Gregory N Parsons
Gregory N Parsons
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Zitiert von
Zitiert von
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
P Poodt, DC Cameron, E Dickey, SM George, V Kuznetsov, GN Parsons, ...
Journal of Vacuum Science & Technology A 30 (1), 2012
Evidence of aluminum silicate formation during chemical vapor deposition of amorphous thin films on Si(100)
TM Klein, D Niu, WS Epling, W Li, DM Maher, CC Hobbs, RI Hegde, ...
Applied Physics Letters 75 (25), 4001-4003, 1999
Low hydrogen content stoichiometric silicon nitride films deposited by plasma‐enhanced chemical vapor deposition
GN Parsons, JH Souk, J Batey
Journal of applied physics 70 (3), 1553-1560, 1991
Three-dimensional self-assembled photonic crystals with high temperature stability for thermal emission modification
KA Arpin, MD Losego, AN Cloud, H Ning, J Mallek, NP Sergeant, L Zhu, ...
Nature communications 4 (1), 2630, 2013
Ultra‐fast degradation of chemical warfare agents using MOF–nanofiber kebabs
J Zhao, DT Lee, RW Yaga, MG Hall, HF Barton, IR Woodward, CJ Oldham, ...
Angewandte Chemie 128 (42), 13418-13422, 2016
Progress and future directions for atomic layer deposition and ALD-based chemistry
GN Parsons, SM George, M Knez
Mrs Bulletin 36 (11), 865-871, 2011
Area-selective deposition: Fundamentals, applications, and future outlook
GN Parsons, RD Clark
Chemistry of Materials 32 (12), 4920-4953, 2020
Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon
JJ Chambers, GN Parsons
Journal of Applied Physics 90 (2), 918-933, 2001
Atomic layer deposition on electrospun polymer fibers as a direct route to Al2O3 microtubes with precise wall thickness control
Q Peng, XY Sun, JC Spagnola, GK Hyde, RJ Spontak, GN Parsons
Nano letters 7 (3), 719-722, 2007
Mechanisms and reactions during atomic layer deposition on polymers
GN Parsons, SE Atanasov, EC Dandley, CK Devine, B Gong, JS Jur, ...
Coordination Chemistry Reviews 257 (23-24), 3323-3331, 2013
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
CS Yang, LL Smith, CB Arthur, GN Parsons
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
“Zincone” zinc oxide− organic hybrid polymer thin films formed by molecular layer deposition
Q Peng, B Gong, RM VanGundy, GN Parsons
Chemistry of Materials 21 (5), 820-830, 2009
Catalytic “MOF-Cloth” Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation …
DT Lee, J Zhao, GW Peterson, GN Parsons
Chemistry of Materials 29 (11), 4894-4903, 2017
Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition
KJ Park, JM Doub, T Gougousi, GN Parsons
Applied Physics Letters 86 (5), 2005
Facile conversion of hydroxy double salts to metal–organic frameworks using metal oxide particles and atomic layer deposition thin-film templates
J Zhao, WT Nunn, PC Lemaire, Y Lin, MD Dickey, CJ Oldham, HJ Walls, ...
Journal of the American Chemical Society 137 (43), 13756-13759, 2015
UiO-66-NH2 Metal–Organic Framework (MOF) Nucleation on TiO2, ZnO, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on …
DT Lee, J Zhao, CJ Oldham, GW Peterson, GN Parsons
ACS applied materials & interfaces 9 (51), 44847-44855, 2017
Temperature-dependent subsurface growth during atomic layer deposition on polypropylene and cellulose fibers
JS Jur, JC Spagnola, K Lee, B Gong, Q Peng, GN Parsons
Langmuir 26 (11), 8239-8244, 2010
High dielectric constant metal silicates formed by controlled metal-surface reactions
GN Parsons, JJ Chambers, MJ Kelly
US Patent 6,521,911, 2003
Atomic layer deposition and abrupt wetting transitions on nonwoven polypropylene and woven cotton fabrics
GK Hyde, G Scarel, JC Spagnola, Q Peng, K Lee, B Gong, KG Roberts, ...
Langmuir 26 (4), 2550-2558, 2010
Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers
JC Spagnola, B Gong, SA Arvidson, JS Jur, SA Khan, GN Parsons
Journal of Materials Chemistry 20 (20), 4213-4222, 2010
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