| Plasma chemical vapor deposition of hydrocarbon films: The influence of hydrocarbon source gas on the film properties T Schwarz-Selinger, A Von Keudell, W Jacob Journal of Applied Physics 86 (7), 3988-3996, 1999 | 289 | 1999 |
| Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry D Ellerweg, J Benedikt, A von Keudell, N Knake, V Schulz-von der Gathen New Journal of physics 12 (1), 013021, 2010 | 240 | 2010 |
| Thermal conductivity of amorphous carbon thin films AJ Bullen, KE O’Hara, DG Cahill, O Monteiro, A Von Keudell Journal of Applied Physics 88 (11), 6317-6320, 2000 | 239 | 2000 |
| Growth and erosion of hydrocarbon films investigated by in situ ellipsometry A Von Keudell, W Jacob Journal of Applied Physics 79 (2), 1092-1098, 1996 | 183 | 1996 |
| Inactivation of bacteria and biomolecules by low‐pressure plasma discharges A Von Keudell, P Awakowicz, J Benedikt, V Raballand, A Yanguas‐Gil, ... Plasma Processes and Polymers 7 (3‐4), 327-352, 2010 | 180 | 2010 |
| Atmospheric pressure microplasma jet as a depositing tool J Benedikt, K Focke, A Yanguas-Gil, A Von Keudell Applied Physics Letters 89 (25), 2006 | 160 | 2006 |
| Growth mechanism of amorphous hydrogenated carbon A Von Keudell, M Meier, C Hopf Diamond and Related Materials 11 (3-6), 969-975, 2002 | 159 | 2002 |
| Chemical sputtering of hydrocarbon films C Hopf, A Von Keudell, W Jacob Journal of Applied Physics 94 (4), 2373-2380, 2003 | 157 | 2003 |
| A combined plasma‐surface model for the deposition of C: H films from a methane plasma A Von Keudell, W Möller Journal of applied physics 75 (12), 7718-7727, 1994 | 146 | 1994 |
| Quadrupole mass spectrometry of reactive plasmas J Benedikt, A Hecimovic, D Ellerweg, A Von Keudell Journal of Physics D: Applied Physics 45 (40), 403001, 2012 | 141 | 2012 |
| A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas M Schulze, A Yanguas-Gil, A von Keudell, P Awakowicz Journal of Physics D: Applied Physics 41 (6), 065206, 2008 | 131 | 2008 |
| Formation of polymer-like hydrocarbon films from radical beams of methyl and atomic hydrogen A von Keudell Thin Solid Films 402 (1-2), 1-37, 2002 | 126 | 2002 |
| Foundations of low-temperature plasma physics—an introduction A Von Keudell, V Schulz-Von Der Gathen Plasma Sources Science and Technology 26 (11), 113001, 2017 | 122 | 2017 |
| Surface processes during thin-film growth A von Keudell Plasma Sources Science and Technology 9 (4), 455, 2000 | 121 | 2000 |
| Thin film deposition by means of atmospheric pressure microplasma jet J Benedikt, V Raballand, A Yanguas-Gil, K Focke, A Von Keudell Plasma physics and controlled fusion 49 (12B), B419, 2007 | 118 | 2007 |
| Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces: Consequences for the formation of re-deposited layers in fusion experiments A Von Keudell, C Hopf, T Schwarz-Selinger, W Jacob Nuclear Fusion 39 (10), 1451, 1999 | 117 | 1999 |
| Unexpected O and O3 production in the effluent of He/O2 microplasma jets emanating into ambient air D Ellerweg, A Von Keudell, J Benedikt Plasma Sources Science and Technology 21 (3), 034019, 2012 | 115 | 2012 |
| Optical and electrical characterization of an atmospheric pressure microplasma jet for Ar∕ CH4 and Ar∕ C2H2 mixtures A Yanguas-Gil, K Focke, J Benedikt, A Von Keudell Journal of applied physics 101 (10), 2007 | 115 | 2007 |
| Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces C Hopf, T Schwarz-Selinger, W Jacob, A Von Keudell Journal of Applied Physics 87 (6), 2719-2725, 2000 | 113 | 2000 |
| Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium C Maszl, W Breilmann, J Benedikt, A von Keudell Journal of Physics D: Applied Physics 47 (22), 224002, 2014 | 111 | 2014 |
