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Peter Carleson
Peter Carleson
Bestätigte E-Mail-Adresse bei thermofisher.com
Titel
Zitiert von
Zitiert von
Jahr
Copper device editing: Strategy for focused ion beam milling of copper
JD Casey Jr, M Phaneuf, C Chandler, M Megorden, KE Noll, R Schuman, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002
492002
High-yield and high-throughput TEM sample preparation using focused ion beam automation
R Young, PD Carleson, X Da, T Hunt, JF Walker
Istfa'98: Proceedings of the 24Th International Symposium for Testing and …, 1998
281998
High accuracy beam placement for local area navigation
RJ Young, C Rue, PD Carleson
US Patent 8,059,918, 2011
262011
Subsurface imaging using an electron beam
PD Carleson
US Patent 7,388,218, 2008
232008
Plasma FIB DualBeam delayering for atomic force nanoprobing of 14 nm finFET devices in an SRAM array
R Alvis, T Landin, C Rue, P Carleson, O Sidorov, A Erickson, S Zumwalt, ...
ISTFA 2015, 388-400, 2015
222015
Spatio-spectral characteristics of a high power, high brightness CW InGaAs/AlGaAs unstable resonator semiconductor laser
Z Bao, RK DeFreez, PD Carleson, C Largent, C Moeller, GC Dente
Electronics Letters 18 (29), 1597-1599, 1993
181993
Normal spectral emittance of crystalline transition metal carbides
WA Mackie, P Carleson, J Filion, CH Hinrichs
Journal of applied physics 69 (10), 7236-7239, 1991
131991
High-brightness unstable resonator semiconductor lasers
RK DeFreez, Z Bao, PD Carleson, MK Felisky, CC Largent
Laser Diode Technology and Applications V 1850, 75-83, 1993
121993
Failure analysis of FinFET circuitry at GHz speeds using voltage-contrast and stroboscopic techniques on a scanning electron microscope
J Vickers, S Somani, B Freeman, P Carleson, L Tùma, M Unèovský, ...
ISTFA 2019, 197-203, 2019
112019
Delayering on advanced process technologies using FIB
P Carleson, D Donnet, O Sidorov, C Rue
ISTFA 2014, 430-435, 2014
112014
Advanced sub 0.13 µm Cu Devices–Failure Analysis and Circuit Edit With Improved FIB Chemical Processes and Beam Characteristics
JD Casey, TJ Gannon, A Krechmer, D Monforte, N Antoniou, N Bassom, ...
ISTFA 2002, 553-557, 2002
82002
High accuracy beam placement for local area navigation
RL Warschauer, RJ Young, C Rue, PD Carleson
US Patent 8,781,219, 2014
72014
Developing functional prototypes by package modification using plasma FIB technology
M Gonzales, R Cruz, M Parley, J Lau, M DiBattista, B Routh, T Landin, ...
2012 19th IEEE International Symposium on the Physical and Failure Analysis …, 2012
72012
Effective thermionic work function measurements of zirconium carbide using a computer‐processed image of a thermionic projection microscope pattern
WA Mackie, CH Hinrichs, IM Cohen, JS Alin, DT Schnitzler, P Carleson, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 8 (3 …, 1990
51990
A tool for advanced failure analysis: no longer must you choose either SEM or FIB for failure analysis. Now there's in situ testing using a dual-beam FIB/SEM tool
R Young, P Carleson
EE-Evaluation Engineering 43 (9), 60-63, 2004
42004
End point of silicon milling using an optical beam induced current signal for controlled access to integrated circuits for backside circuit editing
N Antoniou, NJ Bassom, C Huynh, D Monforte, JD Casey, A Krechmer, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002
42002
Design considerations for high-power GaInP/AlGaInP unstable-resonator semiconductor lasers
Z Bao, RK DeFreez, PD Carleson, MK Felisky, C Largent, HB Serreze
Applied optics 32 (36), 7402-7407, 1993
31993
High-power unstable resonator semiconductor laser
RK DeFreez, Z Bao, PD Carleson, C Largcnt, C Moeller, GC Dente, ...
Conference on Lasers and Electro-Optics, CWN3, 1992
31992
High accuracy beam placement for local area navigation
RJ Young, C Rue, PD Carleson, RL Warschauer
US Patent 9,087,366, 2015
22015
Localized FIB delayering on advanced process technologies
D Donnet, O Sidorov, P Carleson, C Rue, R Alvis, S Madala
Proceedings of the 21th International Symposium on the Physical and Failure …, 2014
22014
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