Follow
Philip Gröger
Philip Gröger
Qoniac GmbH
Verified email at qoniac.com
Title
Cited by
Cited by
Year
Silicanin-1 is a conserved diatom membrane protein involved in silica biomineralization
A Kotzsch, P Gröger, D Pawolski, PHH Bomans, NAJM Sommerdijk, ...
BMC biology 15, 1-16, 2017
822017
Establishing super-resolution imaging for proteins in diatom biosilica
P Gröger, N Poulsen, J Klemm, N Kröger, M Schlierf
Scientific reports 6 (1), 36824, 2016
292016
Slow interconversion in a heterogeneous unfolded-state ensemble of outer-membrane phospholipase A
G Krainer, P Gracia, E Frotscher, A Hartmann, P Gröger, S Keller, ...
Biophysical Journal 113 (6), 1280-1289, 2017
272017
Bacterial initiators form dynamic filaments on single-stranded DNA monomer by monomer
HM Cheng, P Gröger, A Hartmann, M Schlierf
Nucleic acids research 43 (1), 396-405, 2015
212015
ATPase and protease domain movements in the bacterial AAA+ protease FtsH are driven by thermal fluctuations
M Ruer, G Krainer, P Gröger, M Schlierf
Journal of molecular biology 430 (22), 4592-4602, 2018
122018
Optimizing focus and dose process windows for robust process control using a multi-feature analysis
P Groeger, R Khurana, A Mitra, M Eggleston, S Buhl, WS Kim, X Thrun
Metrology, Inspection, and Process Control for Semiconductor Manufacturing …, 2021
22021
Real-time full-wafer design-based inter-layer virtual metrology
L Yin, J Sturtevant, AL Gomez, S Shang, YC Kim, K Adam, M Chew, ...
Metrology, Inspection, and Process Control for Microlithography XXXIV 11325 …, 2020
22020
Focus leveling improvement using optimized wafer edge settings
L Lamonds, B Orf, M Frachel, X Thrun, G Erley, P Groeger, A Muehle, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (4), 043505-043505, 2019
22019
CD and OCD sampling scheme optimization for HVM environment
C Park, H Lee, D Lee, A Choi, S Buhl, WS Kim, P Groeger, S Guhlemann, ...
Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 …, 2019
22019
Quantifying CD-SEM contact hole roughness and shape combined with machine learning-based pattern fidelity scores for process optimization and monitoring
H Lee, S Lee, H Rah, I Park, J Lee, J Sohn, Y Kim, C Ehrlich, P Groeger, ...
Metrology, Inspection, and Process Control XXXVII 12496, 472-490, 2023
12023
An in-depth look at comprehensive and efficient methodology for CD uniformity budget breakdown
U Denker, P Gröger, X Thrun, S Buhl, M Eggleston, N Doan, G Kawaguchi, ...
Metrology, Inspection, and Process Control XXXVI 12053, 592-597, 2022
12022
Focus budget improvement using optimized wafer edge settings
L Lamonds, B Orf, M Frachel, X Thrun, G Erley, P Groeger, B Habets, ...
Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 …, 2019
12019
Development of novel focus spot detection methods for high-volume manufacturing
SN Mohammad, CJ Tsou, A Chiu, N Birnstein, E deGouw, C Utzny, ...
Optical and EUV Nanolithography XXXVI 12494, 2023
2023
Focus spot monitoring: design of an automatable detection, classification, and impact analysis pipeline
SN Mohammad, S Boese, P Groeger, H Bald, A Lopez-Gomez, C Utzny, ...
Optical and EUV Nanolithography XXXVI 12494, 2023
2023
Method of manufacturing a semiconductor device and process control system for a semiconductor manufacturing assembly
P Gröger
US Patent 11,429,091, 2022
2022
Advanced CD uniformity correction using radial basis function (RBF) models
P Groeger, U Denker, R Zech, S Buhl, M Ruhm, M Kim, H Jang, C Kang, ...
Metrology, Inspection, and Process Control XXXVI 12053, 368-381, 2022
2022
Lithographic apparatus and method of controlling a lithographic apparatus
S Buhl, P Groeger, W Kim
US Patent 11,181,830, 2021
2021
Wafer exposure method using wafer models and wafer fabrication assembly
S Buhl, P Groeger, P Lomtscher
US Patent 11,092,901, 2021
2021
Slow Interconversion in a Conformationally Heterogeneous Unfolded-State Ensemble of Outer Membrane Phospholipase A
G Krainer, P Gracia, E Frotscher, N Chamachi, A Hartmann, P Gröger, ...
Biophysical Journal 114 (3), 243a, 2018
2018
Establishing super-resolution imaging of biosilica-embedded proteins in diatoms
P Gröger
TU Dresden, 2017
2017
The system can't perform the operation now. Try again later.
Articles 1–20