OSAMU TABATA
OSAMU TABATA
Kyoto University of Advanced Science
Keine bestätigte E-Mail-Adresse - Startseite
Titel
Zitiert von
Zitiert von
Jahr
Anisotropic etching of silicon in TMAH solutions
O Tabata, R Asahi, H Funabashi, K Shimaoka, S Sugiyama
Sensors and Actuators A: Physical 34 (1), 51-57, 1992
5981992
Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
O Tabata, K Kawahata, S Sugiyama, I Igarashi
Sensors and actuators 20 (1-2), 135-141, 1989
5571989
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
T Tsuchiya, O Tabata, J Sakata, Y Taga
Journal of Microelectromechanical Systems 7 (1), 106-113, 1998
4971998
Micro process engineering: fundamentals, devices, fabrication, and applications
O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2013
1502013
Cmos-mems
H Baltes, O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2013
123*2013
Ciliary motion actuator using self-oscillating gel
O Tabata, H Hirasawa, S Aoki, R Yoshida, E Kokufuta
Sensors and Actuators A: Physical 95 (2-3), 234-238, 2002
1212002
Micro energy harvesting
O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2015
1092015
pH-controlled TMAH etchants for silicon micromachining
O Tabata
Sensors and Actuators A: Physical 53 (1-3), 335-339, 1996
1031996
LIGA and its Applications
O Brand, GK Fedder, C Hierold
John Wiley & Sons, 2009
1012009
Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method
F Dang, S Shinohara, O Tabata, Y Yamaoka, M Kurokawa, Y Shinohara, ...
Lab on a Chip 5 (4), 472-478, 2005
1002005
Inkjet-based micromanufacturing
PJ Smith, DH Shin
John Wiley & Sons, 2012
992012
Monolithic pyroelectric infrared image sensor using PVDF thin film
N Fujitsuka, J Sakata, Y Miyachi, K Mizuno, K Ohtsuka, Y Taga, O Tabata
Sensors and Actuators A: Physical 66 (1-3), 237-243, 1998
971998
Development of passive elements with variable mechanical impedance for wearable robots
S Kawamura, T Yamamoto, D Ishida, T Ogata, Y Nakayama, O Tabata, ...
Proceedings 2002 IEEE International Conference on Robotics and Automation …, 2002
862002
Resonant MEMS: fundamentals, implementation, and application
GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2015
852015
Comprehensive microsystems
YB Gianchandani, O Tabata, HP Zappe
822008
Moving mask UV lithography for three-dimensional structuring
Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 17 (2), 199, 2006
822006
High-performance genetic analysis on microfabricated capillary array electrophoresis plastic chips fabricated by injection molding
F Dang, O Tabata, M Kurokawa, AA Ewis, L Zhang, Y Yamaoka, ...
Analytical chemistry 77 (7), 2140-2146, 2005
772005
Reliability of MEMS: testing of materials and devices
O Brand, GK Fedder, C Hierold, JG Korvink
John Wiley & Sons, 2013
742013
Moving mask LIGA (M/sup 2/LIGA) process for control of side wall inclination
O Tabata, K Terasoma, N Agawa, K Yamamoto
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE …, 1999
711999
Surface micromachined micro-diaphragm pressure sensors
S Sugiyama, K Shimaoka, O Tabata
TRANSDUCERS'91: 1991 International Conference on Solid-State Sensors and …, 1991
691991
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