Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators R Matloub, A Artieda, C Sandu, E Milyutin, P Muralt
APPLIED PHYSICS LETTERS 99 (9), 2011
144 2011 Piezoelectric Al1-xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors R Matloub, M Hadad, A Mazzalai, N Chidambaram, G Moulard, C Sandu, ...
APPLIED PHYSICS LETTERS 102 (15), 2013
141 2013 Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films A Zukauskaite, G Wingqvist, J Palisaitis, J Jensen, POA Persson, ...
JOURNAL OF APPLIED PHYSICS 111 (9), 2012
104 2012 Abnormal grain growth in AlScN thin films induced by complexion formation at crystallite interfaces CS Sandu, F Parsapour, S Mertin, V Pashchenko, R Matloub, T LaGrange, ...
physica status solidi (a) 216 (2), 1800569, 2019
86 2019 Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications A Mazzalai, D Balma, N Chidambaram, R Matloub, P Muralt
67 * Hybrid BAW/SAW AlN and AlScN thin film resonator V Pashchenko, R Matloub, F Parsapourkolour, P Muralt, S Ballandras, ...
2016 IEEE International Ultrasonics Symposium (IUS), 1-4, 2016
37 2016 Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films A Žukauskaitė, G Wingqvist, J Pališaitis, J Jensen, POÅ Persson, ...
Journal of Applied Physics 111 (9), 093527, 2012
25 2012 Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode N Chidambaram, D Balma, R Nigon, A Mazzalai, R Matloub, CS Sandu, ...
Journal of Micromechanics and Microengineering 25 (4), 045016, 2015
20 2015 Optimization of resonant PZT MEMS mirrors by inverse design and electrode segmentation A Piot, J Pribošek, J Maufay, J Schicker, A Tortschanoff, R Matloub, ...
Journal of Microelectromechanical Systems 30 (2), 216-223, 2021
17 2021 Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN KM Howell, W Bashir, A De Pastina, R Matloub, P Muralt, LG Villanueva
Journal of Vacuum Science & Technology A 37 (2), 2019
13 2019 BAW component and method for manufacturing a BAW component G Moulard, P Muralt, R Matloub, T Metzger
US Patent 10,079,334, 2018
12 2018 Fabrication, Characterization, and Simulation of Glass Devices with AG Steckel, H Bruus, P Muralt, R Matloub
Physical Review Applied 16 (1), 014014, 2021
10 2021 A concept of wireless and passive very-high temperature sensor P Nicolay, R Matloub, J Bardong, A Mazzalai, P Muralt
Applied Physics Letters 110 (18), 2017
10 2017 Resonant PZT MEMS mirror with segmented electrodes A Piot, J Pribošek, J Maufay, J Schicker, A Tortschanoff, R Matloub, ...
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
9 2020 MEMS component having AlN and Sc and method for manufacturing a MEMS component G Moulard, P Muralt, R Matloub
US Patent 10,097,152, 2018
4 2018 Piezoelectric coefficients of AlScN thin films in comparison R Matloub, M Hadad, P Murait
2016 IEEE International Frequency Control Symposium (IFCS), 1-2, 2016
4 2016 Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces (Phys. Status Solidi A 2∕ 2019) CS Sandu, F Parsapour, S Mertin, V Pashchenko, R Matloub, T LaGrange, ...
physica status solidi (a) 216 (2), 1970015, 2019
3 2019 Nanostructural tuning of the texture of PZT pervoskite thin films grown by RF sputtering for piezoelectric MEMS A Mazzalai, M Kratzer, R Matloub, C Sandu, P Muralt
MRS Online Proceedings Library 1674 (1), 13-18, 2014
3 2014 Metzger Th., and Muralt P. 2013 R Matloub, M Hadad, A Mazzalai, N Chidambaram, G Moulard, CS Sandu
Appl. Phys. Let 102 (15), 152903, 0
3 Al(1-x)Sc(x)N thin films as promising non-ferroelectric materials for energy harvesting R Matloub, M Hadad, CS Sandu, N Chidambaram, A Mazzalai, G Moulard, ...
2013 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC AND …, 2013
2 2013 