| MEMS device having a suspended diaphragm and manufacturing process thereof D Faralli, P Ferrari, LM Castoldi US Patent 9,233,834, 2016 | 34 | 2016 |
| Analog input device with integrated pressure sensor and electronic apparatus equipped with said input device L Baldo, C Combi, D Faralli US Patent 7,928,960, 2011 | 32 | 2011 |
| Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device C Combi, L Baldo, D Faralli, FF Villa US Patent 7,322,236, 2008 | 32 | 2008 |
| Method for forming buried cavities within a semiconductor body, and semiconductor body thus made G Barlocchi, P Corona, D Faralli, FF Villa US Patent 8,420,428, 2013 | 22 | 2013 |
| Optimized gradient-free PZT thin films for micro-actuators J Abergel, M Allain, H Michaud, M Cueff, T Ricart, C Dieppedale, ... 2012 IEEE International Ultrasonics Symposium, 972-974, 2012 | 16 | 2012 |
| Magnetoresistive sensor integrated in a chip for detecting magnetic fields perpendicular to the chip and manufacturing process thereof D Paci, D Faralli, A Picco US Patent 9,568,566, 2017 | 14 | 2017 |
| Manufacturing method for a fluid-ejection device, and fluid-ejection device M Cattaneo, CL Prelini, L Colombo, D Faralli, A Sciutti, L Tentori US Patent 9,849,674, 2017 | 13 | 2017 |
| Method for forming buried cavities within a semiconductor body, and semiconductor body thus made G Barlocchi, P Corona, D Faralli, FF Villa US Patent 7,811,848, 2010 | 13 | 2010 |
| Electronic device with integrated temperature sensor and manufacturing method thereof PK Radhakrishnan, D Faralli US Patent 9,976,914, 2018 | 11 | 2018 |
| MEMS device incorporating a fluidic path, and manufacturing process thereof D Faralli, B Vigna, LM Castoldi US Patent 9,321,628, 2016 | 11 | 2016 |
| Influence of the crystallographic orientation of Pb(Zr,Ti)O3 films on the transverse piezoelectric coefficient d31 M Cueff, M Allain, J Abergel, G Le Rhun, M Aïd, E Defay, D Faralli 2011 IEEE International Ultrasonics Symposium, 1948-1951, 2011 | 10 | 2011 |
| MEMS piezoelectric device and corresponding manufacturing process MF Bevilacqua, FF Villa, R Scaldaferri, V Casuscelli, A Di Matteo, D Faralli US Patent 10,186,654, 2019 | 9 | 2019 |
| PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling F Casset, M Cueff, A Suhm, G Le Rhun, J Abergel, M Allain, C Dieppedale, ... 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and …, 2012 | 8 | 2012 |
| Testing of piezo-actuated glass micro-membranes by optical low-coherence reflectometry S Merlo, P Poma, E Crisà, D Faralli, M Soldo Sensors 17 (3), 462, 2017 | 7 | 2017 |
| Process for manufacturing a nozzle plate and fluid-ejection device provided with the nozzle plate D Faralli, M Palmieri US Patent App. 13/891,609, 2013 | 7 | 2013 |
| Assembly for a mems environmental sensor device having improved resistance, and corresponding manufacturing process D Faralli, B Vigna, LM Castoldi US Patent App. 14/327,272, 2015 | 6 | 2015 |
| Process for manufacturing a SOI wafer with improved gettering capability R Capedelli, L Turi, D Faralli US Patent App. 11/347,801, 2006 | 2 | 2006 |
| Microfluid delivery device and method for manufacturing the same D Faralli, LM Castoldi, P Ferrari, M Carminati US Patent 9,469,109, 2016 | 1 | 2016 |
| Niobium doped lead zirconate titanate thin films grown by chemical solution deposition N Chidambaram, A Mazzalai, C Sandu, D Balma, P Muralt, D Faralli, ... 2013 Joint IEEE International Symposium on Applications of Ferroelectric and …, 2013 | 1 | 2013 |
| Optimization of electrodes design for PZT thin-film actuated membranes F Casset, H Michaud, T Ricart, G Le Rhun, M Cueff, J Abergel, P Ancey, ... Procedia Engineering 47, 108-111, 2012 | 1 | 2012 |
