Materials processing by gas cluster ion beams I Yamada, J Matsuo, N Toyoda, A Kirkpatrick
Materials Science and Engineering: R: Reports 34 (6), 231-295, 2001
590 2001 Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams S Ninomiya, K Ichiki, H Yamada, Y Nakata, T Seki, T Aoki, J Matsuo
Rapid Communications in Mass Spectrometry: An International Journal Devoted …, 2009
253 2009 Measurements of secondary ions emitted from organic compounds bombarded with large gas cluster ions S Ninomiya, Y Nakata, K Ichiki, T Seki, T Aoki, J Matsuo
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2007
194 2007 Organic depth profiling of a nanostructured delta layer reference material using large argon cluster ions JLS Lee, S Ninomiya, J Matsuo, IS Gilmore, MP Seah, AG Shard
Analytical chemistry 82 (1), 98-105, 2010
181 2010 Incident angle dependence of the sputtering effect of Ar-cluster-ion bombardment H Kitani, N Toyoda, J Matsuo, I Yamada
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997
115 1997 Molecular depth profiling of multilayer structures of organic semiconductor materials by secondary ion mass spectrometry with large argon cluster ion beams S Ninomiya, K Ichiki, H Yamada, Y Nakata, T Seki, T Aoki, J Matsuo
Rapid Communications in Mass Spectrometry: An International Journal Devoted …, 2009
112 2009 Nano-processing with gas cluster ion beams I Yamada, J Matsuo, Z Insepov, T Aoki, T Seki, N Toyoda
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2000
112 2000 Molecular dynamics simulation of damage formation by cluster ion impact T Aoki, J Matsuo, Z Insepov, I Yamada
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997
105 1997 Generation of the large current cluster ion beam T Seki, J Matsuo, GH Takaoka, I Yamada
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2003
99 2003 Surface treatment of diamond films with Ar and O2 cluster ion beams N Toyoda, N Hagiwara, J Matsuo, I Yamada
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1999
98 1999 Characterization of structural dynamics of M Hada, K Okimura, J Matsuo
Physical Review B 82 (15), 153401, 2010
86 2010 Non-linear processes in the gas cluster ion beam modification of solid surfaces I Yamada, J Matsuo, N Toyoda, T Aoki, E Jones, Z Insepov
Materials Science and Engineering: A 253 (1-2), 249-257, 1998
86 1998 Surface processing by gas cluster ion beams at the atomic (molecular) level I Yamada, J Matsuo, Z Insepov, D Takeuchi, M Akizuki, N Toyoda
Journal of Vacuum Science Technology A: Vacuum Surfaces and Films 14 (3 …, 1996
84 1996 Progress and applications of cluster ion beam technology I Yamada, J Matsuo, N Toyoda, T Aoki, T Seki
Current Opinion in Solid State and Materials Science 19 (1), 12-18, 2015
83 2015 Angular distributions of the particles sputtered with Ar cluster ions N Toyoda, H Kitani, N Hagiwara, T Aoki, J Matsuo, I Yamada
Materials chemistry and physics 54 (1-3), 262-265, 1998
83 1998 Sputtering of elemental metals by Ar cluster ions J Matsuo, N Toyoda, M Akizuki, I Yamada
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997
79 1997 STM observation of HOPG surfaces irradiated with Ar cluster ions T Seki, T Kaneko, D Takeuchi, T Aoki, J Matsuo, Z Insepov, I Yamada
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1997
78 1997 Smoothing of WK Chu, YP Li, JR Liu, JZ Wu, SC Tidrow, N Toyoda, J Matsuo, I Yamada
Applied physics letters 72 (2), 246-248, 1998
76 1998 IEDM Tech. Dig. K Goto, J Matsuo, Y Tada, T Tanaka, Y Momiyama, T Sugii, I Yamada
Tech. Dig, 435-439, 1996
75 1996 Cluster ion beam process technology I Yamada, J Matsuo, N Toyoda
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2003
73 2003 