium, 1-4, 2018 | 5 | 2018 |
| Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry M Fahrbach, L Krieg, T Voss, M Bertke, J Xu, E Peiner Proceedings 2 (13), 889, 2018 | 3 | 2018 |
| Damped silicon microprobes for high-speed roughness measurements M Fahrbach, WO Nyang'au, O Domanov, CH Schwalb, M Xu, Z Li, ... MikroSystemTechnik Congress 2021; Congress, 1-4, 2021 | 2 | 2021 |
| Calibrating a high-speed contact-resonance profilometer M Fahrbach, S Friedrich, B Cappella, E Peiner Journal of Sensors and Sensor Systems 9 (2), 179-187, 2020 | 2 | 2020 |
| Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries M Bertke, UW Reinheimer, M Fahrbach, G Hamdana, HS Wasisto, ... Proceedings 1 (4), 371, 2017 | 2 | 2017 |
| Damped cantilever microprobes for high-speed contact metrology with 3D surface topography M Fahrbach, M Xu, WO Nyang’au, O Domanov, CH Schwalb, Z Li, ... Sensors 23 (4), 2003, 2023 | 1 | 2023 |
| Real-time operation of microcantilever-based in-plane resonators partially immersed in a microfluidic sampler J Xu, E Cao, M Fahrbach, V Agluschewitsch, A Waag, E Peiner 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023 | 1 | 2023 |
| Contact Resonance Imaging with Vertical Nanowire Arrays M Fahrbach, J Xu, P Klapetek, J Martinek, E Peinera Sensors and Measuring Systems; 21th ITG/GMA-Symposium, 1-6, 2022 | 1 | 2022 |
| Adsorption and detection of microparticles using silicon microcantilevers WO Nyang’au, G Hamdana, A Setiono, M Bertke, J Xu, M Fahrbach, ... Journal of Physics: Conference Series 1319 (1), 012010, 2019 | 1 | 2019 |
Erwin PeinerProfessor of Semiconductor Technology, TU Braunschweig University of TechnologyVerified email at tu-bs.de
