| Surface profiling by analysis of white-light interferograms in the spatial frequency domain P De Groot, L Deck Journal of modern optics 42 (2), 389-401, 1995 | 547 | 1995 |
| High-speed noncontact profiler based on scanning white-light interferometry L Deck, P De Groot Applied optics 33 (31), 7334-7338, 1994 | 514 | 1994 |
| Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms P de Groot, L Deck Optics letters 18 (17), 1462-1464, 1993 | 396 | 1993 |
| Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window P De Groot Applied optics 34 (22), 4723-4730, 1995 | 352 | 1995 |
| Principles of interference microscopy for the measurement of surface topography P de Groot Advances in Optics and Photonics 7 (1), 1-65, 2015 | 300 | 2015 |
| Ranging and velocimetry signal generation in a backscatter-modulated laser diode PJ de Groot, GM Gallatin, SH Macomber Applied optics 27 (21), 4475-4480, 1988 | 289 | 1988 |
| Determination of fringe order in white-light interference microscopy P de Groot, XC de Lega, J Kramer, M Turzhitsky Applied optics 41 (22), 4571-4578, 2002 | 272 | 2002 |
| Vibration in phase-shifting interferometry PJ De Groot JOSA A 12 (2), 354-365, 1995 | 252 | 1995 |
| Measurement of transparent plates with wavelength-tuned phase-shifting interferometry P De Groot Applied Optics 39 (16), 2658-2663, 2000 | 246 | 2000 |
| Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry P de Groot US Patent 6,359,692, 2002 | 223 | 2002 |
| Signal modeling for low-coherence height-scanning interference microscopy P de Groot, XC de Lega Applied optics 43 (25), 4821-4830, 2004 | 215 | 2004 |
| Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms P De Groot US Patent 5,398,113, 1995 | 207 | 1995 |
| Profiling complex surface structures using scanning interferometry PJ De Groot, R Stoner, XC De Lega US Patent 7,271,918, 2007 | 177 | 2007 |
| Interferometry method and system including spectral decomposition XC De Lega, P De Groot US Patent 7,636,168, 2009 | 165 | 2009 |
| Coherence scanning interferometry P Groot Optical measurement of surface topography, 187-208, 2011 | 156* | 2011 |
| Infrared scanning interferometry apparatus and method XC De Lega, P De Groot, LL Deck US Patent 6,195,168, 2001 | 130 | 2001 |
| Interferometric optical systems having simultaneously scanned optical path length and focus PJ De Groot, XC De Lega, S Balasubramaniam US Patent 7,012,700, 2006 | 115 | 2006 |
| Interpreting interferometric height measurements using the instrument transfer function PD Groot, XC Lega Fringe 2005, 30-37, 2006 | 114 | 2006 |
| Extending the unambiguous range of two-color interferometers PJ De Groot Applied optics 33 (25), 5948-5953, 1994 | 111 | 1994 |
| Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures PJ De Groot US Patent 7,139,081, 2006 | 110 | 2006 |
Xavier Colonna de LegaZygo CorporationVerified email at zygo.com
