Harm Knoops
Harm Knoops
Verified email at tue.nl
Title
Cited by
Cited by
Year
In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition
E Langereis, SBS Heil, HCM Knoops, W Keuning, MCM Van de Sanden, ...
Journal of Physics D: Applied Physics 42 (7), 073001, 2009
3092009
Conformality of plasma-assisted ALD: physical processes and modeling
HCM Knoops, E Langereis, MCM Van De Sanden, WMM Kessels
Journal of the Electrochemical Society 157 (12), G241, 2010
1592010
Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
WMM Kessels, HCM Knoops, SAF Dielissen, AJM Mackus, ...
Applied Physics Letters 95 (1), 013114, 2009
1322009
Remote plasma ALD of platinum and platinum oxide films
HCM Knoops, AJM Mackus, ME Donders, MCM Van De Sanden, ...
Electrochemical and Solid State Letters 12 (7), G34, 2009
1322009
Atomic layer deposition for nanostructured Li-ion batteries
HCM Knoops, ME Donders, MCM Van De Sanden, PHL Notten, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 30 (1 …, 2012
1052012
Deposition of TiN and TaN by remote plasma ALD for Cu and Li diffusion barrier applications
HCM Knoops, L Baggetto, E Langereis, MCM Van De Sanden, ...
Journal of the Electrochemical Society 155 (12), G287, 2008
962008
Plasma atomic layer deposition
HCM Knoops, K De Peuter, WMM Kessels
US Patent 9,637,823, 2017
932017
Remote plasma atomic layer deposition of Co3O4 thin films
ME Donders, HCM Knoops, WMM Kessels, PHL Notten
Journal of The Electrochemical Society 158 (4), G92, 2011
862011
Atomic layer etching: what can we learn from atomic layer deposition?
T Faraz, F Roozeboom, HCM Knoops, WMM Kessels
ECS Journal of Solid State Science and Technology 4 (6), N5023, 2015
812015
Synthesis and in situ characterization of low-resistivity films by remote plasma atomic layer deposition
E Langereis, HCM Knoops, AJM Mackus, F Roozeboom, ...
Journal of Applied Physics 102 (8), 083517, 2007
792007
Atomic layer deposition of LiCoO2 thin-film electrodes for all-solid-state Li-ion micro-batteries
ME Donders, WM Arnoldbik, HCM Knoops, WMM Kessels, PHL Notten
Journal of The Electrochemical Society 160 (5), A3066, 2013
762013
Plasma rotation and momentum transport studies at JET
PC De Vries, KM Rantamäki, C Giroud, E Asp, G Corrigan, A Eriksson, ...
Plasma physics and controlled fusion 48 (12), 1693, 2006
712006
Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
HCM Knoops, EMJ Braeken, K de Peuter, SE Potts, S Haukka, V Pore, ...
ACS applied materials & interfaces 7 (35), 19857-19862, 2015
702015
Electrical transport and Al doping efficiency in nanoscale ZnO films prepared by atomic layer deposition
Y Wu, PM Hermkens, BWH Van de Loo, HCM Knoops, SE Potts, ...
Journal of Applied Physics 114 (2), 024308, 2013
692013
3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries
L Baggetto, HCM Knoops, RAH Niessen, WMM Kessels, PHL Notten
Journal of Materials Chemistry 20 (18), 3703-3708, 2010
652010
Room-temperature atomic layer deposition of platinum
AJM Mackus, D Garcia-Alonso, HCM Knoops, AA Bol, WMM Kessels
Chemistry of Materials 25 (9), 1769-1774, 2013
642013
Enhanced doping efficiency of Al-doped ZnO by atomic layer deposition using dimethylaluminum isopropoxide as an alternative aluminum precursor
Y Wu, SE Potts, PM Hermkens, HCM Knoops, F Roozeboom, ...
Chemistry of Materials 25 (22), 4619-4622, 2013
612013
Low-temperature plasma-assisted atomic layer deposition of silicon nitride moisture permeation barrier layers
AM Andringa, A Perrotta, K de Peuter, HCM Knoops, WMM Kessels, ...
ACS applied materials & interfaces 7 (40), 22525-22532, 2015
592015
Surface loss in ozone-based atomic layer deposition processes
HCM Knoops, JW Elam, JA Libera, WMM Kessels
Chemistry of Materials 23 (9), 2381-2387, 2011
582011
Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
AJM Mackus, SBS Heil, E Langereis, HCM Knoops, MCM Van de Sanden, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 28 (1 …, 2010
582010
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Articles 1–20