| Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling P Eyben, M Xu, N Duhayon, T Clarysse, S Callewaert, W Vandervorst Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002 | 150 | 2002 |
| Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification K Mylvaganam, LC Zhang, P Eyben, J Mody, W Vandervorst Nanotechnology 20 (30), 305705, 2009 | 133 | 2009 |
| Assessing the performance of two-dimensional dopant profiling techniques N Duhayon, P Eyben, M Fouchier, T Clarysse, W Vandervorst, D Álvarez, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004 | 78 | 2004 |
| Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips D Alvarez, J Hartwich, M Fouchier, P Eyben, W Vandervorst Applied physics letters 82 (11), 1724-1726, 2003 | 74 | 2003 |
| Conductive diamond tips with sub‐nanometer electrical resolution for characterization of nanoelectronics device structures T Hantschel, C Demeulemeester, P Eyben, V Schulz, O Richard, ... physica status solidi (a) 206 (9), 2077-2081, 2009 | 67 | 2009 |
| Progress towards a physical contact model for scanning spreading resistance microscopy P Eyben, S Denis, T Clarysse, W Vandervorst Materials Science and Engineering: B 102 (1-3), 132-137, 2003 | 63 | 2003 |
| Experimental studies of dose retention and activation in fin field-effect-transistor-based structures J Mody, R Duffy, P Eyben, J Goossens, A Moussa, W Polspoel, ... Journal of Vacuum Science & Technology B 28 (1), C1H5-C1H13, 2010 | 57 | 2010 |
| Selective metal-organic chemical vapor deposition growth of high quality GaAs on Si (001) W Guo, V Pena, X Bao, C Merckling, N Waldron, N Collaert, M Caymax, ... Applied Physics Letters 105 (6), 2014 | 56 | 2014 |
| 15nm-WFINhigh-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last process J Mitard, L Witters, R Loo, SH Lee, JW Sun, J Franco, LÅ Ragnarsson, ... 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical …, 2014 | 52 | 2014 |
| Observation of diameter dependent carrier distribution in nanowire-based transistors A Schulze, T Hantschel, P Eyben, AS Verhulst, R Rooyackers, ... Nanotechnology 22 (18), 185701, 2011 | 51 | 2011 |
| Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon P Eyben, F Clemente, K Vanstreels, G Pourtois, T Clarysse, E Duriau, ... Journal of Vacuum Science & Technology B 28 (2), 401-406, 2010 | 49 | 2010 |
| Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects A Schulze, T Hantschel, A Dathe, P Eyben, X Ke, W Vandervorst Nanotechnology 23 (30), 305707, 2012 | 46 | 2012 |
| Probing semiconductor technology and devices with scanning spreading resistance microscopy P Eyben, W Vandervorst, D Alvarez, M Xu, M Fouchier Scanning Probe Microscopy: Electrical and Electromechanical Phenomena at the …, 2007 | 39 | 2007 |
| Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies P Eyben, T Janssens, W Vandervorst Materials Science and Engineering: B 124, 45-53, 2005 | 39 | 2005 |
| Selective area growth of InP on On-Axis Si (001) substrates with low antiphase boundary formation R Loo, G Wang, T Orzali, N Waldron, C Merckling, MR Leys, O Richard, ... Journal of The Electrochemical Society 159 (3), H260, 2012 | 38 | 2012 |
| Active dopant characterization methodology for germanium T Clarysse, P Eyben, T Janssens, I Hoflijk, D Vanhaeren, A Satta, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006 | 38 | 2006 |
| Conformal doping of FINFETs: A fabrication and metrology challenge W Vandervorst, JL Everaert, E Rosseel, M Jurczak, T Hoffman, P Eyben, ... AIP Conference Proceedings 1066 (1), 449-456, 2008 | 37 | 2008 |
| Dopant/carrier profiling for 3D‐structures W Vandervorst, A Schulze, AK Kambham, J Mody, M Gilbert, P Eyben physica status solidi (c) 11 (1), 121-129, 2014 | 35 | 2014 |
| Fundamentals of picoscience KD Sattler CRC Press, 2013 | 33 | 2013 |
| Fundamentals of picoscience KD Sattler CRC Press, 2013 | 33 | 2013 |
Thomas HantschelimecVerified email at imec.be
