| Moving mask UV lithography for three-dimensional structuring Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata Journal of Micromechanics and Microengineering 17 (2), 199, 2006 | 94 | 2006 |
| Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro K Kamei, Y Kato, Y Hirai, S Ito, J Satoh, A Oka, T Tsuchiya, Y Chen, ... RSC advances 7 (58), 36777-36786, 2017 | 90 | 2017 |
| Experimental study of numerical optimization for 3-D microstructuring using DMD-based grayscale lithography X Ma, Y Kato, F Van Kempen, Y Hirai, T Tsuchiya, F Van Keulen, ... Journal of Microelectromechanical Systems 24 (6), 1856-1867, 2015 | 33 | 2015 |
| Tensile strength of silicon nanowires batch-fabricated into electrostatic MEMS testing device T Tsuchiya, T Hemmi, J Suzuki, Y Hirai, O Tabata Applied Sciences 8 (6), 880, 2018 | 31 | 2018 |
| A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D2XRL) N Matsuzuka, Y Hirai, O Tabata Journal of Micromechanics and Microengineering 15 (11), 2056, 2005 | 31 | 2005 |
| Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography Y Hirai, S Hafizovic, N Matsuzuka, JG Korvink, O Tabata Journal of microelectromechanical systems 15 (1), 159-168, 2006 | 27 | 2006 |
| Integrated-gut-liver-on-a-chip platform as an in vitro human model of non-alcoholic fatty liver disease J Yang, Y Hirai, K Iida, S Ito, M Trumm, S Terada, R Sakai, T Tsuchiya, ... Communications Biology 6 (1), 310, 2023 | 26 | 2023 |
| Phenotypic and transcriptional modulation of human pluripotent stem cells induced by nano/microfabrication materials K Kamei, Y Hirai, M Yoshioka, Y Makino, Q Yuan, M Nakajima, Y Chen, ... Advanced healthcare materials 2 (2), 287-291, 2013 | 25 | 2013 |
| Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist Y Hirai, K Sugano, T Tsuchiya, O Tabata Journal of microelectromechanical systems 19 (5), 1058-1069, 2010 | 22 | 2010 |
| Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer K Tsujimoto, Y Hirai, K Sugano, T Tsuchiya, O Tabata 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 21* | 2011 |
| A three-dimensional microstructuring technique exploiting the positive photoresist property Y Hirai, K Sugano, T Tsuchiya, O Tabata Journal of Micromechanics and Microengineering 20 (6), 065005, 2010 | 21 | 2010 |
| Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics H Yagyu, Y Hirai, A Uesugi, Y Makino, K Sugano, T Tsuchiya, O Tabata Polymer 53 (21), 4834-4842, 2012 | 20 | 2012 |
| Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film W Zhang, Y Hirai, T Tsuchiya, O Tabata Applied Surface Science 443, 48-54, 2018 | 16 | 2018 |
| Direct measurement of transversely isotropic DNA nanotube by force–distance curve‐based atomic force microscopy Z Ma, YJ Kim, S Park, Y Hirai, T Tsuchiya, DN Kim, O Tabata Micro & Nano Letters 10 (10), 513-517, 2015 | 16 | 2015 |
| ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis Y Hirai, D Takagi, S Anai, Y Chihara, T Tsuchiya, K Fujimoto, Y Hirao, ... Sensors and Actuators B: Chemical 213, 547-557, 2015 | 16 | 2015 |
| High-temperature tensile testing machine for investigation of brittle–ductile transition behavior of single crystal silicon microstructure A Uesugi, T Yasutomi, Y Hirai, T Tsuchiya, O Tabata Japanese Journal of Applied Physics 54 (6S1), 06FP04, 2015 | 16 | 2015 |
| X3D: 3D X-ray lithography and development simulation for MEMS S Hafizovic, Y Hirai, O Tabata, JG Korvink TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 16 | 2003 |
| A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithography N Matsuzuka, Y Hirai, O Tabata 17th IEEE International Conference on Micro Electro Mechanical Systems …, 2004 | 15 | 2004 |
| Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope Y Shu, Y Hirai, T Tsuchiya, O Tabata Japanese Journal of Applied Physics 58 (SD), SDDL06, 2019 | 14 | 2019 |
| Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded aC: H film Y Xia, Y Hirai, T Tsuchiya Surface and Coatings Technology 405, 126559, 2021 | 13 | 2021 |
Ken-ichiro KameiAssociate Professor, Programs of Biology and Bioengineering, New York University Abu DhabiBestätigte E-Mail-Adresse bei icems.kyoto-u.ac.jp
