Cited by
Cited by
Critical review: Adhesion in surface micromechanical structures
R Maboudian, RT Howe
Journal of Vacuum Science & Technology B: Microelectronics and Nanometerá…, 1997
Strong interlayer coupling in van der Waals heterostructures built from single-layer chalcogenides
H Fang, C Battaglia, C Carraro, S Nemsak, B Ozdol, JS Kang, HA Bechtel, ...
Proceedings of the National Academy of Sciences 111 (17), 6198-6202, 2014
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
U Srinivasan, MR Houston, RT Howe, R Maboudian
Journal of Microelectromechanical Systems 7 (2), 252-260, 1998
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
R Maboudian, WR Ashurst, C Carraro
Sensors and Actuators A: Physical 82 (1-3), 219-223, 2000
Hole Selective MoOx Contact for Silicon Solar Cells
C Battaglia, X Yin, M Zheng, ID Sharp, T Chen, S McDonnell, A Azcatl, ...
Nano letters 14 (2), 967-971, 2014
Surface processes in MEMS technology
R Maboudian
Surface Science Reports 30 (6-8), 207-269, 1998
Evidence of structural strain in epitaxial graphene layers on 6H-SiC (0001)
N Ferralis, R Maboudian, C Carraro
Physical review letters 101 (15), 156801, 2008
Tribological challenges in micromechanical systems
R Maboudian, WR Ashurst, C Carraro
Tribology letters 12 (2), 95-100, 2002
Thermal behavior of alkyl monolayers on silicon surfaces
MM Sung, GJ Kluth, OW Yauw, R Maboudian
Langmuir 13 (23), 6164-6168, 1997
Metal-catalyzed crystallization of amorphous carbon to graphene
M Zheng, K Takei, B Hsia, H Fang, X Zhang, N Ferralis, H Ko, YL Chueh, ...
Applied Physics Letters 96 (6), 063110, 2010
Silver dendrites from galvanic displacement on commercial aluminum foil as an effective SERS substrate
A GutÚs, C Carraro, R Maboudian
Journal of the American Chemical Society 132 (5), 1476-1477, 2010
High Surface Area MoS2/Graphene Hybrid Aerogel for Ultrasensitive NO2 Detection
H Long, A Harley‐Trochimczyk, T Pham, Z Tang, T Shi, A Zettl, C Carraro, ...
Advanced Functional Materials 26 (28), 5158-5165, 2016
Surface chemistry and tribology of MEMS
R Maboudian, C Carraro
Annu. Rev. Phys. Chem. 55, 35-54, 2004
Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer
WR Ashurst, C Yau, C Carraro, R Maboudian, MT Dugger
Journal of microelectromechanical systems 10 (1), 41-49, 2001
High friction from a stiff polymer using microfiber arrays
C Majidi, RE Groff, Y Maeno, B Schubert, S Baek, B Bush, R Maboudian, ...
Physical review letters 97 (7), 076103, 2006
Observation of three growth mechanisms in self-assembled monolayers
C Carraro, OW Yauw, MM Sung, R Maboudian
The Journal of Physical Chemistry B 102 (23), 4441-4445, 1998
Selective etching of silicon carbide films
D Gao, RT Howe, R Maboudian
US Patent 7,151,277, 2006
Thermal behavior of alkylsiloxane self-assembled monolayers on the oxidized Si (100) surface
GJ Kluth, MM Sung, R Maboudian
Langmuir 13 (14), 3775-3780, 1997
Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS
WR Ashurst, C Yau, C Carraro, C Lee, GJ Kluth, RT Howe, R Maboudian
Sensors and Actuators A: Physical 91 (3), 239-248, 2001
Highly flexible, all solid-state micro-supercapacitors from vertically aligned carbon nanotubes
B Hsia, J Marschewski, S Wang, JB In, C Carraro, D Poulikakos, ...
Nanotechnology 25 (5), 055401, 2014
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