| Ultra-conformal carbon film deposition SP Behera, S Shaikh, P Manna, MB Pandit, T Summan, P Reilly, D Padhi, ... US Patent 9,721,784, 2017 | 213 | 2017 |
| Oxygen radical and plasma damage of low-k organosilicate glass materials: Diffusion-controlled mechanism for carbon depletion MA Goldman, DB Graves, GA Antonelli, SP Behera, JA Kelber Journal of Applied Physics 106 (1), 2009 | 87 | 2009 |
| Fundamental mechanisms of oxygen plasma-induced damage of ultralow-k organosilicate materials: The role of thermal P3 atomic oxygen M Chaudhari, J Du, S Behera, S Manandhar, S Gaddam, J Kelber Applied Physics Letters 94 (20), 2009 | 49 | 2009 |
| Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system ZJ Ye, IIJD Pinson, H Hanawa, J Zhou, X Lin, RG Duan, KD Lee, BH Kim, ... US Patent 10,403,535, 2019 | 23 | 2019 |
| Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3 S Behera, J Lee, S Gaddam, S Pokharel, J Wilks, F Pasquale, D Graves, ... Applied Physics Letters 97 (3), 2010 | 19 | 2010 |
| Photo-induced site-specific nitridation of plasma-deposited B10C2Hx films: A new pathway toward post-deposition doping of semiconducting boron carbides S Behera, J Wilks, PA Dowben, MS Driver, AN Caruso, JA Kelber Surface science 604 (21-22), L51-L54, 2010 | 18 | 2010 |
| Photofragmentation of the closo-Carboranes Part II: VUV Assisted Dehydrogenation in the closo-Carboranes and Semiconducting B10C2Hx Films E Rühl, NF Riehs, S Behera, J Wilks, J Liu, HW Jochims, AN Caruso, ... The Journal of Physical Chemistry A 114 (27), 7284-7291, 2010 | 15 | 2010 |
| He plasma pretreatment effects on oxygen plasma-induced carbon loss and surface roughening in an ultralow-k organosilicate glass film SP Behera, Q Wang, JA Kelber Journal of Physics D: Applied Physics 44 (15), 155204, 2011 | 12 | 2011 |
| Film thickness uniformity improvement using edge ring and bias electrode geometry KP Lo, V Nagorny, W Liu, TK Guarini, BL Hwang, MJ Bevan, J Abraham, ... US Patent 11,380,575, 2022 | 1 | 2022 |
| High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials P Kulshreshtha, KD Lee, BH Kim, ZJ Ye, SP Behera, G Balasubramanian, ... US Patent App. 16/440,513, 2019 | 1 | 2019 |
| Ultra-conformal carbon film deposition SP Behera, S Shaikh, P Manna, MB Pandit, T Summan, P Reilly, D Padhi, ... US Patent 10,074,534, 2018 | 1 | 2018 |
| Film thickness uniformity improvement using edge ring and bias electrode geometry KP Lo, V Nagorny, W Liu, TK Guarini, BL Hwang, MJ Bevan, J Abraham, ... US Patent App. 17/832,775, 2022 | | 2022 |
| High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials P Kulshreshtha, KD Lee, BH Kim, ZJ Ye, SP Behera, G Balasubramanian, ... US Patent 10,325,800, 2019 | | 2019 |
| Pore Sealing vs. Surface Densification in Inhibition of O2 Plasma Damage in Organosilicates J Kelber, S Behera APS Annual Gaseous Electronics Meeting Abstracts, PR3. 001, 2011 | | 2011 |
| He Plasma Pretreatment Effects on O2-Plasma Induced Damage of Nanoporous Organosilicate Glass Film S Behera, Q Wang, J Kelber MRS Spring, San Francisco CA, O2.2, 2011 | | 2011 |
| The interactions of plasma with low-k dielectrics: Fundamental damage and protection mechanisms SP Behera University of North Texas, 2011 | | 2011 |
| VUV-Induced Bond Scission and Site-Specific Nitridation in Organosilicate Glass: Bulk and Surface Effects S Behera, J Lee, S Gaddam, S Pokharel, D Graves, J Kelber 57th AVS ― Albuquerque, October 2010, 2010 | | 2010 |
| He plasma pretreatment Effects on Oxygen Plasma-Induced Carbon Loss and Surface Roughening of OSG Films S Behera, J Kelber TECHCON Austin, TX USA, 2010 | | 2010 |
| Oxygen Plasma and radicals Interactions with Ultralow-k organosilicates: fundamental Damage Mechanism J Kelber, S Behera, S Manandhar, S Gaddam 56th AVS ― San Jose, Nov 2009, 2009 | | 2009 |
| Some Studies on Electrical Behaviour of Red Mercuric Iodide Single Crystals SL Sharma, SP Behera, AK Thakur 16th International Workshop on Room-Temperature Semiconductor X- and Gamma …, 2008 | | 2008 |
