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Richard S. Muller
Richard S. Muller
Bestätigte E-Mail-Adresse bei eecs.berkeley.edu
Titel
Zitiert von
Zitiert von
Jahr
Device electronics for integrated circuits
RS Muller, TI Kamins, M Chan, PK Ko
Wiley 2, 54, 1986
26721986
Surface micromachining for microelectromechanical systems
JM Bustillo, RT Howe, RS Muller
Proceedings of the IEEE 86 (8), 1552-1574, 1998
9721998
Etch rates for micromachining processing
KR Williams, RS Muller
Journal of Microelectromechanical systems 5 (4), 256-269, 1996
9701996
IC-processed electrostatic micromotors
LS Fan, YC Tai, RS Muller
Sensors and actuators 20 (1-2), 41-47, 1989
4831989
Integrated movable micromechanical structures for sensors and actuators
LS Fan, YC Tai, RS Muller
IEEE Transactions on Electron Devices 35 (6), 724-730, 1988
4651988
Magnetically actuated, addressable microstructures
JW Judy, RS Muller
Journal of Microelectromechanical systems 6 (3), 249-256, 1997
3891997
Resonant-microbridge vapor sensor
RT Howe, RS Muller
IEEE Transactions on Electron Devices 33 (4), 499-506, 1986
3511986
Silicon-processed overhanging microgripper
CJ Kim, AP Pisano, RS Muller
Journal of Microelectromechanical Systems 1 (1), 31-36, 1992
3351992
IC-processed electrostatic micro-motors
LS Fan, YC Tai, RS Muller
IEEE, 1988
3161988
Surface-micromachined microoptical elements and systems
RS Muller, KY Lau
Proceedings of the IEEE 86 (8), 1705-1720, 1998
2681998
Polycrystalline silicon micromechanical beams
RT Howe, RS Muller
Journal of the Electrochemical Society 130 (6), 1420, 1983
2671983
Hydrogen in lithium niobate
JM Cabrera, J Olivares, M Carrascosa, J Rams, R Müller, E Diéguez
Advances in Physics 45 (5), 349-392, 1996
2581996
Silicon micromechanics: sensors and actuators on a chip
RT Howe, RS Muller, KJ Gabriel, WSN Trimmer
IEEE spectrum 27 (7), 29-31, 1990
2521990
IC-processed electrostatic synchronous micromotors
YC Tai, RS Muller
Sensors and Actuators 20 (1-2), 49-55, 1989
2501989
Investigation of porous silicon for vapor sensing
RC Anderson, RS Muller, CW Tobias
Lawrence Livermore National Lab.(LLNL), Livermore, CA (United States …, 1989
2431989
Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers
TJ Seok, N Quack, S Han, RS Muller, MC Wu
Optica 3 (1), 64-70, 2016
2412016
Magnetic microactuation of polysilicon flexure structures
JW Judy, RS Muller, HH Zappe
Journal of microelectromechanical systems 4 (4), 162-169, 1995
2351995
Polysilicon microgripper
CJ Kim, AP Pisano, RS Muller, MG Lim
Sensors and Actuators A: Physical 33 (3), 221-227, 1992
2311992
IC-processed micro-motors: Design, technology, and testing
YC Tai, LS Fan, RS Muller
IEEE Micro Electro Mechanical Systems,, Proceedings,'An Investigation of …, 1989
2231989
Stroboscopic interferometer system for dynamic MEMS characterization
MR Hart, RA Conant, KY Lau, RS Muller
Journal of microelectromechanical systems 9 (4), 409-418, 2000
2222000
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