Costas Spanos

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	All	Since 2016
Citations	8117	4139
h-index	47	36
i10-index	175	96

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Co-authors

Yuxun ZhouQuantitative Researcher @ Citadel SecuritiesVerified email at berkeley.edu
Ming JinVirginia TechVerified email at vt.edu
Ioannis C. KonstantakopoulosApplied Scientist II @ Amazon.com - Alexa Artificial Intelligence (AI)Verified email at amazon.com
Guoqiang HuNanyang Technological University (NTU), SingaporeVerified email at ntu.edu.sg
Ruoxi JiaAssistant Professor, Virginia TechVerified email at vt.edu
Lihua XieProfessor of Electrical Engineering, Nanyang Technological UniversityVerified email at ntu.edu.sg
Mason FreedGoogle, GMO, Xradia, KLA-Tencor, OnWafer, UC BerkeleyVerified email at mfreed.com
Jason CainAdvanced Micro DevicesVerified email at amd.com
Weixi GuUC Berkeley; China Academy of Industrial InternetVerified email at berkeley.edu
Dr. Sanjib Kumar PandaAssociate Professor and Director, Power & EnergyVerified email at nus.edu.sg
Shankar SastryUniversity of CaliforniaVerified email at berkeley.edu
Kun QianEECS, UC BerkeleyVerified email at berkeley.edu
Reza ArghandehProfessor, Western Norway University of Applied SciencesVerified email at hvl.no
Seth R SandersProfessor of electrical engineering, uc berkeleyVerified email at berkeley.edu
Jason PoonPostdoctoral Scholar at Stanford UniversityVerified email at stanford.edu
Lin ZhangTsinghua UniversityVerified email at mail.tsinghua.edu.cn
Alexandre BayenProfessor Electrical Engineering and Computer Science, UC BerkeleyVerified email at berkeley.edu
Palak JainResearch Scientist, GE Research CenterVerified email at u.nus.edu
Lillian RatliffAsst Prof, UW SeattleVerified email at uw.edu
Yu CaoProfessor of Electrical Engineering, Arizona State UniversityVerified email at asu.edu

Costas Spanos

Professor of Electrical Engineering and Computer Sciences, University of California, Berkeley

Verified email at berkeley.edu

Semiconductor Manufacturing Energy Efficiency


Title Sort by citations Sort by year Sort by title	Cited by Cited by	Year
Fundamentals of semiconductor manufacturing and process control GS May, CJ Spanos IEEE, 2006	476	2006
Modeling within-die spatial correlation effects for process-design co-optimization P Friedberg, Y Cao, J Cain, R Wang, J Rabaey, C Spanos Sixth international symposium on quality electronic design (isqed'05), 516-521, 2005	265	2005
Maintenance unit for a sensor apparatus ML Freed, RS Mundt, CJ Spanos US Patent 7,282,889, 2007	251*	2007
Specular spectroscopic scatterometry X Niu, N Jakatdar, J Bao, CJ Spanos IEEE Transactions on Semiconductor Manufacturing 14 (2), 97-111, 2001	202	2001
Distributed energy consumption control via real-time pricing feedback in smart grid K Ma, G Hu, CJ Spanos IEEE Transactions on Control Systems Technology 22 (5), 1907-1914, 2014	156	2014
Measurement and analysis of variability in 45 nm strained-Si CMOS technology LT Pang, K Qian, CJ Spanos, B Nikolic IEEE Journal of Solid-State Circuits 44 (8), 2233-2243, 2009	139	2009
Real-time statistical process control using tool data (semiconductor manufacturing) CJ Spanos, HF Guo, A Miller, J Levine-Parrill IEEE Transactions on Semiconductor Manufacturing 5 (4), 308-318, 1992	137	1992
Statistical experimental design in plasma etch modeling GS May, J Huang, CJ Spanos IEEE Transactions on Semiconductor Manufacturing 4 (2), 83-98, 1991	130	1991
Semiconductor yield improvement: results and best practices SP Cunningham, CJ Spanos, K Voros IEEE Transactions on Semiconductor Manufacturing 8 (2), 103-109, 1995	119	1995
Specular spectroscopic scatterometry in DUV lithography X Niu, NH Jakatdar, J Bao, CJ Spanos, SK Yedur Metrology, Inspection, and Process Control for Microlithography XIII 3677 …, 1999	117	1999
MOD-DR: Microgrid optimal dispatch with demand response M Jin, W Feng, P Liu, C Marnay, C Spanos Applied Energy 187, 758-776, 2017	115	2017
Model-based fault detection and identification for switching power converters J Poon, P Jain, IC Konstantakopoulos, C Spanos, SK Panda, SR Sanders IEEE Transactions on Power Electronics 32 (2), 1419-1430, 2016	111	2016
Microgrid to enable optimal distributed energy retail and end-user demand response M Jin, W Feng, C Marnay, C Spanos Applied Energy 210, 1321-1335, 2018	103	2018
Accurate indoor localization and tracking using mobile phone inertial sensors, WiFi and iBeacon H Zou, Z Chen, H Jiang, L Xie, C Spanos 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017	103	2017
Statistical equipment modeling for VLSI manufacturing: An application for LPCVD KK Lin, CJ Spanos IEEE Transactions on Semiconductor Manufacturing 3 (4), 216-229, 1990	99	1990
Gate line edge roughness model for estimation of FinFET performance variability K Patel, TJK Liu, CJ Spanos IEEE Transactions on Electron Devices 56 (12), 3055-3063, 2009	94	2009
WinLight: A WiFi-based occupancy-driven lighting control system for smart building H Zou, Y Zhou, H Jiang, SC Chien, L Xie, CJ Spanos Energy and Buildings 158, 924-938, 2018	92	2018
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control ML Freed, RS Mundt, CJ Spanos US Patent 6,691,068, 2004	86	2004
Statistical process control in semiconductor manufacturing CJ Spanos Proceedings of the IEEE 80 (6), 819-830, 1992	85	1992
A cooperative demand response scheme using punishment mechanism and application to industrial refrigerated warehouses K Ma, G Hu, CJ Spanos IEEE Transactions on Industrial Informatics 11 (6), 1520-1531, 2015	83	2015

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