Yoshikazu HIRAI
Yoshikazu HIRAI
Assistant Professor, Kyoto University
Bestätigte E-Mail-Adresse bei me.kyoto-u.ac.jp - Startseite
Titel
Zitiert von
Zitiert von
Jahr
Moving mask UV lithography for three-dimensional structuring
Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 17 (2), 199, 2006
822006
Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro
K Kamei, Y Kato, Y Hirai, S Ito, J Satoh, A Oka, T Tsuchiya, Y Chen, ...
RSC advances 7 (58), 36777-36786, 2017
332017
A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D2XRL)
N Matsuzuka, Y Hirai, O Tabata
Journal of Micromechanics and Microengineering 15 (11), 2056, 2005
272005
Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
Y Hirai, S Hafizovic, N Matsuzuka, JG Korvink, O Tabata
Journal of microelectromechanical systems 15 (1), 159-168, 2006
262006
Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist
Y Hirai, K Sugano, T Tsuchiya, O Tabata
Journal of microelectromechanical systems 19 (5), 1058-1069, 2010
212010
Phenotypic and transcriptional modulation of human pluripotent stem cells induced by nano/microfabrication materials
K Kamei, Y Hirai, M Yoshioka, Y Makino, Q Yuan, M Nakajima, Y Chen, ...
Advanced healthcare materials 2 (2), 287-291, 2013
202013
Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
H Yagyu, Y Hirai, A Uesugi, Y Makino, K Sugano, T Tsuchiya, O Tabata
Polymer 53 (21), 4834-4842, 2012
182012
A three-dimensional microstructuring technique exploiting the positive photoresist property
Y Hirai, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 20 (6), 065005, 2010
172010
Experimental study of numerical optimization for 3-D microstructuring using DMD-based grayscale lithography
X Ma, Y Kato, F van Kempen, Y Hirai, T Tsuchiya, F van Keulen, O Tabata
Journal of Microelectromechanical Systems 24 (6), 1856-1867, 2015
162015
X3D: 3D X-ray lithography and development simulation for MEMS
S Hafizovic, Y Hirai, O Tabata, JG Korvink
TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003
162003
Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
K Tsujimoto, Y Hirai, K Sugano, T Tsuchiya, O Tabata
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
15*2011
A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithography
N Matsuzuka, Y Hirai, O Tabata
17th IEEE International Conference on Micro Electro Mechanical Systems …, 2004
152004
Tensile strength of silicon nanowires batch-fabricated into electrostatic MEMS testing device
T Tsuchiya, T Hemmi, J Suzuki, Y Hirai, O Tabata
Applied Sciences 8 (6), 880, 2018
142018
On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet
K Tsujimoto, K Ban, Y Hirai, K Sugano, T Tsuchiya, N Mizutani, O Tabata
Journal of Micromechanics and Microengineering 23 (11), 115003, 2013
122013
High-temperature tensile testing machine for investigation of brittle–ductile transition behavior of single crystal silicon microstructure
A Uesugi, T Yasutomi, Y Hirai, T Tsuchiya, O Tabata
Japanese Journal of Applied Physics 54 (6S1), 06FP04, 2015
112015
Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet
K Ban, Y Hirai, K Tsujimoto, A Terao, N Mizutani, T Kobayashi, O Tabata
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 34 (6 …, 2016
102016
Direct measurement of transversely isotropic DNA nanotube by force–distance curve-based atomic force microscopy
Z Ma, YJ Kim, S Park, Y Hirai, T Tsuchiya, DN Kim, O Tabata
Micro & Nano Letters 10 (10), 513-517, 2015
102015
Prediction Method of 3-D Shape Fabricated by Double Exposure Technique in Deep X-Ray Lithography (D2XRL)
N Matsuzuka, Y Hirai, O Tabata
19th IEEE International Conference on Micro Electro Mechanical Systems, 186-189, 2006
92006
Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device
T Tsuchiya, T Hemmi, J Suzuki, Y Hirai, O Tabata
Procedia Structural Integrity 2, 1405-1412, 2016
82016
ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
Y Hirai, D Takagi, S Anai, Y Chihara, T Tsuchiya, K Fujimoto, Y Hirao, ...
Sensors and Actuators B: Chemical 213, 547-557, 2015
82015
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