Mason Freed
Mason Freed
Google, GMO, Xradia, KLA-Tencor, OnWafer, UC Berkeley
Verified email at mfreed.com
Title
Cited by
Cited by
Year
Maintenance unit for a sensor apparatus
ML Freed, RS Mundt, CJ Spanos
US Patent 7,282,889, 2007
251*2007
Sensor apparatus power transfer, communication and maintenance methods and apparatus
ML Freed, RS Mundt, CJ Spanos
US Patent 7,531,984, 2009
2192009
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
ML Freed, RS Mundt, CJ Spanos
US Patent 6,691,068, 2004
862004
Methods and apparatus for power control
ML Freed
US Patent 6,671,660, 2003
432003
Autonomous on-wafer sensors for process modeling, diagnosis, and control
M Freed, M Kruger, CJ Spanos, K Poolla
IEEE transactions on semiconductor manufacturing 14 (3), 255-264, 2001
392001
Data collection methods and apparatus with parasitic correction
ML Freed
US Patent 6,789,034, 2004
352004
Methods and apparatus for low power delay control
ML Freed
US Patent 6,971,036, 2005
282005
Methods of and apparatuses for measuring electrical parameters of a plasma process
RS Mundt, PD Macdonald, A Beers, ML Freed, CJ Spanos
US Patent 7,960,670, 2011
212011
Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
PD MacDonald, MVP Krüger, M Welch, ML Freed, CJ Spanos
US Patent 7,580,767, 2009
172009
Methods and apparatus for low distortion parameter measurements
D Hunt, CJ Spanos, M Welch, K Poolla, ML Freed
US Patent 7,299,148, 2007
162007
Wafer-grown heat flux sensor arrays for plasma etch processes
M Freed, MVP Kruger, K Poolla, CJ Spanos
IEEE transactions on semiconductor manufacturing 18 (1), 148-162, 2005
102005
Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations
RS Mundt, A Beers, PD Macdonald, ML Freed, D Hunt
US Patent 7,482,576, 2009
72009
Real time in-situ data acquisition using autonomous on-wafer sensor arrays
M Freed, M Kruger, K Poolla, C Spanos
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor …, 2000
62000
Autonomous micro-sensor arrays for process control of semiconductor manufacturing processes
D Fisher, M Freed, C Spanos, K Poolla
Proceedings of the 38th IEEE Conference on Decision and Control (Cat. No …, 1999
61999
Presented: 1999 IEEE International Conference on Control Applications, Aug. 22-26, 1999
D Fisher, M Freed, K Poolla, CJSUC Berkeley
Presentation on Aug 24, 1999
61999
Presented: Proceedings of the 38th Conference on Decision and Control-Dec. 7-10, 1999
D Fisher, M Freed, K Poolla, CJSUC Berkeley
Presentation on Dec 10, 1999
61999
Micro-sensor arrays for calibration, control, and monitoring of semiconductor manufacturing processes
D Fisher, M Freed, C Spanos, K Poolla
Proceedings of the 1999 IEEE International Conference on Control …, 1999
51999
Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
RS Mundt, PD MacDonald, A Beers, ML Freed, CJ Spanos
US Patent 8,698,037, 2014
22014
Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
PD MacDonald, MVP Kruger, M Welch, ML Freed, CJ Spanos
US Patent App. 12/538,066, 2009
22009
In-situ etch rate sensor arrays for plasma etch processes
M Freed
Electronics Research Laboratory, College of Engineering, University of …, 1999
21999
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