| Tunable infrared detector with integrated micromachined Fabry-Perot filter N Neumann, M Ebermann, S Kurth, K Hiller Journal of Micro/Nanolithography, MEMS and MOEMS 7 (2), 021004-021004-9, 2008 | 174 | 2008 |
| Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review M Ebermann, N Neumann, K Hiller, M Seifert, M Meinig, S Kurth MOEMS and miniaturized systems XV 9760, 64-83, 2016 | 88 | 2016 |
| Tunable infrared detector with integrated micromachined Fabry-Perot filter N Neumann, M Ebermann, K Hiller, S Kurth MOEMS and Miniaturized Systems VI 6466, 50-61, 2007 | 39 | 2007 |
| Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid-and long-wave infrared microspectrometers M Meinig, M Ebermann, N Neumann, S Kurth, K Hiller, T Gessner Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS …, 2011 | 36 | 2011 |
| Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers M Ebermann, N Neumann, K Hiller, E Gittler, M Meinig, S Kurth Next-Generation Spectroscopic Technologies V 8374, 258-266, 2012 | 32 | 2012 |
| Recent advances in expanding the spectral range of MEMS Fabry-Perot filters M Ebermann, N Neumann, K Hiller, E Gittler, M Meinig, S Kurth MOEMS and Miniaturized Systems IX 7594, 274-283, 2010 | 31 | 2010 |
| Cost-effective technologies to control indoor air quality and comfort in energy efficient building retrofitting GM Revel, M Arnesano, F Pietroni, J Frick, M Reichert, K Schmitt, J Huber, ... Environmental Engineering and Management Journal 14 (7), 1487-1494, 2015 | 29 | 2015 |
| Design, operation and performance of a Fabry-Pérot-based MWIR microspectrometer M Ebermann, K Hiller, S Kurth, N Neumann Sensor+ Test Conference 2009, 2009 | 22 | 2009 |
| Design, operation and performance of a Fabry-Pérot-based MWIR microspectrometer M Ebermann, K Hiller, S Kurth, N Neumann Sensor+ Test Conference 2009, 2009 | 22 | 2009 |
| Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases M Ebermann, N Neumann, K Hiller, M Seifert, M Meinig, S Kurth MOEMS and Miniaturized Systems XIII 8977, 212-220, 2014 | 19 | 2014 |
| Tiny mid-and long-wave infrared spectrometer module with a MEMS dual-band Fabry-Perot filter M Ebermann, M Meinig, S Kurth, K Hiller, E Gittler, N Neumann Proc. Sensor+ Test Conf.: IRS2, Nürnberg, 94-99, 2011 | 17 | 2011 |
| Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range N Neumann, M Ebermann, E Gittler, M Meinig, S Kurth, K Hiller SENSORS, 2010 IEEE, 2383-2387, 2010 | 17 | 2010 |
| Novel MWIR microspectrometer based on a tunable detector N Neumann, M Ebermann, S Kurth, K Hiller MOEMS and Miniaturized Systems VIII 7208, 121-128, 2009 | 15 | 2009 |
| Subwavelength structures for infrared filtering S Kurth, K Hiller, N Neumann, M Seifert, M Ebermann, J Zajadacz, ... SPIE Photonics Europe, 77131S-77131S-11, 2010 | 12 | 2010 |
| A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases M Ebermann, N Neumann, S Binder, M Meinig, M Seifert, S Kurth, K Hiller 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 10 | 2015 |
| Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors M Meinig, S Kurth, K Hiller, N Neumann, M Ebermann, E Gittler, ... MOEMS and Miniaturized Systems X 7930, 152-163, 2011 | 9 | 2011 |
| Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2 thin film in 3D-integration R Lehmkau, D Mutschall, A Kaiser, M Ebermann, N Neumann, ... Oxide-based Materials and Devices XIII 12002, 156-165, 2022 | 7 | 2022 |
| Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration M Meinig, S Kurth, C Helke, M Seifert, K Hiller, M Ebermann, N Neumann, ... | 7 | 2015 |
| Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture S Kurth, K Hiller, M Meinig, J Besser, M Seifert, M Ebermann, N Neumann, ... High Contrast Metastructures III 8995, 73-83, 2014 | 7 | 2014 |
| ADVANCED TOOLS FOR THE MONITORING AND CONTROL OF INDOOR AIR QUALITY AND COMFORT Extended abstract GM Revel, M Arnesano, F Pietroni, J Frick, M Reichert, M Krüger, ... Environmental Engineering and Management Journal 12 (S11), 229-232, 2013 | 7 | 2013 |
Katrin SchmittFraunhofer IPMVerified email at ipm.fraunhofer.de
