MEMS process and device RI Laming, M Begbie, A Traynor US Patent 7,781,249, 2010 | 214 | 2010 |
MEMS process and device RI Laming, M Begbie, A Traynor US Patent 7,856,804, 2010 | 135 | 2010 |
Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy M Hart, DG Vass, ML Begbie Applied optics 37 (10), 1764-1769, 1998 | 59 | 1998 |
MEMS device RI Laming, M Begbie US Patent 8,643,129, 2014 | 55 | 2014 |
Design, simulation and characterization of a MEMS optical scanner L Li, M Begbie, G Brown, D Uttamchandani Journal of Micromechanics and Microengineering 17 (9), 1781, 2007 | 29 | 2007 |
Design and simulation of a multi-function MEMS sensor for health and usage monitoring Z Xu, D Koltsov, A Richardson, L Le, M Begbie Prognostics and Health Management Conference, 2010. PHM'10., 1-7, 2010 | 23 | 2010 |
Techniques to improve the flatness of reflective micro-optical arrays K Seunarine, DW Calton, I Underwood, JTM Stevenson, AM Gundlach, ... Sensors and Actuators A: Physical 78 (1), 18-27, 1999 | 18 | 1999 |
Stationary Fourier transform spectrometer for use as a teaching tool AR Harvey, M Begbie, MJ Padgett American journal of physics 62 (11), 1033-1036, 1994 | 18 | 1994 |
Adaptive micro-antenna on silicon substrate N Haridas, AT Erdogan, T Arslan, M Begbie Adaptive Hardware and Systems, 2006. AHS 2006. First NASA/ESA Conference on …, 2006 | 17 | 2006 |
Micro opto electro mechanical device P Blair, J Podlecki, ML Begbie, GJ Burger US Patent 7,003,192, 2006 | 15 | 2006 |
Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators A O'Hara, ID Rankin, ML Begbie, DG Vass, DC Burns, I Underwood, ... Microelectronic Structures and Microelectromechanical Devices for Optical …, 1995 | 15 | 1995 |
Simultaneous determination of the Young's modulus and Poisson's ratio in micro/nano materials L Li, J Gomes, G Brown, D Uttamchandani, W Pan, D Weiland, M Begbie, ... Journal of Micromechanics and Microengineering 19 (12), 125027, 2009 | 14 | 2009 |
Avoiding MEMS failures S Lavu, M Desmulliez, M Begbie, G Bell, I De Wolf Electronics Systems and Software 3 (5), 22-25, 2005 | 14 | 2005 |
Single-input, dual-output MEMS DC/DC converter L Li, M Begbie, D Uttamchandani Electronics Letters 43 (15), 809-810, 2007 | 12 | 2007 |
Ferroelectric liquid crystal over silicon spatial light modulator viewable under continuous illumination DC Burns, ML Begbie, I Underwood, DG Vass Ferroelectrics 181 (1-4), 93-97, 1996 | 8 | 1996 |
Protection of DRAM spatial light modulators from incident light using a multilevel metallization procedure A O'Hara, M Begbie, I Rankin, DC Burns, J Gourlay, I Underwood, ... Solid State Device Research Conference, 1995. ESSDERC'95. Proceedings of the …, 1995 | 5 | 1995 |
A design approach to 2-D electrostatic torsional micromirrors with Z-axis displacement compensation L Li, M Begbie IEEE photonics technology letters 18 (22), 2422-2424, 2006 | 4 | 2006 |
Move from Online Test to Fault-Tolerant: Design and Simulation of a Multi-functional MEMS Sensor Z Xu, A Richardson, M Begbie, CH Wang Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW), 2011 IEEE 17th …, 2011 | 3 | 2011 |
Study of a piezoelectric multimorph based micro-scanner A Chaehoi, M Begbie Microsystem Technologies 14 (7), 963-969, 2008 | 3 | 2008 |
Mueller matrix error correction for a fringe-free interferometry system ML Begbie, W Sibbett, MJ Padgett Applied optics 40 (19), 3205-3210, 2001 | 3 | 2001 |