Follow
Karl K. Berggren
Karl K. Berggren
Professor of Electrical Engineering, MIT
Verified email at mit.edu - Homepage
Title
Cited by
Cited by
Year
Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates
I Bita, JKW Yang, YS Jung, CA Ross, EL Thomas, KK Berggren
Science 321 (5891), 939-943, 2008
9422008
Using light as a lens for submicron, neutral-atom lithography
G Timp, RE Behringer, DM Tennant, JE Cunningham, M Prentiss, ...
Physical review letters 69 (11), 1636, 1992
5901992
Resolution limits of electron-beam lithography toward the atomic scale
VR Manfrinato, L Zhang, D Su, H Duan, RG Hobbs, EA Stach, ...
Nano letters 13 (4), 1555-1558, 2013
5582013
Kinetic-inductance-limited reset time of superconducting nanowire photon counters
AJ Kerman, EA Dauler, WE Keicher, JKW Yang, KK Berggren, ...
Applied physics letters 88 (11), 2006
5452006
Mach-Zehnder interferometry in a strongly driven superconducting qubit
WD Oliver, Y Yu, JC Lee, KK Berggren, LS Levitov, TP Orlando
Science 310 (5754), 1653-1657, 2005
5452005
Demonstration of sub-3 ps temporal resolution with a superconducting nanowire single-photon detector
B Korzh, QY Zhao, JP Allmaras, S Frasca, TM Autry, EA Bersin, AD Beyer, ...
Nature Photonics 14 (4), 250-255, 2020
5402020
Nanowire single-photon detector with an integrated optical cavity and anti-reflection coating
KM Rosfjord, JKW Yang, EA Dauler, AJ Kerman, V Anant, BM Voronov, ...
Optics express 14 (2), 527-534, 2006
5292006
MoS2 Field-Effect Transistor with Sub-10 nm Channel Length
A Nourbakhsh, A Zubair, RN Sajjad, A Tavakkoli KG, W Chen, S Fang, ...
Nano letters 16 (12), 7798-7806, 2016
4642016
On-chip detection of non-classical light by scalable integration of single-photon detectors
F Najafi, J Mower, NC Harris, F Bellei, A Dane, C Lee, X Hu, P Kharel, ...
Nature communications 6 (1), 5873, 2015
3682015
Microlithography by using neutral metastable atoms and self-assembled monolayers
KK Berggren, A Bard, JL Wilbur, JD Gillaspy, AG Helg, JJ McClelland, ...
Science 269 (5228), 1255-1257, 1995
3541995
Localization of metastable atom beams with optical standing waves: nanolithography at the Heisenberg limit
KS Johnson, JH Thywissen, NH Dekker, KK Berggren, AP Chu, ...
Science 280 (5369), 1583-1586, 1998
3511998
Geometry-dependent critical currents in superconducting nanocircuits
JR Clem, KK Berggren
Physical Review B—Condensed Matter and Materials Physics 84 (17), 174510, 2011
3472011
Microcontact printing on surfaces and derivative articles
GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ...
US Patent 6,180,239, 2001
3422001
Methods of etching articles via microcontact printing
GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ...
US Patent 5,900,160, 1999
3341999
Complex self-assembled patterns using sparse commensurate templates with locally varying motifs
JKW Yang, YS Jung, JB Chang, RA Mickiewicz, A Alexander-Katz, ...
Nature nanotechnology 5 (4), 256-260, 2010
2942010
Templating three-dimensional self-assembled structures in bilayer block copolymer films
A Tavakkoli KG, KW Gotrik, AF Hannon, A Alexander-Katz, CA Ross, ...
Science 336 (6086), 1294-1298, 2012
2912012
Using high-contrast salty development of hydrogen silsesquioxane for sub-10‐nm half-pitch lithography
JKW Yang, KK Berggren
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
2912007
Development of quantum interconnects (quics) for next-generation information technologies
D Awschalom, KK Berggren, H Bernien, S Bhave, LD Carr, P Davids, ...
Prx Quantum 2 (1), 017002, 2021
2902021
A path to ultranarrow patterns using self-assembled lithography
YS Jung, JB Chang, E Verploegen, KK Berggren, CA Ross
Nano Letters 10 (3), 1000-1005, 2010
2872010
Single-photon detectors based on ultranarrow superconducting nanowires
F Marsili, F Najafi, E Dauler, F Bellei, X Hu, M Csete, RJ Molnar, ...
Nano letters 11 (5), 2048-2053, 2011
2772011
The system can't perform the operation now. Try again later.
Articles 1–20