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Jiushuai Xu
Jiushuai Xu
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Year
Piezoresistive microcantilevers for humidity sensing
J Xu, M Bertke, HS Wasisto, E Peiner
Journal of Micromechanics and Microengineering 29 (5), 053003, 2019
712019
Fabrication of ZnO nanorods and Chitosan@ ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing
J Xu, M Bertke, X Li, H Mu, H Zhou, F Yu, G Hamdana, A Schmidt, ...
Sensors and Actuators B: Chemical 273, 276-287, 2018
672018
In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection
A Setiono, M Bertke, WO Nyang’au, J Xu, M Fahrbach, I Kirsch, E Uhde, ...
Sensors 20 (3), 618, 2020
232020
Real-time frequency tracking of an electro-thermal piezoresistive cantilever resonator with ZnO nanorods for chemical sensing
A Setiono, J Xu, M Fahrbach, M Bertke, WO Nyang’au, HS Wasisto, ...
Chemosensors 7 (1), 2, 2019
232019
Piezoresistive Microcantilever with SAM-Modified ZnO-Nanorods@Silicon-Nanopillars for Room-Temperature Parts-per-Billion NO2 Detection
J Xu, A Setiono, E Peiner
ACS Applied Nano Materials 3 (7), 6609-6620, 2020
192020
Piezoresistive silicon cantilever covered by ZnO nanorods for humidity sensing
J Yang, J Xu, W Wu, M Bertke, HS Wasisto, E Peiner
Procedia Engineering 168, 1114-1117, 2016
162016
Fabrication of ZnO nanorods on MEMS piezoresistive silicon microcantilevers for environmental monitoring
J Xu, M Bertke, A Gad, F Yu, G Hamdana, A Bakin, E Peiner
Proceedings 1 (4), 290, 2017
152017
Area-selective growth of aligned ZnO nanorod arrays for MEMS device applications
J Xu, K Strempel, H Zhou, A Waag, M Bertke, A Schmidt, E Peiner
Proceedings 2 (13), 887, 2018
132018
Contact resonance spectroscopy for on-the-machine manufactory monitoring
M Bertke, M Fahrbach, G Hamdana, J Xu, HS Wasisto, E Peiner
Sensors and Actuators A: Physical 279, 501-508, 2018
132018
Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection
M Bertke, J Xu, A Setiono, I Kirsch, E Uhde, E Peiner
Journal of Micromechanics and Microengineering 30 (1), 014001, 2019
122019
Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection
M Bertke, J Xu, M Fahrbach, A Setiono, HS Wasisto, E Peiner
Sensors 19 (4), 901, 2019
122019
Self-actuating and self-sensing ZNO nanorods/chitosan coated piezoresistive silicon microcantilever for humidit Y sensing
J Xu, M Bertke, X Li, H Mu, F Yu, A Schmidt, A Bakin, E Peiner
2018 IEEE Micro Electro Mechanical Systems (MEMS), 206-209, 2018
122018
Comparative study of electroless copper film on different self-assembled monolayers modified ABS substrate
J Xu, R Fan, J Wang, M Jia, X Xiong, F Wang
International journal of molecular sciences 15 (4), 6412-6422, 2014
122014
Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement
A Setiono, WO Nyang’au, M Fahrbach, J Xu, M Bertke, HS Wasisto, ...
Journal of Micromechanics and Microengineering 29 (12), 124006, 2019
102019
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
A Setiono, M Fahrbach, J Xu, M Bertke, WO Nyang'au, G Hamdana, ...
Journal of Sensors and Sensor Systems 8 (1), 37-48, 2019
102019
Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever
J Xu, M Bertke, X Li, A Gad, H Zhou, HS Wasisto, E Peiner
Smart Sensors, Actuators, and MEMS VIII 10246, 67, 2017
82017
Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing
J Xu, M Bertke, X Li, A Setiono, M Fahrbach, A Schmidt, E Peiner
Proceedings 2 (13), 838, 2018
72018
Piezoresistive microcantilevers 3D-patterned using ZnO-nanorods@ silicon-nanopillars for room-temperature ethanol detection
J Xu, A Setiono, M Bertke, K Strempel, N Markiewicz, A Schmidt, A Waag, ...
2019 20th International Conference on Solid-State Sensors, Actuators and†…, 2019
62019
Phase characteristic optimization of resonant MEMS environmental sensors
A Setiono, M Fahrbach, M Bertke, J Xu, G Hamdana, HS Wasisto, ...
Sensors and Measuring Systems; 19th ITG/GMA-Symposium, 1-4, 2018
52018
Ultra Low Power Mass-Producible Gas Sensor Based on Efficient Self-Heated GaN Nanorods
N Markiewicz, O Casals, MF Fatahilah, J Xu, A Schmidt, HS Wasisto, ...
2019 20th International Conference on Solid-State Sensors, Actuators and†…, 2019
42019
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