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Ulf Helmersson
Ulf Helmersson
Professor, Linköping University
Bestätigte E-Mail-Adresse bei liu.se
Titel
Zitiert von
Zitiert von
Jahr
Ionized physical vapor deposition (IPVD): A review of technology and applications
U Helmersson, M Lattemann, J Bohlmark, AP Ehiasarian, ...
Thin solid films 513 (1-2), 1-24, 2006
13642006
A novel pulsed magnetron sputter technique utilizing very high target power densities
V Kouznetsov, K Macak, JM Schneider, U Helmersson, I Petrov
Surface and coatings technology 122 (2-3), 290-293, 1999
13481999
Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness
U Helmersson, S Todorova, SA Barnett, JE Sundgren, LC Markert, ...
Journal of Applied Physics 62 (2), 481-484, 1987
9371987
High power impulse magnetron sputtering discharge
JT Gudmundsson, N Brenning, D Lundin, U Helmersson
Journal of Vacuum Science & Technology A 30 (3), 2012
7652012
On the film density using high power impulse magnetron sputtering
M Samuelsson, D Lundin, J Jensen, MA Raadu, JT Gudmundsson, ...
Surface and Coatings Technology 205 (2), 591-596, 2010
4642010
Optical properties of anatase TiO2 thin films prepared by aqueous sol–gel process at low temperature
Z Wang, U Helmersson, PO Käll
Thin Solid Films 405 (1-2), 50-54, 2002
4432002
Influence of high power densities on the composition of pulsed magnetron plasmas
AP Ehiasarian, R New, WD Münz, L Hultman, U Helmersson, ...
Vacuum 65 (2), 147-154, 2002
4062002
The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge
J Bohlmark, M Lattemann, JT Gudmundsson, AP Ehiasarian, ...
Thin Solid Films 515 (4), 1522-1526, 2006
3912006
Microstructure modification of TiN by ion bombardment during reactive sputter deposition
I Petrov, L Hultman, U Helmersson, JE Sundgren, JE Greene
Thin Solid Films 169 (2), 299-314, 1989
3721989
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge
K Macák, V Kouznetsov, J Schneider, U Helmersson, I Petrov
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 18 (4 …, 2000
3672000
Ionization of sputtered metals in high power pulsed magnetron sputtering
J Bohlmark, J Alami, C Christou, AP Ehiasarian, U Helmersson
Journal of Vacuum Science & Technology A 23 (1), 18-22, 2005
3432005
Ion-assisted physical vapor deposition for enhanced film properties on nonflat surfaces
J Alami, PO Persson, D Music, JT Gudmundsson, J Bohlmark, ...
Journal of Vacuum Science & Technology A 23 (2), 278-280, 2005
3072005
Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered …
AP Ehiasarian, PE Hovsepian, L Hultman, U Helmersson
Thin solid films 457 (2), 270-277, 2004
2962004
Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
JT Gudmundsson, J Alami, U Helmersson
Surface and Coatings Technology 161 (2-3), 249-256, 2002
2762002
High power pulsed magnetron sputtered CrNx films
AP Ehiasarian, WD Münz, L Hultman, U Helmersson, I Petrov
Surface and coatings technology 163, 267-272, 2003
2432003
A spectroscopic ellipsometry study of cerium dioxide thin films grown on sapphire by rf magnetron sputtering
S Guo, H Arwin, SN Jacobsen, K Järrendahl, U Helmersson
Journal of Applied physics 77 (10), 5369-5376, 1995
2331995
Low‐temperature superionic conductivity in strained yttria‐stabilized zirconia
M Sillassen, P Eklund, N Pryds, E Johnson, U Helmersson, J Bøttiger
Advanced Functional Materials 20 (13), 2071-2076, 2010
1992010
Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge
JT Gudmundsson, J Alami, U Helmersson
Applied Physics Letters 78 (22), 3427-3429, 2001
1862001
Investigation of high power impulse magnetron sputtering pretreated interfaces for adhesion enhancement of hard coatings on steel
M Lattemann, AP Ehiasarian, J Bohlmark, PÅO Persson, U Helmersson
Surface and Coatings Technology 200 (22-23), 6495-6499, 2006
1832006
Hysteresis-free reactive high power impulse magnetron sputtering
E Wallin, U Helmersson
Thin Solid Films 516 (18), 6398-6401, 2008
1822008
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