Gary K. Fedder
Gary K. Fedder
Professor of Electrical & Computer Engineering and Robotics, Carnegie Mellon University
Verified email at cmu.edu - Homepage
Title
Cited by
Cited by
Year
Endoscopic optical coherence tomography based on a microelectromechanical mirror
Y Pan, H Xie, GK Fedder
Optics letters 26 (24), 1966-1968, 2001
4712001
Laminated high-aspect-ratio microstructures in a conventional CMOS process
GK Fedder, S Santhanam, ML Reed, SC Eagle, DF Guillou, MSC Lu, ...
Sensors and Actuators A: Physical 57 (2), 103-110, 1996
4361996
Simulation of microelectromechanical systems
GK Fedder
University of California, Berkeley, 1994
4241994
A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer
J Wu, GK Fedder, LR Carley
IEEE Journal of Solid-State Circuits 39 (5), 722-730, 2004
3792004
Technologies for cofabricating MEMS and electronics
GK Fedder, RT Howe, TJK Liu, EP Quevy
Proceedings of the IEEE 96 (2), 306-322, 2008
2512008
Post-CMOS processing for high-aspect-ratio integrated silicon microstructures
H Xie, L Erdmann, X Zhu, KJ Gabriel, GK Fedder
Journal of Microelectromechanical Systems 11 (2), 93-101, 2002
2032002
Micromachined high-Q inductors in a 0.18-/spl mu/m copper interconnect low-k dielectric CMOS process
H Lakdawala, X Zhu, H Luo, S Santhanam, LR Carley, GK Fedder
IEEE Journal of Solid-State Circuits 37 (3), 394-403, 2002
199*2002
Volatile organic compound detection using nanostructured copolymers
B Li, G Sauvé, MC Iovu, M Jeffries-El, R Zhang, J Cooper, S Santhanam, ...
Nano Letters 6 (8), 1598-1602, 2006
1912006
Cmos-mems
H Baltes, O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2013
180*2013
A post-CMOS micromachined lateral accelerometer
H Luo, G Zhang, LR Carley, GK Fedder
Journal of Microelectromechanical systems 11 (3), 188-195, 2002
1772002
Single-chip computers with microelectromechanical systems-based magnetic memory
LR Carley, JA Bain, GK Fedder, DW Greve, DF Guillou, MSC Lu, ...
Journal of applied physics 87 (9), 6680-6685, 2000
1672000
Inkjet printed chemical sensor array based on polythiophene conductive polymers
B Li, S Santhanam, L Schultz, M Jeffries-El, MC Iovu, G Sauvé, J Cooper, ...
Sensors and Actuators B: Chemical 123 (2), 651-660, 2007
1652007
Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development
SC Yao, X Tang, CC Hsieh, Y Alyousef, M Vladimer, GK Fedder, ...
Energy 31 (5), 636-649, 2006
1652006
A two-axis electrothermal micromirror for endoscopic optical coherence tomography
A Jain, A Kopa, Y Pan, GK Fedder, H Xie
IEEE journal of selected topics in Quantum electronics 10 (3), 636-642, 2004
1542004
Micro process engineering: fundamentals, devices, fabrication, and applications
O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2013
1462013
Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope
H Xie, GK Fedder
IEEE Sensors Journal 3 (5), 622-631, 2003
1462003
Position control of parallel-plate microactuators for probe-based data storage
MSC Lu, GK Fedder
Journal of microelectromechanical Systems 13 (5), 759-769, 2004
1442004
Endoscopic optical coherence tomography with a modified microelectromechanical systems mirror for detection of bladder cancers
T Xie, H Xie, GK Fedder, Y Pan
Applied optics 42 (31), 6422-6426, 2003
1442003
Emerging simulation approaches for micromachined devices
T Mukherjee, GK Fedder, D Ramaswamy, J White
IEEE transactions on computer-aided design of integrated circuits and …, 2000
1352000
Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS
H Xie, GK Fedder
Sensors and Actuators A: Physical 95 (2-3), 212-221, 2002
1342002
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Articles 1–20