Copper device editing: Strategy for focused ion beam milling of copper JD Casey Jr, M Phaneuf, C Chandler, M Megorden, KE Noll, R Schuman, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002 | 49 | 2002 |
High-yield and high-throughput TEM sample preparation using focused ion beam automation R Young, PD Carleson, X Da, T Hunt, JF Walker Istfa'98: Proceedings of the 24Th International Symposium for Testing and …, 1998 | 28 | 1998 |
High accuracy beam placement for local area navigation RJ Young, C Rue, PD Carleson US Patent 8,059,918, 2011 | 26 | 2011 |
Subsurface imaging using an electron beam PD Carleson US Patent 7,388,218, 2008 | 23 | 2008 |
Plasma FIB DualBeam delayering for atomic force nanoprobing of 14 nm finFET devices in an SRAM array R Alvis, T Landin, C Rue, P Carleson, O Sidorov, A Erickson, S Zumwalt, ... ISTFA 2015, 388-400, 2015 | 22 | 2015 |
Spatio-spectral characteristics of a high power, high brightness CW InGaAs/AlGaAs unstable resonator semiconductor laser Z Bao, RK DeFreez, PD Carleson, C Largent, C Moeller, GC Dente Electronics Letters 18 (29), 1597-1599, 1993 | 18 | 1993 |
Normal spectral emittance of crystalline transition metal carbides WA Mackie, P Carleson, J Filion, CH Hinrichs Journal of applied physics 69 (10), 7236-7239, 1991 | 13 | 1991 |
High-brightness unstable resonator semiconductor lasers RK DeFreez, Z Bao, PD Carleson, MK Felisky, CC Largent Laser Diode Technology and Applications V 1850, 75-83, 1993 | 12 | 1993 |
Failure analysis of FinFET circuitry at GHz speeds using voltage-contrast and stroboscopic techniques on a scanning electron microscope J Vickers, S Somani, B Freeman, P Carleson, L Tùma, M Unèovský, ... ISTFA 2019, 197-203, 2019 | 11 | 2019 |
Delayering on advanced process technologies using FIB P Carleson, D Donnet, O Sidorov, C Rue ISTFA 2014, 430-435, 2014 | 11 | 2014 |
Advanced sub 0.13 µm Cu Devices–Failure Analysis and Circuit Edit With Improved FIB Chemical Processes and Beam Characteristics JD Casey, TJ Gannon, A Krechmer, D Monforte, N Antoniou, N Bassom, ... ISTFA 2002, 553-557, 2002 | 8 | 2002 |
High accuracy beam placement for local area navigation RL Warschauer, RJ Young, C Rue, PD Carleson US Patent 8,781,219, 2014 | 7 | 2014 |
Developing functional prototypes by package modification using plasma FIB technology M Gonzales, R Cruz, M Parley, J Lau, M DiBattista, B Routh, T Landin, ... 2012 19th IEEE International Symposium on the Physical and Failure Analysis …, 2012 | 7 | 2012 |
Effective thermionic work function measurements of zirconium carbide using a computer‐processed image of a thermionic projection microscope pattern WA Mackie, CH Hinrichs, IM Cohen, JS Alin, DT Schnitzler, P Carleson, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 8 (3 …, 1990 | 5 | 1990 |
A tool for advanced failure analysis: no longer must you choose either SEM or FIB for failure analysis. Now there's in situ testing using a dual-beam FIB/SEM tool R Young, P Carleson EE-Evaluation Engineering 43 (9), 60-63, 2004 | 4 | 2004 |
End point of silicon milling using an optical beam induced current signal for controlled access to integrated circuits for backside circuit editing N Antoniou, NJ Bassom, C Huynh, D Monforte, JD Casey, A Krechmer, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002 | 4 | 2002 |
Design considerations for high-power GaInP/AlGaInP unstable-resonator semiconductor lasers Z Bao, RK DeFreez, PD Carleson, MK Felisky, C Largent, HB Serreze Applied optics 32 (36), 7402-7407, 1993 | 3 | 1993 |
High-power unstable resonator semiconductor laser RK DeFreez, Z Bao, PD Carleson, C Largcnt, C Moeller, GC Dente, ... Conference on Lasers and Electro-Optics, CWN3, 1992 | 3 | 1992 |
High accuracy beam placement for local area navigation RJ Young, C Rue, PD Carleson, RL Warschauer US Patent 9,087,366, 2015 | 2 | 2015 |
Localized FIB delayering on advanced process technologies D Donnet, O Sidorov, P Carleson, C Rue, R Alvis, S Madala Proceedings of the 21th International Symposium on the Physical and Failure …, 2014 | 2 | 2014 |