M.J. de Boer (Meint)
M.J. de Boer (Meint)
Mesa+ Institute for Nanotechnology - University of Twente
Verified email at utwente.nl - Homepage
Title
Cited by
Cited by
Year
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
6061995
A survey on the reactive ion etching of silicon in microtechnology
H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
5031996
Silicon micromachined hollow microneedles for transdermal liquid transport
HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...
Journal of Microelectromechanical systems 12 (6), 855-862, 2003
4742003
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …
HV Jansen, MJ de Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
2822009
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
2752002
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 6,533,949, 2003
2582003
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of microelectromechanical systems 9 (1), 94-103, 2000
2582000
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures
R Legtenberg, H Jansen, M De Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
2171995
BSM 7: RIE lag in high aspect ratio trench etching of silicon
H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
1531997
The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches
H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
1221995
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ...
Sensors and Actuators A: Physical 143 (1), 1-6, 2008
1102008
Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk …
ET Den Braber, HV Jansen, MJ de Boer, HJE Croes, M Elwenspoek, ...
Journal of biomedical materials research 40 (3), 425-433, 1998
1021998
Capillary force lithography: fabrication of functional polymer templates as versatile tools for nanolithography
CM Bruinink, M Péter, PA Maury, M De Boer, L Kuipers, J Huskens, ...
Advanced functional materials 16 (12), 1555-1565, 2006
912006
Micromachined fountain pen for atomic force microscope-based nanopatterning
S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ...
Applied physics letters 85 (22), 5361-5363, 2004
902004
Carrier transport in mesoscopic silicon-coupled superconducting junctions
WM Van Huffelen, TM Klapwijk, DR Heslinga, MJ De Boer, ...
Physical Review B 47 (9), 5170, 1993
901993
The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source
H Jansen, M De Boer, H Wensink, B Kloeck, M Elwenspoek
Microelectronics Journal 32 (9), 769-777, 2001
872001
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
C Rusu, R van't Oever, MJ de Boer, HV Jansen, JW Berenschot, ...
Journal of microelectromechanical systems 10 (2), 238-246, 2001
682001
Advancements in technology and design of biomimetic flow-sensor arrays
CM Bruinink, RK Jaganatharaja, MJ de Boer, E Berenschot, ML Kolster, ...
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009
672009
The black silicon method. VI. High aspect ratio trench etching for MEMS applications
H Jansen, M de Boer, M Elwenspoek
Proceedings of Ninth International Workshop on Micro Electromechanical …, 1996
661996
Microfabrication of near‐field optical probes
AGT Ruiter, MHP Moers, NF Van Hulst, M De Boer
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
581996
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Articles 1–20