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Dr. Thomas Herzog
Dr. Thomas Herzog
Fraunhofer IKTS, Dresden
Verified email at ikts.fraunhofer.de
Title
Cited by
Cited by
Year
Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
S Barth, H Bartzsch, D Gloess, P Frach, T Herzog, S Walter, H Heuer
Ultrasonics Symposium (IUS), 2013 IEEE International, 1351-1353, 2013
422013
Method of fabricating an electrode for a bulk acoustic resonator
W Nessler, R Thalhammer, TR Herzog, M Handtmann, L Elbrecht
US Patent App. 12/646,084, 2010
242010
Properties of piezoelectric AlN layers deposited by reactive pulse magnetron sputtering
H Bartzsch, M Gittner, D Glöß, P Frach, T Herzog, S Walter, H Heuer
Society of Vacuum Coaters (Annual Technical Conference) <54, 2011, Chicago …, 2011
112011
Test head for testing a workpiece having an ultrasonic transducer configuration containing a plurality of ultrasonic transducers and process for producing such a test head
G Engl, M Kroening, H Heuer, T Herzog
US Patent 9,423,382, 2016
102016
Aluminum Nitride Thin Films for High Frequency Smart Ultrasonic Sensor Systems
T HERZOG, S WALTER, S HILLMANN, H HEUER
18th World Conference on Nondestructive Testing, 16-20 April 2012, Durban …, 2012
62012
Investigations on aluminum nitride thin film properties and design considerations for smart high frequency ultrasound sensors
S Walter, T Herzog, H Heuer, ID Branch
The Second International Conference on Smart Sensor, Actuators and MEMS …, 2011
62011
Design and fabrication of a 5 MHz ultrasonic phased array probe with curved transducer
J Fischer, T Herzog, S Walter, H Heuer
Smart Sensors, Actuators, and MEMS VI 8763, 685-690, 2013
52013
Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies
S Walter, T Herzog, H Heuer, H Bartzsch, D Gloess
Microsystem technologies 18 (7), 1193-1199, 2012
52012
Comparison of ultrasonic phased array probes based on PMN-PT and PZT 1-3 composites
S Walter, T Herzog, F Schubert, H Heuer
19th WCNDT 2016 World Conference on non-Destructive Testing, 13-17 June, Germany, 2016
42016
Analysing a vein liveness detection scheme
T Herzog, A Uhl
2020 8th International Workshop on Biometrics and Forensics (IWBF), 1-6, 2020
32020
High-Performance Ultrasonic Transducers based on PMN-PT Single Crystals Fabricated in 1-3 Piezo-Composite Technology
T Herzog, S Walter, SG Lee, JH Lee, F Schubert, H Heuer
International Congress on Ultrasonics; Bruges, Belgium, 3-9 Sept 2019, 2019
32019
Investigations of PMN-PT composites for high sensitive ultrasonic phased array probes in NDE
S Walter, T Herzog, F Schubert, H Heuer, TY Han, SG Lee, HM Chae, ...
2015 IEEE SENSORS, 1-4, 2015
32015
Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1−XN films deposited by pulsed magnetron sputtering
S Barth, H Bartzsch, D Glöß, P Frach, O Zywitzki, T Herzog, S Walter, ...
2014 IEEE International Ultrasonics Symposium, 769-772, 2014
22014
Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz
Y Wei, T Herzog, H Heuer
Ultrasonics 53 (3), 739-744, 2013
12013
Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz
Y Wei, T Herzog, H Heuer
Ultrasonics 53 (3), 739-744, 2013
12013
Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers
JY Wei, T Herzog, H Heuer
Sensors & Transducers, Vol. 18, Special Issue 18 (SPEC. ISS. 1), pp. 66-75, 2013
12013
Smart ultrasonic sensors systems: Investigations on aluminum nitride thin films for the excitation of high frequency ultrasound
S Walter, T Herzog, H Heuer, H Bartzsch, D Gloess
Smart Sensors, Actuators, and MEMS V 8066, 63-70, 2011
12011
Ultrasonic dual element probes revisited–complex wave phenomena as a basis for transducer design and optimization
F Schubert, T Herzog, S Walter, H Heuer
Proceedings of Meetings on Acoustics ICU 38 (1), 022006, 2019
2019
High-Performance Ultrasonic Transducers based on PMN-PT Single Crystals for NDT of aerospace materials
T Herzog, S Walter, SG Lee, JH Lee, F Schubert, R Dittrich, H Heuer
11th Symposium on NDT in Aerospace – PARIS-SACLAY – Nov 13 to 15, 2019, 2019
2019
ENTWICKLUNG EINES ULTRASCHALL-PRÜFSYSTEMS FÜR ZUGFESTE PRESSVERBINDER AN FAHRDRAHTLEITUNGEN
T Herzog, S Walter, H Heuer, J Michauk, S Heilmann
DACH-Jahrestagung 2019, Friedrichshafen 27.5. bis 29.5.2019, 2019
2019
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