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Harm Knoops
Harm Knoops
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Title
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Year
In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition
E Langereis, SBS Heil, HCM Knoops, W Keuning, MCM Van de Sanden, ...
Journal of Physics D: Applied Physics 42 (7), 073001, 2009
3582009
Plasma atomic layer deposition
HCM Knoops, K De Peuter, WMM Kessels
US Patent 9,637,823, 2017
1982017
Conformality of plasma-assisted ALD: physical processes and modeling
HCM Knoops, E Langereis, MCM Van De Sanden, WMM Kessels
Journal of The Electrochemical Society 157 (12), G241, 2010
1852010
Remote plasma ALD of platinum and platinum oxide films
HCM Knoops, AJM Mackus, ME Donders, MCM Van De Sanden, ...
Electrochemical and Solid-State Letters 12 (7), G34, 2009
1462009
Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
WMM Kessels, HCM Knoops, SAF Dielissen, AJM Mackus, ...
Applied Physics Letters 95 (1), 013114, 2009
1412009
Atomic layer deposition for nanostructured Li-ion batteries
HCM Knoops, ME Donders, MCM Van de Sanden, PHL Notten, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 30 (1 …, 2012
1362012
Atomic layer etching: What can we learn from atomic layer deposition?
T Faraz, F Roozeboom, HCM Knoops, WMM Kessels
ECS Journal of Solid State Science and Technology 4 (6), N5023, 2015
1152015
Atomic layer deposition of LiCoO2 thin-film electrodes for all-solid-state Li-ion micro-batteries
ME Donders, WM Arnoldbik, HCM Knoops, WMM Kessels, PHL Notten
Journal of the Electrochemical Society 160 (5), A3066, 2013
1082013
Deposition of TiN and TaN by remote plasma ALD for Cu and Li diffusion barrier applications
HCM Knoops, L Baggetto, E Langereis, MCM Van De Sanden, ...
Journal of the Electrochemical Society 155 (12), G287, 2008
1062008
Status and prospects of plasma-assisted atomic layer deposition
HCM Knoops, T Faraz, K Arts, WMM Kessels
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 37 (3 …, 2019
992019
Remote plasma atomic layer deposition of Co3O4 thin films
ME Donders, HCM Knoops, WMM Kessels, PHL Notten
Journal of The Electrochemical Society 158 (4), G92, 2011
962011
Synthesis and in situ characterization of low-resistivity films by remote plasma atomic layer deposition
E Langereis, HCM Knoops, AJM Mackus, F Roozeboom, ...
Journal of Applied Physics 102 (8), 083517, 2007
892007
Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
HCM Knoops, EMJ Braeken, K de Peuter, SE Potts, S Haukka, V Pore, ...
ACS applied materials & interfaces 7 (35), 19857-19862, 2015
862015
Atomic layer deposition
HCM Knoops, SE Potts, AA Bol, WMM Kessels
Handbook of Crystal Growth, 1101-1134, 2015
842015
Enhanced doping efficiency of Al-doped ZnO by atomic layer deposition using dimethylaluminum isopropoxide as an alternative aluminum precursor
Y Wu, SE Potts, PM Hermkens, HCM Knoops, F Roozeboom, ...
Chemistry of Materials 25 (22), 4619-4622, 2013
842013
Electrical transport and Al doping efficiency in nanoscale ZnO films prepared by atomic layer deposition
Y Wu, PM Hermkens, BWH Van De Loo, HCM Knoops, SE Potts, ...
Journal of Applied Physics 114 (2), 024308, 2013
802013
Room-temperature atomic layer deposition of platinum
AJM Mackus, D Garcia-Alonso, HCM Knoops, AA Bol, WMM Kessels
Chemistry of Materials 25 (9), 1769-1774, 2013
802013
Plasma rotation and momentum transport studies at JET
PC De Vries, KM Rantamäki, C Giroud, E Asp, G Corrigan, A Eriksson, ...
Plasma physics and controlled fusion 48 (12), 1693, 2006
802006
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS 2: Large area, thickness control and tuneable morphology
A Sharma, MA Verheijen, L Wu, S Karwal, V Vandalon, HCM Knoops, ...
Nanoscale 10 (18), 8615-8627, 2018
762018
3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries
L Baggetto, HCM Knoops, RAH Niessen, WMM Kessels, PHL Notten
Journal of Materials Chemistry 20 (18), 3703-3708, 2010
752010
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