| An application of interference microscopy to integrated circuit inspection and metrology M Davidson, K Kaufman, I Mazor, F Cohen Integrated Circuit Metrology, Inspection, & Process Control 775, 233-249, 1987 | 311 | 1987 |
| Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology M Davidson, K Kaufman, I Mazor US Patent 5,112,129, 1992 | 207 | 1992 |
| Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like M Davidson US Patent 4,818,110, 1989 | 182 | 1989 |
| Interferometric back focal plane scatterometry with Koehler illumination MP Davidson US Patent 7,061,623, 2006 | 137 | 2006 |
| A generalization of the Fényes—Nelson stochastic model of quantum mechanics M Davidson Letters in Mathematical Physics 3, 271-277, 1979 | 94 | 1979 |
| Dynamic multi-wavelength switching ensemble M Rabinowitz, M Davidson US Patent 6,738,176, 2004 | 77 | 2004 |
| Aplanatic microlens and method for making same M Davidson US Patent 5,282,088, 1994 | 70 | 1994 |
| Inverse scattering approach to SEM linewidth measurements MP Davidson, AE Vladar Metrology, Inspection, and Process Control for Microlithography XIII 3677 …, 1999 | 65 | 1999 |
| Mini-optics solar energy concentrator M Davidson, M Rabinowitz US Patent 6,612,705, 2003 | 61 | 2003 |
| Mini-optics solar energy concentrator M Rabinowitz, M Davidson US Patent 6,843,573, 2005 | 59 | 2005 |
| A model for the stochastic origins of Schrödinger’s equation M Davidson Journal of Mathematical Physics 20 (9), 1865-1869, 1979 | 59 | 1979 |
| Image sharpness measurement in scanning electron microscopy—part II AE Vladár, MT Postek, MP Davidson Scanning: The Journal of Scanning Microscopies 20 (1), 24-34, 1998 | 55 | 1998 |
| A dynamical theory of Markovian diffusion M Davidson Physica A: Statistical Mechanics and its Applications 96 (3), 465-486, 1979 | 52 | 1979 |
| Comparison between rigorous light-scattering methods MP Davidson, BH Kleemann, J Bischoff Optical Microlithography X 3051, 606-619, 1997 | 40 | 1997 |
| The coherence probe microscope M Davidson, K Kaufman, I Mazor Solid State Technology 30 (9), 57-59, 1987 | 32 | 1987 |
| Compound reference interferometer P De Groot, M Davidson, J Liesener, XC De Lega, LL Deck US Patent 7,978,338, 2011 | 31 | 2011 |
| High-resolution optical metrology RM Silver, R Attota, M Stocker, M Bishop, L Howard, T Germer, E Marx, ... Metrology, Inspection, and Process Control for Microlithography XIX 5752, 67-79, 2005 | 31 | 2005 |
| Linearity of coherence probe metrology: simulation and experiment MP Davidson, KM Monahan, RJ Monteverde Integrated Circuit Metrology, Inspection, and Process Control V 1464, 155-176, 1991 | 31 | 1991 |
| High-resolution optical overlay metrology RM Silver, R Attota, M Stocker, M Bishop, JSJ Jun, E Marx, MP Davidson, ... Metrology, Inspection, and Process Control for Microlithography XVIII 5375 …, 2004 | 30 | 2004 |
| Investigation of the effects of charging in SEM-based CD metrology MP Davidson, NT Sullivan Metrology, Inspection, and Process Control for Microlithography XI 3050, 226-242, 1997 | 30 | 1997 |
Richard SilverNISTVerified email at nist.gov
