Karl K. Berggren
Karl K. Berggren
Professor of Electrical Engineering, MIT
Verified email at - Homepage
Cited by
Cited by
Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates
I Bita, JKW Yang, YS Jung, CA Ross, EL Thomas, KK Berggren
Science 321 (5891), 939-943, 2008
Using light as a lens for submicron, neutral-atom lithography
G Timp, RE Behringer, DM Tennant, JE Cunningham, M Prentiss, ...
Physical review letters 69 (11), 1636, 1992
Resolution limits of electron-beam lithography toward the atomic scale
VR Manfrinato, L Zhang, D Su, H Duan, RG Hobbs, EA Stach, ...
Nano letters 13 (4), 1555-1558, 2013
Kinetic-inductance-limited reset time of superconducting nanowire photon counters
AJ Kerman, EA Dauler, WE Keicher, JKW Yang, KK Berggren, ...
Applied physics letters 88 (11), 2006
Mach-Zehnder interferometry in a strongly driven superconducting qubit
WD Oliver, Y Yu, JC Lee, KK Berggren, LS Levitov, TP Orlando
Science 310 (5754), 1653-1657, 2005
Demonstration of sub-3 ps temporal resolution with a superconducting nanowire single-photon detector
B Korzh, QY Zhao, JP Allmaras, S Frasca, TM Autry, EA Bersin, AD Beyer, ...
Nature Photonics 14 (4), 250-255, 2020
Nanowire single-photon detector with an integrated optical cavity and anti-reflection coating
KM Rosfjord, JKW Yang, EA Dauler, AJ Kerman, V Anant, BM Voronov, ...
Optics express 14 (2), 527-534, 2006
MoS2 Field-Effect Transistor with Sub-10 nm Channel Length
A Nourbakhsh, A Zubair, RN Sajjad, A Tavakkoli KG, W Chen, S Fang, ...
Nano letters 16 (12), 7798-7806, 2016
On-chip detection of non-classical light by scalable integration of single-photon detectors
F Najafi, J Mower, NC Harris, F Bellei, A Dane, C Lee, X Hu, P Kharel, ...
Nature communications 6 (1), 5873, 2015
Microlithography by using neutral metastable atoms and self-assembled monolayers
KK Berggren, A Bard, JL Wilbur, JD Gillaspy, AG Helg, JJ McClelland, ...
Science 269 (5228), 1255-1257, 1995
Localization of metastable atom beams with optical standing waves: nanolithography at the Heisenberg limit
KS Johnson, JH Thywissen, NH Dekker, KK Berggren, AP Chu, ...
Science 280 (5369), 1583-1586, 1998
Geometry-dependent critical currents in superconducting nanocircuits
JR Clem, KK Berggren
Physical Review B—Condensed Matter and Materials Physics 84 (17), 174510, 2011
Microcontact printing on surfaces and derivative articles
GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ...
US Patent 6,180,239, 2001
Methods of etching articles via microcontact printing
GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ...
US Patent 5,900,160, 1999
Complex self-assembled patterns using sparse commensurate templates with locally varying motifs
JKW Yang, YS Jung, JB Chang, RA Mickiewicz, A Alexander-Katz, ...
Nature nanotechnology 5 (4), 256-260, 2010
Templating three-dimensional self-assembled structures in bilayer block copolymer films
A Tavakkoli KG, KW Gotrik, AF Hannon, A Alexander-Katz, CA Ross, ...
Science 336 (6086), 1294-1298, 2012
Using high-contrast salty development of hydrogen silsesquioxane for sub-10‐nm half-pitch lithography
JKW Yang, KK Berggren
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
Development of quantum interconnects (quics) for next-generation information technologies
D Awschalom, KK Berggren, H Bernien, S Bhave, LD Carr, P Davids, ...
Prx Quantum 2 (1), 017002, 2021
A path to ultranarrow patterns using self-assembled lithography
YS Jung, JB Chang, E Verploegen, KK Berggren, CA Ross
Nano Letters 10 (3), 1000-1005, 2010
Single-photon detectors based on ultranarrow superconducting nanowires
F Marsili, F Najafi, E Dauler, F Bellei, X Hu, M Csete, RJ Molnar, ...
Nano letters 11 (5), 2048-2053, 2011
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