| Anisotropic etching of cristalline silicon in alkaline solutions. II. Influence of dopants H Seidel, L Csepregi, A Heuberger, H Baumgärtel J. Electrochem. Soc 137 (11), 3626-3632, 1990 | 2113* | 1990 |
| Anisotropic etching of crystalline silicon in alkaline solutions I. Orientation dependence and behavior of passivation layers H Seidel, L Csepregi, A Heuberger, H Baumgärtel Journal of the Electrochemical Society 137 (11), 3612-3626, 1990 | 2095* | 1990 |
| Micromechanical structure W Kroy, H Seidel, E Dette, M Koniger, P Deimel, F Binder, R Hilpert US Patent 5,252,294, 1993 | 228 | 1993 |
| Resonant accelerometer with self-test M Aikele, K Bauer, W Ficker, F Neubauer, U Prechtel, J Schalk, H Seidel Sensors and Actuators A: Physical 92 (1-3), 161-167, 2001 | 151 | 2001 |
| Capacitive silicon accelerometer with highly symmetrical design H Seidel, H Riedel, R Kolbeck, G Mück, W Kupke, M Königer Sensors and Actuators A: Physical 21 (1-3), 312-315, 1990 | 143 | 1990 |
| A silicon microvalve with combined electromagnetic/electrostatic actuation D Bosch, B Heimhofer, G Mück, H Seidel, U Thumser, W Welser Sensors and Actuators A: Physical 37, 684-692, 1993 | 132 | 1993 |
| The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films A Ababneh, U Schmid, J Hernando, JL Sánchez-Rojas, H Seidel Materials Science and Engineering: B 172 (3), 253-258, 2010 | 123 | 2010 |
| X‐Ray Investigation of Boron‐and Germanium‐Doped Silicon Epitaxial Layers HJ Herzog, L Csepregi, H Seidel Journal of the Electrochemical Society 131 (12), 2969-2974, 1984 | 122 | 1984 |
| Micromechanical actuator D Bosch, H Seidel, G Muck US Patent 5,322,258, 1994 | 111 | 1994 |
| The mechanism of anisotropic silicon etching and its relevance for micromachining H Seidel Research and Development. Technical-Scientific Publications (1956-1987 …, 1987 | 109 | 1987 |
| Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out R Voss, K Bauer, W Ficker, T Gleissner, W Kupke, M Rose, S Sassen, ... Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 103 | 1997 |
| A piezoresistive silicon accelerometer with monolithically integrated CMOS-circuitry H Seidel, U Fritsch, R Gottinger, J Schalk, J Walter, K Ambaum Proceedings of the International Solid-State Sensors and Actuators …, 1995 | 76 | 1995 |
| Power MEMS—A capacitive vibration-to-electrical energy converter with built-in voltage I Kuehne, A Frey, D Marinkovic, G Eckstein, H Seidel Sensors and Actuators A: Physical 142 (1), 263-269, 2008 | 72 | 2008 |
| A new approach for MEMS power generation based on a piezoelectric diaphragm I Kuehne, D Marinkovic, G Eckstein, H Seidel Sensors & Actuators: A. Physical 142 (1), 292-297, 2008 | 67 | 2008 |
| Design optimization for cantilever-type accelerometers H Seidel, L Csepregi Sensors and actuators 6 (2), 81-92, 1984 | 59 | 1984 |
| Modal optimization and filtering in piezoelectric microplate resonators JL Sanchez-Rojas, J Hernando, A Donoso, JC Bellido, T Manzaneque, ... Journal of micromechanics and microengineering 20 (5), 055027, 2010 | 58 | 2010 |
| The mechanism of anisotropic, electrochemical silicon etching in alkaline solutions H Seidel IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop, 86-91, 1990 | 56 | 1990 |
| Three-dimensional structuring of silicon for sensor applications H Seidel, L Csepregi Sensors and Actuators 4, 455-463, 1983 | 54 | 1983 |
| Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures J Toledo, T Manzaneque, J Hernando-García, J Vázquez, A Ababneh, ... Microsystem technologies 20 (4-5), 945-953, 2014 | 48 | 2014 |
| Sensor having a resonance structure, especially an acceleration or rotation rate sensor, and a device for carrying out a self-test J Schalk, E Stenzel, K Bauer, R Freitag, R Hilser, R Voss, M Aikele, ... US Patent 6,564,637, 2003 | 48 | 2003 |
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