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Achim von Keudell
Achim von Keudell
Professor für Physik, Ruhr-Universität Bochum
Verified email at rub.de
Title
Cited by
Cited by
Year
Plasma chemical vapor deposition of hydrocarbon films: The influence of hydrocarbon source gas on the film properties
T Schwarz-Selinger, A Von Keudell, W Jacob
Journal of Applied Physics 86 (7), 3988-3996, 1999
2881999
Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry
D Ellerweg, J Benedikt, A von Keudell, N Knake, V Schulz-von der Gathen
New Journal of physics 12 (1), 013021, 2010
2372010
Thermal conductivity of amorphous carbon thin films
AJ Bullen, KE O’Hara, DG Cahill, O Monteiro, A Von Keudell
Journal of Applied Physics 88 (11), 6317-6320, 2000
2332000
Growth and erosion of hydrocarbon films investigated by in situ ellipsometry
A Von Keudell, W Jacob
Journal of Applied Physics 79 (2), 1092-1098, 1996
1821996
Inactivation of bacteria and biomolecules by low‐pressure plasma discharges
A Von Keudell, P Awakowicz, J Benedikt, V Raballand, A Yanguas‐Gil, ...
Plasma Processes and Polymers 7 (3‐4), 327-352, 2010
1772010
Atmospheric pressure microplasma jet as a depositing tool
J Benedikt, K Focke, A Yanguas-Gil, A Von Keudell
Applied Physics Letters 89 (25), 2006
1602006
Growth mechanism of amorphous hydrogenated carbon
A Von Keudell, M Meier, C Hopf
Diamond and Related Materials 11 (3-6), 969-975, 2002
1592002
Chemical sputtering of hydrocarbon films
C Hopf, A Von Keudell, W Jacob
Journal of Applied Physics 94 (4), 2373-2380, 2003
1542003
A combined plasma‐surface model for the deposition of C: H films from a methane plasma
A Von Keudell, W Möller
Journal of applied physics 75 (12), 7718-7727, 1994
1441994
Quadrupole mass spectrometry of reactive plasmas
J Benedikt, A Hecimovic, D Ellerweg, A Von Keudell
Journal of Physics D: Applied Physics 45 (40), 403001, 2012
1392012
A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas
M Schulze, A Yanguas-Gil, A von Keudell, P Awakowicz
Journal of Physics D: Applied Physics 41 (6), 065206, 2008
1282008
Formation of polymer-like hydrocarbon films from radical beams of methyl and atomic hydrogen
A von Keudell
Thin Solid Films 402 (1-2), 1-37, 2002
1262002
Thin film deposition by means of atmospheric pressure microplasma jet
J Benedikt, V Raballand, A Yanguas-Gil, K Focke, A Von Keudell
Plasma physics and controlled fusion 49 (12B), B419, 2007
1182007
Surface processes during thin-film growth
A von Keudell
Plasma Sources Science and Technology 9 (4), 455, 2000
1182000
Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces: Consequences for the formation of re-deposited layers in fusion experiments
A Von Keudell, C Hopf, T Schwarz-Selinger, W Jacob
Nuclear Fusion 39 (10), 1451, 1999
1171999
Optical and electrical characterization of an atmospheric pressure microplasma jet for Ar∕ CH4 and Ar∕ C2H2 mixtures
A Yanguas-Gil, K Focke, J Benedikt, A Von Keudell
Journal of applied physics 101 (10), 2007
1152007
Unexpected O and O3 production in the effluent of He/O2 microplasma jets emanating into ambient air
D Ellerweg, A Von Keudell, J Benedikt
Plasma Sources Science and Technology 21 (3), 034019, 2012
1122012
Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces
C Hopf, T Schwarz-Selinger, W Jacob, A Von Keudell
Journal of Applied Physics 87 (6), 2719-2725, 2000
1122000
Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium
C Maszl, W Breilmann, J Benedikt, A von Keudell
Journal of Physics D: Applied Physics 47 (22), 224002, 2014
1102014
Foundations of low-temperature plasma physics—an introduction
A Von Keudell, V Schulz-Von Der Gathen
Plasma Sources Science and Technology 26 (11), 113001, 2017
1092017
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