Observations of ion-beam formation in a current-free double layer X Sun, AM Keesee, C Biloiu, EE Scime, A Meige, C Charles, RW Boswell
Physical review letters 95 (2), 025004, 2005
168 2005 An alternative method for gas temperature determination in nitrogen plasmas: Fits of the bands of the first positive system (B Π3g→ A Σ3u+) C Biloiu, X Sun, Z Harvey, E Scime
Journal of Applied Physics 101 (7), 2007
80 2007 Amorphous fluorocarbon polymer films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor. II. Dielectric and … C Biloiu, IA Biloiu, Y Sakai, H Sugawara, A Ohta
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (4 …, 2004
75 2004 Parallel velocity and temperature of argon ions in an expanding, helicon source driven plasma X Sun, C Biloiu, R Hardin, EE Scime
Plasma Sources Science and Technology 13 (3), 359, 2004
74 2004 Determination of rotational and vibrational temperatures of a nitrogen helicon plasma C Biloiu, X Sun, Z Harvey, E Scime
Review of scientific instruments 77 (10), 2006
56 2006 Flow, flow shear, and related profiles in helicon plasmas E Scime, R Hardin, C Biloiu, AM Keesee, X Sun
Physics of plasmas 14 (4), 2007
48 2007 Laser induced fluorescence in a pulsed argon plasma E Scime, C Biloiu, C Compton, F Doss, D Venture, J Heard, E Choueiri, ...
Review of Scientific Instruments 76 (2), 2005
48 2005 Time-resolved measurements of double layer evolution in expanding plasma EE Scime, IA Biloiu, J Carr, SC Thakur, M Galante, A Hansen, ...
Physics of plasmas 17 (5), 2010
39 2010 Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence C Biloiu, X Sun, E Choueiri, F Doss, E Scime, J Heard, R Spektor, ...
Plasma Sources Science and Technology 14 (4), 766, 2005
38 2005 Ion beam acceleration in a divergent magnetic field IA Biloiu, EE Scime, C Biloiu
Applied physics letters 92 (19), 2008
37 2008 Scanning internal probe for plasma particle, fluctuation, and LIF tomographic measurements C Biloiu, E Scime, X Sun, B McGeehan
Review of scientific instruments 75 (10), 4296-4298, 2004
28 2004 One-and two-dimensional laser induced fluorescence at oblique incidence IA Biloiu, EE Scime, C Biloiu
Plasma Sources Science and Technology 18 (2), 025012, 2009
27 2009 Plasma Sources Sci. Technol X Sun, C Biloiu, R Hardin, EE Scime
Plasma Sources Sci. Technol 13 (359), 2004
26 2004 Extreme edge uniformity control A Likhanskii, M Petterson, J Hautala, A Renau, CA Rowland, C Biloiu
US Patent 10,665,433, 2020
22 2020 Spectral plasma temperature determination of thermionic vacuum arc in the titanium vapors C Biloiu, H Ehrich, G Musa
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (3 …, 2001
19 2001 Apparatus and techniques to treat substrates using directional plasma and reactive gas S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ...
US Patent 9,706,634, 2017
18 2017 In situ control of ion angular distribution in a processing apparatus C Biloiu, N Munoz, L Godet, A Renau
US Patent 9,293,301, 2016
18 2016 High density helicon plasma source for wide ribbon ion beam generation C Biloiu, A Perel, J Scheuer
US Patent 8,142,607, 2012
16 2012 Apparatus and techniques to treat substrates using directional plasma and reactive gas S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ...
US Patent 10,004,133, 2018
15 2018 Techniques for providing a multimode ion source P Kurunczi, R Dorai, C Biloiu, W Platow
US Patent 7,812,321, 2010
15 2010