| High temperature chuck for plasma processing systems TQ Tran, S Malik, D Lubomirsky, SN Roy, S Kobayashi, TS Cho, S Park, ... US Patent 9,728,437, 2017 | 132 | 2017 |
| High temperature chuck for plasma processing systems TQ Tran, S Malik, D Lubomirsky, SN Roy, S Kobayashi, TS Cho, S Park, ... US Patent 10,468,285, 2019 | 104 | 2019 |
| High pressure wafer processing systems and related methods Q Liang, SD Nemani, A Khan, VR Kasibhotla, S Malik, SS Kang, KT Wong US Patent App. 15/917,365, 2018 | 37 | 2018 |
| In-situ CVD and ALD coating of chamber to control metal contamination S Malik, SD Nemani, Q Liang, A Khan, M Clemons US Patent 10,704,141, 2020 | 26 | 2020 |
| Gas delivery system for high pressure processing chamber AM Khan, Q Liang, S Malik, KT Wong, SD Nemani US Patent 10,179,941, 2019 | 25 | 2019 |
| Gas delivery module AM Khan, Q Liang, S Malik, SD Nemani US Patent 10,748,783, 2020 | 23 | 2020 |
| Optically heralded microwave photon addition W Jiang, FM Mayor, S Malik, R Van Laer, TP McKenna, RN Patel, ... Nature Physics 19 (10), 1423-1428, 2023 | 22* | 2023 |
| High pressure wafer processing systems and related methods Q Liang, SD Nemani, A Khan, VR Kasibhotla, S Malik, SS Kang, KT Wong US Patent 10,224,224, 2019 | 22 | 2019 |
| Processing apparatus A Khan, Q Liang, S Malik, SD Nemani US Patent App. 16/510,848, 2020 | 21 | 2020 |
| Gas delivery system for high pressure processing chamber A Khan, Q Liang, S Malik, KT Wong, SD Nemani US Patent App. 16/230,637, 2019 | 21 | 2019 |
| Gas abatement apparatus A Khan, Q Liang, S Malik, S Nemani, R Smati, J Ng, J O'hehir US Patent 10,675,581, 2020 | 17 | 2020 |
| High pressure wafer processing systems and related methods Q Liang, SD Nemani, AM Khan, VR Kasibhotla, S Malik, S Kang, KT Wong US Patent 10,529,603, 2020 | 16 | 2020 |
| Substrate support with in situ wafer rotation SD Nemani, SN Roy, S Malik, V Babayan US Patent App. 15/657,190, 2018 | 3 | 2018 |
| Pin-less substrate transfer apparatus and method for a processing chamber S Malik, SD Nemani, AM Khan, Q Liang US Patent 11,948,828, 2024 | 2 | 2024 |
| Flexible integration of gigahertz nanomechanical resonators with a superconducting microwave resonator using a bonded flip-chip method S Malik, W Jiang, F M. Mayor, T Makihara, A H. Safavi-Naeini Applied Physics Letters 123 (10), 2023 | 1 | 2023 |
| Heterogeneous integration of high kinetic inductance resonator with thin-film lithium niobate nanomechanical resonators S Malik, W Jiang, F Mayor, R Gruenke, T Makihara, K Multani, A Cleland, ... APS March Meeting Abstracts 2022, B34. 005, 2022 | 1 | 2022 |
| Semiconductor processing system S Malik, SD Nemani, Q Liang, AM Khan US Patent 11,749,555, 2023 | | 2023 |
| Optically heralded microwave photons FM Mayor, W Jiang, S Malik, R Van Laër, TP McKenna, RN Patel, ... CLEO: Fundamental Science, FTh4A. 1, 2023 | | 2023 |
| Direct piezoelectric transduction to a silicon single-mode acoustic waveguide O Hitchcock, W Jiang, F Mayor, M Maksymowych, S Malik, ... APS March Meeting Abstracts 2023, Z67. 002, 2023 | | 2023 |
| Optically heralded microwave photons-Part 1 F Mayor, W Jiang, S Malik, R Van Laer, T McKenna, R Patel, J Witmer, ... APS March Meeting Abstracts 2023, M67. 002, 2023 | | 2023 |
Amir Safavi-NaeiniAssociate Professor of Applied Physics and EE (by courtesy), Ginzton Lab, Stanford UniversityBestätigte E-Mail-Adresse bei stanford.edu
