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Andreas Schatz
Andreas Schatz
Bestätigte E-Mail-Adresse bei de.bosch.com
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Zitiert von
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Jahr
Fabrication and test of a hermetic miniature implant package with 360 electrical feedthroughs
M Schuettler, JS Ordonez, TS Santisteban, A Schatz, J Wilde, T Stieglitz
2010 Annual International Conference of the IEEE Engineering in Medicine and …, 2010
312010
Ensuring minimal humidity levels in hermetic implant housings
M Schuettler, A Schatz, JS Ordonez, T Stieglitz
2011 annual international conference of the IEEE Engineering in Medicine and …, 2011
272011
Towards low-temperature deposition of piezoelectric Pb (Zr, Ti) O3: Influence of pressure and temperature on the properties of pulsed laser deposited Pb (Zr, Ti) O3
A Schatz, D Pantel, T Hanemann
Thin Solid Films 636, 680-687, 2017
152017
Pulsed laser deposition of piezoelectric lead zirconate titanate thin films maintaining a post-CMOS compatible thermal budget
A Schatz, D Pantel, T Hanemann
Journal of Applied Physics 122 (11), 2017
92017
Fabrication and test of a hermetic miniature implant package with 360 feedthroughs
M Schuettler, JS Ordonez, TS Santisteban, A Schatz, J Wilde
Proc. IEEE EMBC, 1586-1588, 2010
52010
Cylindrical lens with integrated piezo actuation for focal length tuning and lateral scanning
M Stürmer, A Schatz, U Wallrabe
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014
42014
Application of DoE methods to establish a model for the pulsed laser deposition of PZT thin-films
A Schatz, D Pantel, T Hanemann
2016 Joint IEEE International Symposium on the Applications of …, 2016
22016
Gepulste Laserabscheidung von piezoelektrischen Pb(Zr,Ti)O3-Dünnschichten zur Anwendung in mikroelektromechanischen Systemen
A Schatz
2019
Influence of Pressure and Temperature on the Growth and Properties of Pulsed Laser Deposited PZT for MEMS
A Schatz, D Pantel, T Hanemann
2016
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