Philipp Hönicke
TitleCited byYear
A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies
J Lubeck, B Beckhoff, R Fliegauf, I Holfelder, P Hönicke, M Müller, ...
Review of Scientific Instruments 84 (4), 045106, 2013
612013
Depth profile characterization of ultra shallow junction implants
P Hönicke, B Beckhoff, M Kolbe, D Giubertoni, J van den Berg, G Pepponi
Analytical and bioanalytical chemistry 396 (8), 2825-2832, 2010
512010
L-subshell fluorescence yields and Coster-Kronig transition probabilities with a reliable uncertainty budget for selected high-and medium-Z elements
M Kolbe, P Hönicke, M Müller, B Beckhoff
Physical Review A 86 (4), 042512, 2012
372012
Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy
P Hönicke, Y Kayser, B Beckhoff, M Müller, JC Dousse, J Hoszowska, ...
Journal of Analytical Atomic Spectrometry 27 (9), 1432-1438, 2012
332012
Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry
M Müller, P Hönicke, B Detlefs, C Fleischmann
Materials 7 (4), 3147-3159, 2014
292014
Experimental Verification of the Individual Energy Dependencies of the Partial L-Shell Photoionization Cross Sections of Pd and Mo
P Hönicke, M Kolbe, M Müller, M Mantler, M Krämer, B Beckhoff
Physical Review Letters 113 (16), 163001, 2014
272014
Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements
A Haase, S Bajt, P Hönicke, V Soltwisch, F Scholze
Journal of applied crystallography 49 (6), 2161-2171, 2016
252016
Grazing-incidence x-ray fluorescence analysis for non-destructive determination of In and Ga depth profiles in Cu (In, Ga) Se2 absorber films
C Streeck, S Brunken, M Gerlach, C Herzog, P Hönicke, CA Kaufmann, ...
Applied Physics Letters 103, 113904, 2013
222013
Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS
L Lobo, B Fernández, R Pereiro, N Bordel, E Demenev, D Giubertoni, ...
Journal of Analytical Atomic Spectrometry 26 (3), 542-549, 2011
192011
Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in silicon
G Pepponi, D Giubertoni, M Bersani, F Meirer, D Ingerle, G Steinhauser, ...
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2010
182010
Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray flourescence
P Hönicke, B Beckhoff, M Kolbe, S List, T Conard, H Struyff
Spectrochimica Acta Part B: Atomic Spectroscopy 63 (12), 1359-1364, 2008
182008
Towards passivation of Ge (100) surfaces by sulfur adsorption from a (NH4) 2S solution: a combined NEXAFS, STM and LEED study
C Fleischmann, S Sioncke, S Couet, K Schouteden, B Beckhoff, M Müller, ...
Journal of The Electrochemical Society 158 (5), H589, 2011
172011
Reference‐free, depth‐dependent characterization of nanolayers and gradient systems with advanced grazing incidence X‐ray fluorescence analysis
P Hönicke, B Detlefs, M Müller, E Darlatt, E Nolot, H Grampeix, B Beckhoff
physica status solidi (a) 212 (3), 523-528, 2015
152015
Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces
SH Nowak, D Banaś, W Błchucki, W Cao, JC Dousse, P Hönicke, ...
Spectrochimica Acta Part B: Atomic Spectroscopy 98, 65-75, 2014
142014
Experimental determination of the oxygen K-shell fluorescence yield using thin SiO 2 and Al 2 O 3 foils
P Hönicke, M Kolbe, M Krumrey, R Unterumsberger, B Beckhoff
Spectrochimica Acta Part B: Atomic Spectroscopy 124, 94-98, 2016
132016
Fundamental parameters of Zr and Ti for a reliable quantitative X‐ray fluorescence analysis
M Kolbe, P Hönicke
X‐Ray Spectrometry 44 (4), 217-220, 2015
132015
Impact of ammonium sulfide solution on electronic properties and ambient stability of germanium surfaces: towards Ge-based microelectronic devices
C Fleischmann, K Schouteden, M Müller, P Hönicke, B Beckhoff, ...
Journal of Materials Chemistry C 1 (26), 4105-4113, 2013
132013
Experimental determination of the x-ray atomic fundamental parameters of nickel
Y Ménesguen, MC Lepy, P Hönicke, M Müller, R Unterumsberger, ...
Metrologia 55 (1), 56, 2017
122017
Ultralow energy boron implants in silicon characterization by nonoxidizing secondary ion mass spectrometry analysis and soft x-ray grazing incidence x-ray fluorescence techniques
D Giubertoni, E Iacob, P Hoenicke, B Beckhoff, G Pepponi, S Gennaro, ...
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2010
122010
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
V Soltwisch, P Hönicke, Y Kayser, J Eilbracht, J Probst, F Scholze, ...
Nanoscale 10 (13), 6177-6185, 2018
112018
The system can't perform the operation now. Try again later.
Articles 1–20