| Fabrication and test of a hermetic miniature implant package with 360 electrical feedthroughs M Schuettler, JS Ordonez, TS Santisteban, A Schatz, J Wilde, T Stieglitz 2010 Annual International Conference of the IEEE Engineering in Medicine and …, 2010 | 31 | 2010 |
| Ensuring minimal humidity levels in hermetic implant housings M Schuettler, A Schatz, JS Ordonez, T Stieglitz 2011 Annual International Conference of the IEEE Engineering in Medicine and …, 2011 | 26 | 2011 |
| Towards low-temperature deposition of piezoelectric Pb (Zr, Ti) O3: Influence of pressure and temperature on the properties of pulsed laser deposited Pb (Zr, Ti) O3 A Schatz, D Pantel, T Hanemann Thin Solid Films 636, 680-687, 2017 | 14 | 2017 |
| Pulsed laser deposition of piezoelectric lead zirconate titanate thin films maintaining a post-CMOS compatible thermal budget A Schatz, D Pantel, T Hanemann Journal of Applied Physics 122 (11), 114502, 2017 | 10 | 2017 |
| Fabrication and test of a hermetic miniature implant package with 360 feedthroughs M Schuettler, JS Ordonez, TS Santisteban, A Schatz, J Wilde Proc. IEEE EMBC, 1586-1588, 2010 | 5 | 2010 |
| Cylindrical lens with integrated piezo actuation for focal length tuning and lateral Scanning M Stürmer, A Schatz, U Wallrabe 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 3 | 2014 |
| Application of DoE methods to establish a model for the pulsed laser deposition of PZT thin-films A Schatz, D Pantel, T Hanemann 2016 Joint IEEE International Symposium on the Applications of …, 2016 | 2 | 2016 |
| Influence of Pressure and Temperature on the Growth and Properties of Pulsed Laser Deposited PZT for MEMS A Schatz, D Pantel, T Hanemann | | 2016 |
