Methods of manufacturing a three-dimensional semiconductor device and semiconductor devices fabricated thereby YW Cha, SUH Dong-Chul, DL Bae
US Patent 7,605,022, 2009
204 2009 Unconventional patterning with a modulus-tunable mold: from imprinting to microcontact printing PJ Yoo, SJ Choi, JH Kim, D Suh, SJ Baek, TW Kim, HH Lee
Chemistry of materials 16 (24), 5000-5005, 2004
164 2004 Rigiflex lithography for nanostructure transfer D Suh, SJ Choi, HH Lee
Advanced Materials 17 (12), 1554-1560, 2005
135 2005 Al2O3/TiO2 stack layers for effective surface passivation of crystalline silicon D Suh, DY Choi, KJ Weber
Journal of Applied Physics 114 (15), 2013
46 2013 Electrical properties of atomic layer deposited Al2O3 with anneal temperature for surface passivation D Suh, WS Liang
Thin Solid Films 539, 309-316, 2013
43 2013 Surface Passivation of Boron-Diffused p-Type Silicon Surfaces With (1 0 0) and (1 1 1) Orientations by ALD Al O Layers W Liang, KJ Weber, D Suh, SP Phang, J Yu, AK McAuley, BR Legg
IEEE Journal of Photovoltaics 3 (2), 678-683, 2013
43 2013 Electro-spray deposition of a mesoporous TiO 2 charge collection layer: toward large scale and continuous production of high efficiency perovskite solar cells M Kim, BJ Kim, J Yoon, J Lee, D Suh, N Park, M Choi, HS Jung
Nanoscale 7 (48), 20725-20733, 2015
39 2015 Methods of reducing impurity concentration in isolating films in semiconductor devices JW Choi, EK Baek, S Ahn, HG Kim, SUH Dong-Chul, YS Choi
US Patent 7,867,924, 2011
29 2011 Bilayer reversal imprint lithography: direct metal–polymer transfer D Suh, J Rhee, HH Lee
Nanotechnology 15 (8), 1103, 2004
22 2004 Solar cell and method of manufacturing the same D Suh, H Kim, G Seo, J Jeong, B Jeong
KR Patent App. 10-2011-0,047,426, 2012
21 2012 Solar cell and method for manufacturing the same D Suh
KR Patent App. 10-2009-0,134,604, 2011
21 2011 Solar cell and method for manufacturing the same D Suh
KR Patent App. 10-2009-0,054,094, 2010
21 2010 Impact of buffer layer process and Na on shunt paths of monolithic series-connected CIGSSe thin film solar cells C Bin Mo, SJ Park, S Bae, M Lim, J Nam, D Kim, JY Yang, D Suh, BK Min, ...
Scientific reports 9 (1), 3666, 2019
19 2019 Degradation of the surface passivation of plasma‐assisted ALD Al2 O3 under damp‐heat exposure W Liang, D Suh, J Yu, J Bullock, KJ Weber
physica status solidi (a) 212 (2), 274-281, 2015
19 2015 Effective silicon surface passivation by atomic layer deposited Al2 O3 /TiO2 stacks D Suh, K Weber
physica status solidi (RRL)–Rapid Research Letters 8 (1), 40-43, 2014
17 2014 Sub-100 nm organic light-emitting diodes patterned with room temperature imprint lithography D Suh, HH Lee
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004
17 2004 Method of manufacturing a stacked semiconductor device D Suh, H Kim, E Paek, Y Choi, J Choi
KR Patent App. 10-2006-0,118,081, 2008
16 2008 Permeability-and surface-energy-tunable polyurethane acrylate molds for capillary force lithography D Suh, H Tak, S Choi, T Kim
ACS Applied Materials & Interfaces 7 (43), 23824-23830, 2015
15 2015 Continuously deposited anti-reflection double layer of silicon nitride and silicon oxynitride for selective emitter solar cells by PECVD S Park, H Park, D Kim, J Nam, JY Yang, D Lee, BK Min, KN Kim, SJ Park, ...
Current Applied Physics 17, 517-521, 2017
13 2017 Laser doping from Al2O3 layers A Fell, E Franklin, D Walters, DC Suh, K Weber
WIP-Renewable Energies, 2012
12 2012