Markus Lutz
Markus Lutz
SiTime
Verified email at sitime.com
Title
Cited by
Cited by
Year
Stapling system configured to produce different formed staple heights
CO Baxter III, JJ Bedi
US Patent 10,258,336, 2019
5132019
Single wafer encapsulation of MEMS devices
RN Candler, WT Park, H Li, G Yama, A Partridge, M Lutz, TW Kenny
IEEE transactions on advanced packaging 26 (3), 227-232, 2003
2142003
A precision yaw rate sensor in silicon micromachining
M Lutz, W Golderer, J Gerstenmeier, J Marek, B Maihofer, S Mahler, ...
Proceedings of International Solid State Sensors and Actuators Conference …, 1997
2111997
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators
RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ...
Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006
1972006
Rotary speed sensor
M Lutz
US Patent 5,728,936, 1998
1531998
Frequency and/or phase compensated microelectromechanical oscillator
A Partridge, M Lutz
US Patent 6,995,622, 2006
1462006
Method of fabricating microelectromechanical systems and devices having trench isolated contacts
A Partridge, M Lutz, S Kronmueller
US Patent 6,936,491, 2005
1452005
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams
RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ...
Journal of Microelectromechanical Systems 15 (4), 927-934, 2006
1232006
Microelectromechanical systems and devices having thin film encapsulated mechanical structures
A Partridge, M Lutz, S Kronmueller
US Patent 7,075,160, 2006
1062006
Rate-of-rotation sensor
M Lutz
US Patent 5,604,312, 1997
1031997
Acceleration sensor
M Offenberg, W Buchholtz, M Lutz
US Patent 5,627,317, 1997
991997
MEMS oscillators for high volume commercial applications
M Lutz, A Partridge, P Gupta, N Buchan, E Klaassen, J McDonald, ...
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007
962007
Anti-stiction technique for electromechanical systems and electromechanical device employing same
M Lutz, A Partridge, W Frey, M Ulm, M Metz, B Stark, G Yama
US Patent 7,449,355, 2008
942008
Microelectromechanical systems, and devices having thin film encapsulated mechanical structures
A Partridge, M Lutz, S Kronmueller
US Patent 7,288,824, 2007
892007
Method for adjusting the frequency of a MEMS resonator
M Lutz, A Partridge
US Patent 7,102,467, 2006
892006
Episeal pressure sensor and method for making an episeal pressure sensor
A Partridge, M Lutz
US Patent 6,928,879, 2005
892005
Temperature compensation for silicon MEMS resonator
M Lutz, A Partridge
US Patent 6,987,432, 2006
832006
Gap tuning for surface micromachined structures in an epitaxial reactor
A Partridge, M Lutz
US Patent 6,808,953, 2004
832004
New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers
A Partridge, AE Rice, TW Kenny, M Lutz
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001
832001
Rotational rate sensor with two acceleration sensors
E Zabler, J Wolf, M Lutz
US Patent 5,703,293, 1997
821997
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