| Piezoelectric Al1− xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors R Matloub, M Hadad, A Mazzalai, N Chidambaram, G Moulard, CS Sandu, ... Applied Physics Letters 102 (15), 2013 | 139 | 2013 |
| Synthesis and densification of monolithic zirconium carbide by reactive hot pressing C Nachiappan, L Rangaraj, C Divakar, V Jayaram Journal of the American Ceramic Society 93 (5), 1341-1346, 2010 | 77 | 2010 |
| Characterization and fatigue of the converse piezoelectric effect in PZT films for MEMS applications A Mazzalai, D Balma, N Chidambaram, R Matloub, P Muralt Journal of Microelectromechanical Systems 24 (4), 831-838, 2014 | 67 | 2014 |
| Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes N Chidambaram, A Mazzalai, P Muralt Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on 59 …, 2012 | 57 | 2012 |
| High-aspect-ratio nanoimprint process chains VJ Cadarso, N Chidambaram, L Jacot-Descombes, H Schift Microsystems & nanoengineering 3 (1), 1-12, 2017 | 46 | 2017 |
| High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps N Chidambaram, R Kirchner, M Altana, H Schift Journal of Vacuum Science & Technology B 34 (6), 2016 | 41 | 2016 |
| ZEP520A—A resist for electron-beam grayscale lithography and thermal reflow R Kirchner, VA Guzenko, I Vartiainen, N Chidambaram, H Schift Microelectronic Engineering 153, 71-76, 2016 | 38 | 2016 |
| Selective surface smoothening of polymer microlenses by depth confined softening N Chidambaram, R Kirchner, R Fallica, L Yu, M Altana, H Schift Advanced Materials Technologies 2 (5), 1700018, 2017 | 37 | 2017 |
| Comparison of lead zirconate titanate thin films for microelectromechanical energy harvester with interdigitated and parallel plate electrodes N Chidambaram, A Mazzalai, D Balma, P Muralt IEEE transactions on ultrasonics, ferroelectrics, and frequency control 60 …, 2013 | 35 | 2013 |
| Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode N Chidambaram, D Balma, R Nigon, A Mazzalai, R Matloub, CS Sandu, ... Journal of Micromechanics and Microengineering 25 (4), 045016, 2015 | 20 | 2015 |
| How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses R Kirchner, N Chidambaram, M Altana, H Schift Laser 3D Manufacturing IV 10095, 8-16, 2017 | 16 | 2017 |
| High Piezoelectric Longitudinal Coefficients in Sol–gel PZT Thin Film Multilayers D Balma, A Mazzalai, N Chidambaram, CS Sandu, A Neels, A Dommann, ... Journal of the American Ceramic Society 97 (7), 2069-2075, 2014 | 16 | 2014 |
| Dynamic and long-time tests of the transverse piezoelectric coefficient in PZT thin films A Mazzalai, D Balma, N Chidambaram, P Muralt, L Colombo 2014 Joint IEEE International Symposium on the Applications of Ferroelectric …, 2014 | 15 | 2014 |
| Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes N Chidambaram, A Mazzalai, P Muralt Proceedings of ISAF-ECAPD-PFM 2012, 1-4, 2012 | 14 | 2012 |
| Simultaneous piezoelectric and ferroelectric characterization of thin films for MEMS actuators A Mazzalai, D Balma, N Chidambaram, L Jin, P Muralt 2013 Joint IEEE International Symposium on Applications of Ferroelectric and …, 2013 | 13 | 2013 |
| Benchmarking surface selective vacuum ultraviolet and thermal postprocessing of thermoplastics for ultrasmooth 3-D-printed micro-optics R Kirchner, N Chidambaram, H Schift Optical Engineering 57 (4), 041403-041403, 2018 | 12 | 2018 |
| Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography H Schift, R Kirchner, N Chidambaram, M Altana Nanophotonics Australasia 2017 10456, 39-47, 2018 | 8 | 2018 |
| Selective surface smoothening of 3D micro-optical elements H Schift, N Chidambaram, M Altana, R Kirchner SPIE Advanced Lithography, 101440B-101440B-7, 2017 | 5 | 2017 |
| Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics R Kirchner, R Hoekstra, N Chidambaram, H Schift 33rd European Mask and Lithography Conference 10446, 225-232, 2017 | 4 | 2017 |
| Effect of non-stoichiometry on the densification behavior of reactively processed ZrC and its composite N Chidambaram Master's thesis, Department of Materials Engineering, Indian Institute of …, 2009 | 4 | 2009 |
Paul MuraltProfessor in Materials Science, EPFL, Lausanne, SwitzerlandVerified email at epfl.ch
